发明授权
- 专利标题: MEMS fluidic actuator
- 专利标题(中): MEMS流体致动器
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申请号: US11120843申请日: 2005-05-02
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公开(公告)号: US07246524B1公开(公告)日: 2007-07-24
- 发明人: Deepesh K. Kholwadwala , Gabriel A. Johnston , Brandon R. Rohrer , Paul C. Galambos , Murat Okandan
- 申请人: Deepesh K. Kholwadwala , Gabriel A. Johnston , Brandon R. Rohrer , Paul C. Galambos , Murat Okandan
- 申请人地址: US NM Albuquerque
- 专利权人: Sandia Corporation
- 当前专利权人: Sandia Corporation
- 当前专利权人地址: US NM Albuquerque
- 代理商 William R. Conley
- 主分类号: G01L7/08
- IPC分类号: G01L7/08
摘要:
The present invention comprises a novel, lightweight, massively parallel device comprising microelectromechanical (MEMS) fluidic actuators, to reconfigure the profile, of a surface. Each microfluidic actuator comprises an independent bladder that can act as both a sensor and an actuator. A MEMS sensor, and a MEMS valve within each microfluidic actuator, operate cooperatively to monitor the fluid within each bladder, and regulate the flow of the fluid entering and exiting each bladder. When adjacently spaced in a array, microfluidic actuators can create arbitrary surface profiles in response to a change in the operating environment of the surface. In an embodiment of the invention, the profile of an airfoil is controlled by independent extension and contraction of a plurality of actuators, that operate to displace a compliant cover.
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