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    Chip interconnect wiring structure with low dielectric constant insulator and methods for fabricating the same
    6.
    发明授权
    Chip interconnect wiring structure with low dielectric constant insulator and methods for fabricating the same 失效
    具有低介电常数绝缘体的芯片互连布线结构及其制造方法

    公开(公告)号：US06184121B2

    公开(公告)日：2001-02-06

    申请号：US09112919

    申请日：1998-07-09

    申请人： Leena P. Buchwalter ,  Alessandro Cesare Callegari ,  Stephan Alan Cohen ,  Teresita Ordonez Graham ,  John P. Hummel ,  Christopher V. Jahnes ,  Sampath Purushothaman ,  Katherine Lynn Saenger ,  Jane Margaret Shaw

    发明人： Leena P. Buchwalter ,  Alessandro Cesare Callegari ,  Stephan Alan Cohen ,  Teresita Ordonez Graham ,  John P. Hummel ,  Christopher V. Jahnes ,  Sampath Purushothaman ,  Katherine Lynn Saenger ,  Jane Margaret Shaw

    IPC分类号： H01L214763

    CPC分类号： H01L23/53228 ,  H01L21/7682 ,  H01L23/5222 ,  H01L23/53223 ,  H01L23/53238 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A method to achieve a very low effective dielectric constant in high performance back end of the line chip interconnect wiring and the resulting multilayer structure are disclosed. The process involves fabricating the multilayer interconnect wiring structure by methods and materials currently known in the state of the art of semiconductor processing; removing the intralevel dielectric between the adjacent metal features by a suitable etching process; applying a thin passivation coating over the exposed etched structure; annealing the etched structure to remove plasma damage; laminating an insulating cover layer to the top surface of the passivated metal features; optionally depositing an insulating environmental barrier layer on top of the cover layer; etching vias in the environmental barrier layer, cover layer and the thin passivation layer for terminal pad contacts; and completing the device by fabricating terminal input/output pads. The method obviates issues such as processability and thermal stability associated with low dielectric constant materials by avoiding their use. Since air, which has the lowest dielectric constant, is used as the intralevel dielectric the structure created by this method would possess a very low capacitance and hence fast propagation speeds. Such structure is ideally suitable for high density interconnects required in high performance microelectronic device chips.

    摘要翻译： 公开了一种在线芯片互连布线和所得多层结构的高性能后端中实现非常低的有效介电常数的方法。 该方法涉及通过目前在半导体处理领域中已知的方法和材料制造多层互连布线结构; 通过合适的蚀刻工艺去除相邻金属特征之间的层间电介质; 在暴露的蚀刻结构上施加薄的钝化涂层; 退火蚀刻结构以去除等离子体损伤; 将绝缘覆盖层层压到钝化金属特征的顶表面; 可选地在覆盖层的顶部上沉积绝缘环境阻挡层; 在环境阻挡层，覆盖层和用于端子焊盘触点的薄钝化层中蚀刻通孔; 并通过制造端子输入/输出焊盘来完成该器件。 该方法通过避免其使用而消除了与低介电常数材料相关的加工性和热稳定性等问题。 由于具有最低介电常数的空气被用作体内电介质，所以通过该方法产生的结构将具有非常低的电容并因此具有快速的传播速度。 这种结构理想地适用于高性能微电子器件芯片所需的高密度互连。