Silicon controlled rectifier structure with improved junction breakdown and leakage control
    2.
    发明授权
    Silicon controlled rectifier structure with improved junction breakdown and leakage control 有权
    可控硅整流器结构,具有改进的结击穿和泄漏控制

    公开(公告)号:US08692290B2

    公开(公告)日:2014-04-08

    申请号:US13226838

    申请日:2011-09-07

    摘要: Device structures and design structures for a silicon controlled rectifier, as well as methods for fabricating a silicon controlled rectifier. The device structure includes first and second layers of different materials disposed on a top surface of a device region containing first and second p-n junctions of the silicon controlled rectifier. The first layer is laterally positioned on the top surface in vertical alignment with the first p-n junction. The second layer is laterally positioned on the top surface of the device region in vertical alignment with the second p-n junction. The material comprising the second layer has a higher electrical resistivity than the material comprising the first layer.

    摘要翻译: 可控硅整流器的器件结构和设计结构,以及制造可控硅整流器的方法。 器件结构包括设置在包含可控硅整流器的第一和第二p-n结的器件区域的顶表面上的不同材料的第一和第二层。 第一层横向定位在与第一p-n结垂直对准的顶表面上。 第二层横向定位在与第二p-n结垂直对准的器件区域的顶表面上。 包括第二层的材料具有比包含第一层的材料更高的电阻率。

    Methods for forming back-end-of-line resistive semiconductor structures
    4.
    发明授权
    Methods for forming back-end-of-line resistive semiconductor structures 有权
    形成后端电阻半导体结构的方法

    公开(公告)号:US07977201B2

    公开(公告)日:2011-07-12

    申请号:US12191633

    申请日:2008-08-14

    IPC分类号: H01L21/20

    摘要: In one embodiment, a second metal line embedded in a second dielectric layer overlies a first metal line embedded in a first dielectric layer. A portion of the second dielectric layer overlying the first metal line is recessed employing a photoresist and the second metal line as an etch mask. A doped semiconductor spacer is formed within the recess to provide a resistive link between the first metal line and the second metal line. In another embodiment, a first metal line and a second metal line are embedded in a dielectric layer. An area of the dielectric layer laterally abutting the first and second metal lines is recessed employing a photoresist and the first and second metal lines as an etch mask. A doped semiconductor spacer is formed on sidewalls of the first and second metal lines, providing a resistive link between the first and second metal lines.

    摘要翻译: 在一个实施例中,嵌入在第二介电层中的第二金属线覆盖在嵌入第一介电层中的第一金属线上。 覆盖第一金属线的第二电介质层的一部分是使用光致抗蚀剂凹陷的,而第二金属线作为蚀刻掩模。 在凹槽内形成掺杂半导体衬垫,以在第一金属线和第二金属线之间提供电阻连接。 在另一个实施例中,第一金属线和第二金属线嵌入在电介质层中。 使用光致抗蚀剂和第一和第二金属线作为蚀刻掩模来凹入与第一和第二金属线横向邻接的电介质层的区域。 掺杂半导体衬垫形成在第一和第二金属线的侧壁上,提供第一和第二金属线之间的电阻连接。

    Device structures for a memory cell of a non-volatile random access memory and design structures for a non-volatile random access memory
    6.
    发明授权
    Device structures for a memory cell of a non-volatile random access memory and design structures for a non-volatile random access memory 失效
    用于非易失性随机存取存储器的存储器单元的装置结构和用于非易失性随机存取存储器的设计结构

    公开(公告)号:US07804124B2

    公开(公告)日:2010-09-28

    申请号:US12118241

    申请日:2008-05-09

    IPC分类号: H01L29/788

    摘要: Device and design structures for memory cells in a non-volatile random access memory (NVRAM). The device structure includes a semiconductor body in direct contact with the insulating layer, a control gate electrode, and a floating gate electrode in direct contact with the insulating layer. The semiconductor body includes a source, a drain, and a channel between the source and the drain. The floating gate electrode is juxtaposed with the channel of the semiconductor body and is disposed between the control gate electrode and the insulating layer. A first dielectric layer is disposed between the channel of the semiconductor body and the floating gate electrode. A second dielectric layer is disposed between the control gate electrode and the floating gate electrode.

    摘要翻译: 非易失性随机存取存储器(NVRAM)中存储单元的器件和设计结构。 器件结构包括与绝缘层直接接触的半导体本体,控制栅电极和与绝缘层直接接触的浮栅电极。 半导体本体包括源极,漏极以及源极和漏极之间的沟道。 浮置栅电极与半导体本体的沟道并置并且设置在控制栅电极和绝缘层之间。 第一电介质层设置在半导体本体的沟道和浮栅之间。 第二介电层设置在控制栅电极和浮栅电极之间。