公开(公告)号：US07246524B1

公开(公告)日：2007-07-24

申请号：US11120843

申请日：2005-05-02

申请人： Deepesh K. Kholwadwala ,  Gabriel A. Johnston ,  Brandon R. Rohrer ,  Paul C. Galambos ,  Murat Okandan

发明人： Deepesh K. Kholwadwala ,  Gabriel A. Johnston ,  Brandon R. Rohrer ,  Paul C. Galambos ,  Murat Okandan

IPC分类号： G01L7/08

CPC分类号： B64C3/46 ,  F16K99/0001 ,  F16K99/0007 ,  F16K99/0011 ,  F16K99/0013 ,  F16K99/0036 ,  F16K99/0048 ,  F16K99/0051 ,  F16K2099/009

摘要： The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.

摘要翻译： 本发明包括一种新颖的，重量轻的大规模并行装置，其包括微机电（MEMS）流体致动器，以重新配置表面。 每个微流体致动器包括可以充当传感器和致动器两者的独立囊。 每个微流体致动器内的MEMS传感器和MEMS阀协同操作以监测每个气囊内的流体，并且调节进入和离开每个气囊的流体的流动。 当阵列相邻间隔时，微流体致动器可以响应于表面的操作环境的变化而产生任意的表面轮廓。 在本发明的一个实施例中，翼型件的轮廓由多个致动器的独立的伸缩来控制，这些致动器用于移动柔性盖。

公开(公告)号：US07004198B1

公开(公告)日：2006-02-28

申请号：US10894636

申请日：2004-07-20

申请人： Murat Okandan ,  Paul C. Galambos ,  Gilbert L. Benavides ,  Dale L. Hetherington

发明人： Murat Okandan ,  Paul C. Galambos ,  Gilbert L. Benavides ,  Dale L. Hetherington

IPC分类号： F16K37/00

CPC分类号： B01L3/565 ,  B01J2219/00783 ,  B01J2219/0081 ,  B01J2219/00828 ,  B01L3/5027 ,  B01L9/527 ,  B01L2200/027 ,  B01L2300/0816 ,  Y10T137/2191 ,  Y10T137/2224 ,  Y10T137/8242

摘要： An apparatus for simultaneously aligning and interconnecting microfluidic ports is presented. Such interconnections are required to utilize microfluidic devices fabricated in Micro-Electromechanical-Systems (MEMS) technologies, that have multiple fluidic access ports (e.g. 100 micron diameter) within a small footprint, (e.g. 3 mm×6 mm). Fanout of the small ports of a microfluidic device to a larger diameter (e.g. 500 microns) facilitates packaging and interconnection of the microfluidic device to printed wiring boards, electronics packages, fluidic manifolds etc.

摘要翻译： 提出了一种用于同时对准和互连微流体端口的装置。 需要这种互连来利用在微机电系统（MEMS）技术中制造的微流体装置，其在小占地面积内（例如3mm×6mm）具有多个流体通路口（例如100微米直径）。 微流体装置的小端口到较大直径（例如500微米）的扇出促进微流体装置与印刷线路板，电子封装，流体歧管等的封装和互连。

公开(公告)号：US06886916B1

公开(公告)日：2005-05-03

申请号：US10600008

申请日：2003-06-18

申请人： Paul C. Galambos ,  Gilbert L. Benavides ,  Bernhard Jokiel, Jr. ,  Jerome F. Jakubczak II

发明人： Paul C. Galambos ,  Gilbert L. Benavides ,  Bernhard Jokiel, Jr. ,  Jerome F. Jakubczak II

IPC分类号： B41J2/14 ,  B41J2/04

CPC分类号： B41J2/14314

摘要： A surface-micromachined fluid-ejection apparatus is disclosed which utilizes a piston to provide for the ejection of jets or drops of a fluid (e.g. for ink-jet printing). The piston, which is located at least partially inside a fluid reservoir, is moveable into a cylindrical fluid-ejection chamber connected to the reservoir by a microelectromechanical (MEM) actuator which is located outside the reservoir. In this way, the reservoir and fluid-ejection chamber can be maintained as electric-field-free regions thereby allowing the apparatus to be used with fluids that are electrically conductive or which may react or break down in the presence of a high electric field. The MEM actuator can comprise either an electrostatic actuator or a thermal actuator.

摘要翻译： 公开了一种表面微机械流体喷射装置，其利用活塞来提供喷射或液滴的喷射（例如用于喷墨打印）。 至少部分地位于流体储存器内部的活塞可通过位于储存器外部的微机电（MEM）致动器移动到连接到储存器的圆柱形流体排出室中。 以这种方式，储存器和流体喷射室可以保持为无电场区域，从而允许该装置与导电的流体一起使用或者可能在存在高电场的情况下反应或分解。 MEM致动器可以包括静电致动器或热致动器。

公开(公告)号：US06821819B1

公开(公告)日：2004-11-23

申请号：US10370543

申请日：2003-02-20

申请人： Gilbert L. Benavides ,  Paul C. Galambos ,  John A. Emerson ,  Kenneth A. Peterson ,  Rachel K. Giunta ,  David Lee Zamora ,  Robert D. Watson

发明人： Gilbert L. Benavides ,  Paul C. Galambos ,  John A. Emerson ,  Kenneth A. Peterson ,  Rachel K. Giunta ,  David Lee Zamora ,  Robert D. Watson

IPC分类号： H01L2144

CPC分类号： H01L23/4334 ,  H01L23/473 ,  H01L24/48 ,  H01L24/49 ,  H01L2224/05554 ,  H01L2224/05599 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/49171 ,  H01L2224/73265 ,  H01L2224/85399 ,  H01L2224/8592 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01029 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01087 ,  H01L2924/04941 ,  H01L2924/09701 ,  H01L2924/10161 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/15173 ,  H01L2924/16152 ,  H01L2924/16195 ,  H01L2924/181 ,  Y10T137/87153 ,  Y10T137/87249 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2924/00012

摘要： A new architecture for packaging surface micromachined electro-microfluidic devices is presented. This architecture relies on two scales of packaging to bring fluid to the device scale (picoliters) from the macro-scale (microliters). The architecture emulates and utilizes electronics packaging technology. The larger package consists of a circuit board with embedded fluidic channels and standard fluidic connectors (e.g. Fluidic Printed Wiring Board). The embedded channels connect to the smaller package, an Electro-Microfluidic Dual-Inline-Package (EMDIP) that takes fluid to the microfluidic integrated circuit (MIC). The fluidic connection is made to the back of the MIC through Bosch-etched holes that take fluid to surface micromachined channels on the front of the MIC. Electrical connection is made to bond pads on the front of the MIC.

摘要翻译： 提出了一种用于包装表面微加工电微流体装置的新架构。 这种架构依赖于两个尺寸的包装，从宏观尺度（微升）将流体带入设备规模（皮升）。 该架构模拟和利用电子封装技术。 较大的封装由具有嵌入式流体通道的电路板和标准流体连接器（例如Fluidic Printed Wiring Board）组成。 嵌入式通道连接到较小的封装，即将微流体集成电路（MIC）引入流体的电 - 微流体双列直插封装（EMDIP）。 通过博世蚀刻的孔将流体连接制成MIC的背面，该孔将流体接收到MIC前面的表面微加工通道。 电连接到MIC前面的接合焊盘。

公开(公告)号：US06548895B1

公开(公告)日：2003-04-15

申请号：US09790305

申请日：2001-02-21

申请人： Gilbert L. Benavides ,  Paul C. Galambos ,  John A. Emerson ,  Kenneth A. Peterson ,  Rachel K. Giunta ,  David Lee Zamora ,  Robert D. Watson

发明人： Gilbert L. Benavides ,  Paul C. Galambos ,  John A. Emerson ,  Kenneth A. Peterson ,  Rachel K. Giunta ,  David Lee Zamora ,  Robert D. Watson

IPC分类号： H01L2348

CPC分类号： H01L23/4334 ,  H01L23/473 ,  H01L24/48 ,  H01L24/49 ,  H01L2224/05554 ,  H01L2224/05599 ,  H01L2224/45099 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2224/49171 ,  H01L2224/73265 ,  H01L2224/85399 ,  H01L2224/8592 ,  H01L2924/00014 ,  H01L2924/01004 ,  H01L2924/01029 ,  H01L2924/01046 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01087 ,  H01L2924/04941 ,  H01L2924/09701 ,  H01L2924/10161 ,  H01L2924/10253 ,  H01L2924/14 ,  H01L2924/15173 ,  H01L2924/16152 ,  H01L2924/16195 ,  H01L2924/181 ,  Y10T137/87153 ,  Y10T137/87249 ,  H01L2924/00 ,  H01L2224/45015 ,  H01L2924/207 ,  H01L2924/00012

摘要： A new architecture for packaging surface micromachined electro-microfluidic devices is presented. This architecture relies on two scales of packaging to bring fluid to the device scale (picoliters) from the macro-scale (microliters). The architecture emulates and utilizes electronics packaging technology. The larger package consists of a circuit board with embedded fluidic channels and standard fluidic connectors (e.g. Fluidic Printed Wiring Board). The embedded channels connect to the smaller package, an Electro-Microfluidic Dual-Inline-Package (EMDIP) that takes fluid to the microfluidic integrated circuit (MIC). The fluidic connection is made to the back of the MIC through Bosch-etched holes that take fluid to surface micromachined channels on the front of the MIC. Electrical connection is made to bond pads on the front of the MIC.

摘要翻译： 提出了一种用于包装表面微加工电微流体装置的新架构。 这种架构依赖于两个尺寸的包装，从宏观尺度（微升）将流体带入设备规模（皮升）。 该架构模拟和利用电子封装技术。 较大的封装由具有嵌入式流体通道的电路板和标准流体连接器（例如Fluidic Printed Wiring Board）组成。 嵌入式通道连接到较小的封装，即将微流体集成电路（MIC）引入流体的电 - 微流体双列直插封装（EMDIP）。 通过博世蚀刻的孔将流体连接制成MIC的背面，该孔将流体接收到MIC前面的表面微加工通道。 电连接到MIC前面的接合焊盘。

公开(公告)号：US06367915B1

公开(公告)日：2002-04-09

申请号：US09722331

申请日：2000-11-28

申请人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

发明人： Arthur M. Gooray ,  George J. Roller ,  Joseph M. Crowley ,  Paul C. Galambos ,  Frank J. Peter ,  Kevin R. Zavadil ,  Richard C. Givler

IPC分类号： B41J204

CPC分类号： B41J2/14314

摘要： An electrostatic microelectromechanical system (MEMS) based fluid ejector comprises a movable piston structure and a stationary faceplate. A fluid chamber is defined between the piston structure and a substrate. The piston structure 110 may be resiliently mounted on the substrate by one or more spring elements. A fluid to be ejected is supplied in the fluid chamber from a fluid reservoir through a fluid refill hole formed in the substrate. The faceplate includes a nozzle hole through which a fluid jet or drop is ejected. In various exemplary embodiments, the piston structure moves towards the faceplate by electrostatic attraction between the piston structure and the faceplate. As a result of the movement of the piston structure, a portion of the fluid between the piston structure and the faceplate is forced out of the nozzle hole, forming a jet or drop of the fluid.

摘要翻译： 基于静电微机电系统（MEMS）的流体喷射器包括可移动活塞结构和固定面板。 流体室限定在活塞结构和基底之间。 活塞结构110可以通过一个或多个弹簧元件弹性地安装在基底上。 待流出的液体从流体储存器通过形成在衬底中的流体填充孔供应到流体室中。 面板包括喷嘴孔，流体喷射或液滴通过喷嘴孔排出。 在各种示例性实施例中，活塞结构通过活塞结构和面板之间的静电吸引而向面板移动。 作为活塞结构的运动的结果，活塞结构和面板之间的一部分流体被迫从喷嘴孔流出，形成流体的喷射或液滴。

公开(公告)号：US08912502B2

公开(公告)日：2014-12-16

申请号：US13559370

申请日：2012-07-26

申请人： Mark S. Derzon ,  Paul C. Galambos ,  Ronald F. Renzi

发明人： Mark S. Derzon ,  Paul C. Galambos ,  Ronald F. Renzi

IPC分类号： G01T3/00 ,  H01J47/02

CPC分类号： G01T3/008 ,  G01T3/00 ,  H01J47/02

摘要： A neutron detector with monolithically integrated readout circuitry, including: a bonded semiconductor die; an ion chamber formed in the bonded semiconductor die; a first electrode and a second electrode formed in the ion chamber; a neutron absorbing material filling the ion chamber; and the readout circuitry which is electrically coupled to the first and second electrodes. The bonded semiconductor die includes an etched semiconductor substrate bonded to an active semiconductor substrate. The readout circuitry is formed in a portion of the active semiconductor substrate. The ion chamber has a substantially planar first surface on which the first electrode is formed and a substantially planar second surface, parallel to the first surface, on which the second electrode is formed. The distance between the first electrode and the second electrode may be equal to or less than the 50% attenuation length for neutrons in the neutron absorbing material filling the ion chamber.

摘要翻译： 一种具有单片集成读出电路的中子检测器，包括：键合半导体管芯; 形成在所述键合半导体管芯中的离子室; 形成在所述离子室中的第一电极和第二电极; 填充离子室的中子吸收材料; 以及电耦合到第一和第二电极的读出电路。 键合的半导体管芯包括结合到有源半导体衬底的蚀刻半导体衬底。 读出电路形成在有源半导体衬底的一部分中。 离子室具有基本上平面的第一表面，第一电极形成在其上，并且平行于第一表面的基本平坦的第二表面，在其上形成第二电极。 第一电极和第二电极之间的距离可以等于或小于填充离子室的中子吸收材料中的中子的50％衰减长度。

公开(公告)号：US07105098B1

公开(公告)日：2006-09-12

申请号：US10165356

申请日：2002-06-06

申请人： Randy J. Shul ,  Christi G. Willison ,  W. Kent Schubert ,  Ronald P. Manginell ,  Mary-Anne Mitchell ,  Paul C. Galambos

发明人： Randy J. Shul ,  Christi G. Willison ,  W. Kent Schubert ,  Ronald P. Manginell ,  Mary-Anne Mitchell ,  Paul C. Galambos

IPC分类号： B44C1/22

CPC分类号： H01L21/3085 ,  B81C1/00626

摘要： New methods for fabrication of silicon microstructures have been developed. In these methods, an etching delay layer is deposited and patterned so as to provide differential control on the depth of features being etched into a substrate material. Compensation for etching-related structural artifacts can be accomplished by proper use of such an etching delay layer.

摘要翻译： 已经开发了用于制造硅微结构的新方法。 在这些方法中，沉积和图案化蚀刻延迟层，以便对被蚀刻到衬底材料中的特征的深度提供差分控制。 蚀刻相关的结构伪影的补偿可以通过适当地使用这种蚀刻延迟层来实现。

公开(公告)号：US06797187B1

公开(公告)日：2004-09-28

申请号：US10351135

申请日：2003-01-24

申请人： Paul C. Galambos ,  Murat Okandan ,  Stephen Montague ,  James H. Smith ,  Phillip H. Paul ,  Thomas W. Krygowski ,  James J. Allen ,  Christopher A. Nichols ,  Jerome F. Jakubczak, II

发明人： Paul C. Galambos ,  Murat Okandan ,  Stephen Montague ,  James H. Smith ,  Phillip H. Paul ,  Thomas W. Krygowski ,  James J. Allen ,  Christopher A. Nichols ,  Jerome F. Jakubczak, II

IPC分类号： B01D6700

CPC分类号： G01N30/6095 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00828 ,  B01J2219/00853 ,  B01L3/502707 ,  B01L2200/12 ,  B01L2400/0418 ,  G01N27/44773 ,  G01N27/44791 ,  G01N30/0005 ,  G01N30/6069 ,  G01N2030/285 ,  G01N2030/326 ,  G01N30/02 ,  G01N2030/0035

摘要： Microfluidic devices are disclosed which can be manufactured using surface-micromachining. These devices utilize an electroosmotic force or an electromagnetic field to generate a flow of a fluid in a microchannel that is lined, at least in part, with silicon nitride. Additional electrodes can be provided within or about the microchannel for separating particular constituents in the fluid during the flow based on charge state or magnetic moment. The fluid can also be pressurized in the channel. The present invention has many different applications including electrokinetic pumping, chemical and biochemical analysis (e.g. based on electrophoresis or chromatography), conducting chemical reactions on a microscopic scale, and forming hydraulic actuators.

摘要翻译： 公开了可以使用表面微加工制造的微流体装置。 这些装置利用电渗力或电磁场来产生至少部分地用氮化硅衬里的微通道中的流体流。 可以在微通道内或周围提供附加电极，用于基于电荷状态或磁矩在流动期间分离流体中的特定组分。 流体也可以在通道中加压。 本发明具有许多不同的应用，包括电动泵送，化学和生物化学分析（例如基于电泳或色谱法），在微观尺度上进行化学反应，以及形成液压致动器。

公开(公告)号：US06454945B1

公开(公告)日：2002-09-24

申请号：US09703764

申请日：2000-11-01

申请人： Bernhard H. Weigl ,  Paul Yager ,  James P. Brody ,  Mark R. Holl ,  Fred K. Forster ,  Eric Altendorf ,  Paul C. Galambos ,  Margaret Kenny ,  David Schutte ,  Gregory Hixson ,  Diane Zebert ,  Andrew Kamholz ,  Caicai Wu

发明人： Bernhard H. Weigl ,  Paul Yager ,  James P. Brody ,  Mark R. Holl ,  Fred K. Forster ,  Eric Altendorf ,  Paul C. Galambos ,  Margaret Kenny ,  David Schutte ,  Gregory Hixson ,  Diane Zebert ,  Andrew Kamholz ,  Caicai Wu

IPC分类号： B02D1100

CPC分类号： B01D11/0492 ,  A61M1/14 ,  B01D11/0496 ,  B01L3/5027 ,  B01L3/502761 ,  B01L3/502776 ,  B01L2200/0636 ,  B01L2300/0816 ,  B01L2300/0867 ,  B01L2400/0406 ,  B01L2400/0487 ,  G01N15/1484 ,  Y10T436/25375

摘要： This invention provides microfabricated systems for extraction of desired particles from a sample stream containing desired and undesired particles. The sample stream is placed in laminar flow contact with an extraction stream under conditions in which inertial effects are negligible. The contact between the two streams is maintained for a sufficient period of time to allow differential transport of the desired particles from the sample stream into the extraction stream. In a preferred embodiment the differential transport mechanism is diffusion. The extraction system of this invention coupled to a microfabricated diffusion-based mixing device and/or sensing means allows picoliter quantities of fluid to be processed or analyzed on devices no larger than silicon wafers. Such diffusion-based mixing or sensing devices are preferably channel cell systems for detecting the presence and/or measuring the quantity of analyte particles in a sample stream.

摘要翻译： 本发明提供了用于从含有所需和不需要的颗粒的样品流中提取所需颗粒的微制造系统。 在惯性效应可忽略的条件下，将样品流与提取流层流接触。 保持两个物流之间的接触足够的时间，以便将期望的颗粒从样品流中差分输送到萃取物流中。 在优选实施例中，差分传送机构是扩散。 本发明的提取系统耦合到基于微制造的基于扩散的混合装置和/或感测装置允许在不大于硅晶片的装置上处理或分析皮升数量的流体。 这种基于扩散的混合或感测装置优选是用于检测样品流中分析物颗粒的存在和/或测量量的通道电池系统。