Abstract:
Improved protective metallization arrangements are described that are particularly useful in bumped copper-top type semiconductor chips. In one aspect of the invention, the semiconductor device includes integrated circuits and has a top wafer fabrication passivation layer. A plurality of I/O pads are exposed through contact pad openings formed in the top wafer fabrication passivation layer. A patterned copper layer is formed over the top wafer fabrication passivation layer. The patterned copper layer is electrically coupled to the contact pads through the contact pad openings. A metallic barrier layer is provided between the contact pads and the patterned copper layer. A titanium metallization layer overlies at least portions of the patterned copper layer and preferably cooperates with the barrier layer to envelop the copper layer in the regions of the contact pads. A first aluminum metallization layer overlies at least portions of the titanium metallization layer. An electrically insulating protective layer overlies the first aluminum metallization layer and the top wafer fabrication passivation layer. The protective layer is preferably formed from an organic material and includes a plurality of contact openings. Underbump metallization stacks are formed in the contact openings. Each underbump metallization stack is electrically connected to the first aluminum metallization layer through its associated contact opening in the protective layer. Solder bumps are preferably then adhered to the underbump metallization stacks.
Abstract:
Multichip packages and methods for making same. The present invention generally allows for either the back of a flipchip, the back of a mother die, or both to be exposed in a multichip package. When the mother die is connected to the package contacts, the back of the flip chip is higher than the electrical connections. Accordingly, the back of the flip chip can be exposed. Furthermore, if a temporary tape substrate is used with a leadframe panel that does not have a die attach pad, the package can be even thinner. Once the temporary tape substrate is removed, both the back of the flipchip and the back of the mother die will be exposed from the encapsulant.
Abstract:
Multichip packages and methods for making same. The present invention generally allows for either the back of a flipchip, the back of a mother die, or both to be exposed in a multichip package. When the mother die is connected to the package contacts, the back of the flip chip is higher than the electrical connections. Accordingly, the back of the flip chip can be exposed. Furthermore, if a temporary tape substrate is used with a leadframe panel that does not have a die attach pad, the package can be even thinner. Once the temporary tape substrate is removed, both the back of the flipchip and the back of the mother die will be exposed from the encapsulant.
Abstract:
In one aspect of the invention, a lead frame panel suitable for use in packaging an array of integrated circuits is described. The lead frame panel includes a matrix of tie bars that extend in substantially perpendicular rows and columns to define a two dimensional array of immediately adjacent device areas separated only by the tie bars. Each device area is suitable for use in an independent integrated circuit package and includes a die attach pad and a plurality of conductive contacts. In another aspect of the invention, a panel assembly suitable for use in simultaneously packaging a multiplicity of integrated circuits is described. The panel assembly includes a lead frame panel formed from a conductive sheet. The lead frame panel is patterned to define at least one two dimensional array of adjacent device areas. Each device area is suitable for use as part of an independent integrated circuit package and including a die and a plurality of contacts positioned around and electrically connected to the die. A molded cap is also provided that substantially uniformly covers a two dimensional array of adjacent device areas while leaving bottom surfaces of the conductive contacts exposed to facilitate electrical connection to external components. The encapsulation material that forms the molded cap is exposed at a bottom surface of the panel of integrated circuits to physically isolate the contacts.
Abstract:
A package, a method of making and a method of assembly of packages for semiconductor chips are disclosed. The package includes a die attach pad on which a semiconductor die is mounted. A lead is electrically connected to the semiconductor die which is encapsulated in packaging material. The lead is exposed at opposed sides of the package. Exposing the lead on both sides of the package allows the package to be stacked or assembled so that the leads of adjacent pairs of packages are in electrical contact. Making the semiconductor packages includes forming a piece of electrically conductive material into a die attach pad and at least one lead associated with the die attach pad. A semiconductor die is mounted on the die attach pad and an electrical connection is made between the semiconductor die and the lead. The package is formed by encapsulation with the lead exposed on opposite sides of the package.
Abstract:
An integrated circuit package with lead fingers with a footprint on the order of the integrated circuit footprint is provided. A lead frame may be made from a metal sheet, which may be stamped or etched. The lead frame provides a plurality of posts and a connecting sheet connecting the plurality of posts. Dice are adhesively mounted to the plurality of posts. The dice have a conductive side with a plurality of conducting pads where each conducting pad is electrically and mechanically connected to a post. An encapsulating material is placed over the dice and lead frame, with the connecting sheet keeping the encapsulating material on one side of the lead frame. Parts of the connecting sheet are then removed, electrically isolating the posts. The integrated circuit packages formed by the encapsulated dice and leads may be tested as a panel, before the integrated circuit packages are singulated.
Abstract:
An improved wafer based packaging arrangement for integrated circuits is disclosed. In one aspect of the invention, external contacts are formed for the packaged integrated circuits by contact studs formed from bonding wires. One end of each contact studs is ball bonded to an associated wafer bond pad. An elongated portion of each wire (contact stud) extends outward the wafer surface and terminates at a second end that forms an external contact. Filling material surrounds a significant portion of the contact studs to hold the studs in place but leaves at least a portion of the second ends exposed to form external contacts. In some embodiments, the external contacts are substantially coplanar with the surface of the filling material, while in others, a protrusion beyond the filling material surface is left to form a contact bump. The wafers are eventually diced to form discrete packaged integrated circuits having external contacts formed by the contact studs.
Abstract:
A method for forming a capacitive micromachined ultrasonic transducer (CMUT) includes forming multiple CMUT elements in a first semiconductor-on-insulator (SOI) structure. Each CMUT element includes multiple CMUT cells. The first SOI structure includes a first handle wafer, a first buried layer, and a first active layer. The method also includes forming a membrane over the CMUT elements and forming electrical contacts through the first handle wafer and the first buried layer. The electrical contacts are in electrical connection with the CMUT elements. The membrane could be formed by bonding a second SOI structure to the first SOI structure, where the second SOI structure includes a second handle wafer, a second buried layer, and a second active layer. The second handle wafer and the second buried layer can be removed, and the membrane includes the second active layer.
Abstract:
The invention includes a die-level opto-electronic device with a semiconductor die and a photonic device including a conductive structure formed in the die away from the edges of the die. The conductive structure is electrically connected to the photonic device. The device also includes an optically transparent laminate attached to overlay the photonic device. The invention also comprises a semiconductor wafer with a plurality of photonic devices exposed on a first surface and a plurality of conductive structures being exposed on a second surface opposing the first surface. The conductive structures are electrically connected to the photonic devices which are overlaid with an optically transparent laminate. The invention further includes methods of forming die-level opto-electronic devices and semiconductor wafers.
Abstract:
A method for producing chip scale IC packages includes the step of mounting a lead frame panel on a temporary support fixture in order to provide support and protection during the manufacturing process. An embodiment of the temporary support fixture includes a sheet of sticky tape secured to a rigid frame. The rigid frame maintains tension in the sheet of sticky tape to provide a stable surface to which the lead frame panel can be affixed. Installation of IC chips and encapsulation in protective casings is performed as in conventional IC package manufacturing. If encapsulant material is to be dispensed over the IC chips, an encapsulant dam can be formed around the lead frame panel to contain the flow of encapsulant material. The temporary support fixture can be used in any IC package manufacturing process in which lead frames require supplemental support.