公开(公告)号：US08865252B2

公开(公告)日：2014-10-21

申请号：US13031756

申请日：2011-02-22

申请人： Yong Sup Choi ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

发明人： Yong Sup Choi ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

IPC分类号： C23C16/00 ,  B05D5/06 ,  H01L21/677 ,  H01L51/56 ,  H01L21/67 ,  H01L21/673 ,  H01L21/687

CPC分类号： H01L21/6776 ,  H01L21/67173 ,  H01L21/6732 ,  H01L21/68764 ,  H01L51/56

摘要： A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

摘要翻译： 可以容易地用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。 薄膜沉积装置包括：装载单元，将作为沉积靶的基板放置在静电卡盘上; 包括室的沉积单元和设置在室中并在放置在静电卡盘上的基板上形成薄膜的薄膜沉积组件; 卸载单元，用于将其上完成了沉积的基板从静电卡盘分离; 第一传送单元，其顺序地将其上具有基板的静电卡盘移动到装载单元，到沉积单元，最后到达卸载单元，其中第一传送单元包括：一对第一导轨和一对第二传送单元 平行布置的导轨; 分别与所述第一导轨接合的至少一个第一引导块; 以及分别与第二导轨接合的至少一个第二引导块。

公开(公告)号：US08384087B2

公开(公告)日：2013-02-26

申请号：US12805995

申请日：2010-08-27

申请人： Yong-Duck Son ,  Ki-Yong Lee ,  Joon-Hoo Choi ,  Min-Jae Jeong ,  Seung-Kyu Park ,  Kil-Won Lee ,  Jae-Wan Jung ,  Dong-Hyun Lee ,  Byung-Soo So ,  Hyun-Woo Koo ,  Ivan Maidanchuk ,  Jong-Won Hong ,  Heung-Yeol Na ,  Seok-Rak Chang

发明人： Yong-Duck Son ,  Ki-Yong Lee ,  Joon-Hoo Choi ,  Min-Jae Jeong ,  Seung-Kyu Park ,  Kil-Won Lee ,  Jae-Wan Jung ,  Dong-Hyun Lee ,  Byung-Soo So ,  Hyun-Woo Koo ,  Ivan Maidanchuk ,  Jong-Won Hong ,  Heung-Yeol Na ,  Seok-Rak Chang

IPC分类号： H01L27/14

CPC分类号： H01L29/66757 ,  H01L27/1277 ,  H01L27/3262

摘要： A thin film transistor includes a substrate, a buffer layer on the substrate, a semiconductor layer including source/drain regions and a channel region on the buffer layer, a gate insulating layer corresponding to the channel region, a gate electrode corresponding to the channel region, and source/drain electrodes electrically connected to the semiconductor layer. A polysilicon layer of the channel region may include only a low angle grain boundary, and a high angle grain boundary may be disposed in a region of the semiconductor layer that is apart from the channel region.

摘要翻译： 薄膜晶体管包括衬底，衬底上的缓冲层，包括源极/漏极区域和缓冲层上的沟道区域的半导体层，对应于沟道区域的栅极绝缘层，对应于沟道区域的栅电极 以及与半导体层电连接的源极/漏极。 沟道区域的多晶硅层可以仅包括低角度晶界，并且可以在离开沟道区域的半导体层的区域中设置高角度晶界。

公开(公告)号：US20120000986A1

公开(公告)日：2012-01-05

申请号：US13009279

申请日：2011-01-19

申请人： Min-Jae JEONG ,  Ki-Yong Lee ,  Jong-Won Hong ,  Heung-Yeol Na ,  Eu-Gene Kang ,  Seok-Rak Chang ,  Jin-Wook Seo ,  Tae-Hoon Yang ,  Yun-Mo Chung ,  Byung-Soo Soo ,  Byoung-Keon Park ,  Dong-Hyun Lee ,  Kil-Won Lee ,  Won-Bong Baek ,  Jong-Ryuk Park ,  Bo-Kyung Choi ,  Ivan Maidanchuk ,  Jae-Wan Jung

发明人： Min-Jae JEONG ,  Ki-Yong Lee ,  Jong-Won Hong ,  Heung-Yeol Na ,  Eu-Gene Kang ,  Seok-Rak Chang ,  Jin-Wook Seo ,  Tae-Hoon Yang ,  Yun-Mo Chung ,  Byung-Soo Soo ,  Byoung-Keon Park ,  Dong-Hyun Lee ,  Kil-Won Lee ,  Won-Bong Baek ,  Jong-Ryuk Park ,  Bo-Kyung Choi ,  Ivan Maidanchuk ,  Jae-Wan Jung

IPC分类号： F24D5/00

CPC分类号： C23C16/4481 ,  C23C16/45525 ,  C23C16/52

摘要： A canister for a deposition apparatus and a deposition apparatus using the same, and more particularly, a canister for a deposition apparatus that can provide a uniform amount of source material contained in a reaction gas supplied into a deposition chamber and improve safety in the supply of the source material, and a deposition apparatus using the canister. The deposition apparatus includes a deposition chamber; a canister supplying a reaction gas into the deposition chamber; and a carrier gas supplier for supplying a carrier gas into the canister, in which the canister includes a main body, a heating unit heating the main body and a temperature measuring unit disposed under the main body.

摘要翻译： 一种用于沉积设备的罐和使用其的沉积设备，更具体地，涉及一种用于沉积设备的罐，其可以提供均匀量的源材料，所述源材料包含在供应到沉积室中的反应气体中，并且提高了供应 源材料和使用该罐的沉积装置。 沉积设备包括沉积室; 向所述沉积室供应反应气体的罐; 以及载体气体供给器，用于将载气供应到罐中，其中罐包括主体，加热单元加热主体，温度测量单元设置在主体下方。

公开(公告)号：US20110244120A1

公开(公告)日：2011-10-06

申请号：US13031756

申请日：2011-02-22

申请人： Yong Sup CHOI ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

发明人： Yong Sup CHOI ,  Myeng-Woo Nam ,  Jong-Won Hong ,  Seok-Rak Chang ,  Eun-Sun Choi

IPC分类号： B05D5/06 ,  B05C13/00 ,  B05B1/00 ,  B05B15/04

CPC分类号： H01L21/6776 ,  H01L21/67173 ,  H01L21/6732 ,  H01L21/68764 ,  H01L51/56

摘要： A thin film deposition apparatus that can be easily used to manufacture large-sized display devices on a mass scale and that improves manufacturing yield, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus. The thin film deposition apparatus includes: a loading unit to place a substrate, which is a deposition target, on an electrostatic chuck; a deposition unit including a chamber, and a thin film deposition assembly that is disposed in the chamber and forms a thin film on the substrate placed on the electrostatic chuck; an unloading unit to separate the substrate on which deposition is completed from the electrostatic chuck; a first conveyor unit to sequentially move the electrostatic chuck having the substrate thereon to the loading unit, to the deposition unit, and finally, to the unloading unit, wherein the first conveyor unit includes: one pair of first guide rails and one pair of second guide rails disposed in parallel; at least one first guide block engaged with the first guide rails, respectively; and at least one second guide block engaged with the second guide rails, respectively.

摘要翻译： 可以容易地用于大规模制造大尺寸显示装置并提高制造成品率的薄膜沉积装置，以及通过使用薄膜沉积装置制造有机发光显示装置的方法。 薄膜沉积装置包括：装载单元，将作为沉积靶的基板放置在静电卡盘上; 包括室的沉积单元和设置在室中并在放置在静电卡盘上的基板上形成薄膜的薄膜沉积组件; 卸载单元，用于将其上完成了沉积的基板从静电卡盘分离; 第一传送单元，其顺序地将其上具有基板的静电卡盘移动到装载单元，到沉积单元，最后到达卸载单元，其中第一传送单元包括：一对第一导轨和一对第二传送单元 平行布置的导轨; 分别与所述第一导轨接合的至少一个第一引导块; 以及分别与第二导轨接合的至少一个第二引导块。

公开(公告)号：US20110114963A1

公开(公告)日：2011-05-19

申请号：US12805995

申请日：2010-08-27

申请人： Yong-Duck Son ,  Ki-Yong Lee ,  Joon-Hoo Choi ,  Min-Jae Jeong ,  Seung-Kyu Park ,  Kil-Won Lee ,  Jae-Wan Jung ,  Dong-Hyun Lee ,  Byung-Soo So ,  Hyun-Woo Koo ,  Ivan Maidanchuk ,  Jong-Won Hong ,  Heung-Yeol Na ,  Seok-Rak Chang

发明人： Yong-Duck Son ,  Ki-Yong Lee ,  Joon-Hoo Choi ,  Min-Jae Jeong ,  Seung-Kyu Park ,  Kil-Won Lee ,  Jae-Wan Jung ,  Dong-Hyun Lee ,  Byung-Soo So ,  Hyun-Woo Koo ,  Ivan Maidanchuk ,  Jong-Won Hong ,  Heung-Yeol Na ,  Seok-Rak Chang

IPC分类号： H01L51/52 ,  H01L29/786 ,  H01L21/336

CPC分类号： H01L29/66757 ,  H01L27/1277 ,  H01L27/3262

摘要： A thin film transistor includes a substrate, a buffer layer on the substrate, a semiconductor layer including source/drain regions and a channel region on the buffer layer, a gate insulating layer corresponding to the channel region, a gate electrode corresponding to the channel region, and source/drain electrodes electrically connected to the semiconductor layer. A polysilicon layer of the channel region may include only a low angle grain boundary, and a high angle grain boundary may be disposed in a region of the semiconductor layer that is apart from the channel region.

摘要翻译： 薄膜晶体管包括衬底，衬底上的缓冲层，包括源极/漏极区域和缓冲层上的沟道区域的半导体层，对应于沟道区域的栅极绝缘层，对应于沟道区域的栅电极 以及与半导体层电连接的源极/漏极。 沟道区域的多晶硅层可以仅包括低角度晶界，并且可以在离开沟道区域的半导体层的区域中设置高角度晶界。

公开(公告)号：US07807310B2

公开(公告)日：2010-10-05

申请号：US12034060

申请日：2008-02-20

申请人： Yeong-chan Eun ,  Jun-ho Sauk ,  Seong-jin An ,  Gill-tae Roh ,  Seok-rak Chang

发明人： Yeong-chan Eun ,  Jun-ho Sauk ,  Seong-jin An ,  Gill-tae Roh ,  Seok-rak Chang

IPC分类号： H01M2/00

CPC分类号： H01M8/242 ,  H01M8/0228 ,  H01M8/0232 ,  H01M8/0234 ,  H01M8/0245 ,  H01M8/0247 ,  H01M8/0263 ,  H01M8/0269 ,  H01M8/1009 ,  H01M8/2455 ,  H01M8/2483

摘要： An end plate of an air breathing fuel cell stack and an air breathing fuel cell stack including the same. The air breathing fuel cell stack includes a membrane electrode assembly, including an anode electrode, a cathode electrode, and an electrolyte positioned between the anode electrode and the cathode electrode; and an end plate contacting the membrane electrode assembly. The end plate includes a first surface contacting the membrane electrode assembly, an opposing second surface; and a collector positioned at the first surface and contacting the cathode electrode.

摘要翻译： 空气呼吸燃料电池堆的端板和包括其的空气呼吸燃料电池堆。 空气呼吸燃料电池堆包括膜电极组件，其包括阳极电极，阴极电极和位于阳极电极和阴极电极之间的电解质; 以及与膜电极组件接触的端板。 端板包括接触膜电极组件的第一表面，相对的第二表面; 位于第一表面并接触阴极的集电体。

公开(公告)号：US20100224883A1

公开(公告)日：2010-09-09

申请号：US12714201

申请日：2010-02-26

申请人： Byoung-Keon PARK ,  Tae-Hoo Yang ,  Jin-Wook Seo ,  Ki-Yong Lee ,  Maxim Lisachenko ,  Bo-Kyung Choi ,  Dae-Woo Lee ,  Kil-Won Lee ,  Dong-Hyun Lee ,  Jong-Ryuk Park ,  Ji-Su Ahn ,  Yong-Dae Kim ,  Heung-Yeol Na ,  Min-Jae Jeong ,  Yun-Mo Chung ,  Jong-Won Hong ,  Eu-Gene Kang ,  Seok-Rak Chang ,  Jae-Wan Jung ,  Sang-Yon Yoon

发明人： Byoung-Keon PARK ,  Tae-Hoo Yang ,  Jin-Wook Seo ,  Ki-Yong Lee ,  Maxim Lisachenko ,  Bo-Kyung Choi ,  Dae-Woo Lee ,  Kil-Won Lee ,  Dong-Hyun Lee ,  Jong-Ryuk Park ,  Ji-Su Ahn ,  Yong-Dae Kim ,  Heung-Yeol Na ,  Min-Jae Jeong ,  Yun-Mo Chung ,  Jong-Won Hong ,  Eu-Gene Kang ,  Seok-Rak Chang ,  Jae-Wan Jung ,  Sang-Yon Yoon

IPC分类号： H01L33/16 ,  H01L29/786 ,  H01L21/336 ,  H01L21/20

CPC分类号： H01L29/6675 ,  H01L21/02422 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02667 ,  H01L21/02672 ,  H01L27/1277 ,  H01L29/66757 ,  H01L29/66765 ,  H01L29/78696

摘要： A thin film transistor (TFT) and an organic light emitting diode (OLED) display device. The TFT and the OLED display device include a substrate, a buffer layer disposed on the substrate, a semiconductor layer disposed on the buffer layer, a gate electrode insulated from the semiconductor layer, a gate insulating layer insulating the semiconductor layer from the gate electrode, and source and drain electrodes insulated from the gate electrode and partially connected to the semiconductor layer, wherein the semiconductor layer is formed from a polycrystalline silicon layer crystallized by a metal catalyst and the metal catalyst is removed by gettering using an etchant. In addition, the OLED display device includes an insulating layer disposed on the entire surface of the substrate, a first electrode disposed on the insulating layer and electrically connected to one of the source and drain electrodes, an organic layer, and a second electrode.

摘要翻译： 薄膜晶体管（TFT）和有机发光二极管（OLED）显示装置。 TFT和OLED显示装置包括基板，设置在基板上的缓冲层，设置在缓冲层上的半导体层，与半导体层绝缘的栅电极，将半导体层与栅电极绝缘的栅极绝缘层， 以及与栅电极绝缘并且部分地连接到半导体层的源电极和漏电极，其中半导体层由通过金属催化剂结晶的多晶硅层形成，并且使用蚀刻剂通过吸气除去金属催化剂。 此外，OLED显示装置包括设置在基板的整个表面上的绝缘层，设置在绝缘层上并电连接到源极和漏极之一的第一电极，有机层和第二电极。

公开(公告)号：US07745043B2

公开(公告)日：2010-06-29

申请号：US12038597

申请日：2008-02-27

申请人： Gill-Tae Roh ,  Yeong-Chan Eun ,  Seong-Jin An ,  Seok-Rak Chang ,  Jun-Ho Sauk

发明人： Gill-Tae Roh ,  Yeong-Chan Eun ,  Seong-Jin An ,  Seok-Rak Chang ,  Jun-Ho Sauk

IPC分类号： H01M2/16

CPC分类号： H01M8/241 ,  H01M8/006 ,  H01M8/2457 ,  H01M8/2465 ,  H01M2008/1095

摘要： A planar fuel cell stack, having generators that generate electricity by an electrochemical reaction of a fuel and an oxidizing agent, the generators arranged on a same plane. A beading unit and a protruding portion are formed on a fastening plate and a separator so as to improve structural stiffness thereof. Accordingly, the constituent elements of the stack are fastened with a substantially uniform conjoining pressure compared to a conventional planar stack, and the thickness of the stack of the present invention can be thinner than that of the conventional planar stack.

摘要翻译： 具有通过燃料和氧化剂的电化学反应发电的发电机的平面燃料电池堆，发电机布置在同一平面上。 在紧固板和隔板上形成一个卷边单元和一个突出部分，以提高其结构刚性。 因此，与传统的平面堆叠相比，堆叠的构成元件以基本均匀的结合压力被固定，并且本发明的堆叠的厚度可以比传统的平面堆叠的厚度更薄。

公开(公告)号：US20080299440A1

公开(公告)日：2008-12-04

申请号：US12038597

申请日：2008-02-27

申请人： Gill-Tae Roh ,  Yeong-Chan Eun ,  Seong-Jin An ,  Seok-Rak Chang ,  Jun-Ho Sauk

发明人： Gill-Tae Roh ,  Yeong-Chan Eun ,  Seong-Jin An ,  Seok-Rak Chang ,  Jun-Ho Sauk

IPC分类号： H01M8/02

CPC分类号： H01M8/241 ,  H01M8/006 ,  H01M8/2457 ,  H01M8/2465 ,  H01M2008/1095

摘要： A planar fuel cell stack, having generators that generate electricity by an electrochemical reaction of a fuel and an oxidizing agent, the generators arranged on a same plane. A beading unit and a protruding portion are formed on a fastening plate and a separator so as to improve structural stiffness thereof. Accordingly, the constituent elements of the stack are fastened with a substantially uniform conjoining pressure compared to a conventional planar stack, and the thickness of the stack of the present invention can be thinner than that of the conventional planar stack.

摘要翻译： 具有通过燃料和氧化剂的电化学反应发电的发电机的平面燃料电池堆，发电机布置在同一平面上。 在紧固板和隔板上形成一个卷边单元和一个突出部分，以提高其结构刚性。 因此，与传统的平面堆叠相比，堆叠的构成元件以基本均匀的结合压力被固定，并且本发明的堆叠的厚度可以比传统的平面堆叠的厚度更薄。

公开(公告)号：US09512515B2

公开(公告)日：2016-12-06

申请号：US13492144

申请日：2012-06-08

申请人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

发明人： Seok-Rak Chang ,  Myeng-Woo Nam ,  Hee-Cheol Kang ,  Jong-Heon Kim ,  Jong-Won Hong ,  Uno Chang

IPC分类号： B65G35/00 ,  C23C14/12 ,  C23C14/50 ,  H01L21/67 ,  H01L21/677 ,  H01L21/683

CPC分类号： C23C14/12 ,  B05B12/20 ,  B05B12/22 ,  B05B13/0221 ,  B05D1/60 ,  C23C14/042 ,  C23C14/24 ,  C23C14/50 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/6776 ,  H01L21/67784 ,  H01L21/6831 ,  H01L27/3244 ,  H01L27/3246 ,  H01L51/56

摘要： An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyer unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyer unit passes through inside the chamber, and the first conveyer unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

摘要翻译： 有机层沉积装置以及使用有机层沉积装置的有机发光显示装置的制造方法。 有机层沉积装置包括：静电卡盘，其固定地支撑作为沉积靶的基板; 包括保持真空的室的沉积单元和用于在由静电卡盘固定地支撑的基板上沉积有机层的有机层沉积组件; 以及第一输送单元，用于将固定地支撑所述基板的所述静电卡盘移动到所述沉积单元中，其中所述第一输送单元穿过所述室内部，并且所述第一输送单元包括导向单元，所述引导单元具有用于支撑所述静电卡盘的接收构件 可沿方向移动