公开(公告)号：US08796651B2

公开(公告)日：2014-08-05

申请号：US12929396

申请日：2011-01-20

申请人： Hiroyasu Shichi ,  Tohru Ishitani ,  Hidemi Koike ,  Kaoru Umemura ,  Eiichi Seya ,  Mitsuo Tokuda ,  Satoshi Tomimatsu ,  Hideo Kashima ,  Muneyuki Fukuda

发明人： Hiroyasu Shichi ,  Tohru Ishitani ,  Hidemi Koike ,  Kaoru Umemura ,  Eiichi Seya ,  Mitsuo Tokuda ,  Satoshi Tomimatsu ,  Hideo Kashima ,  Muneyuki Fukuda

IPC分类号： G21G5/00

CPC分类号： G01N23/20 ,  B23K15/0006 ,  B23K15/0013 ,  G01N1/286 ,  H01J2237/3114 ,  H01J2237/31745

摘要： A sample fabricating method of irradiating a sample with a focused ion beam at an incident angle less than 90 degrees with respect to the surface of the sample, eliminating the peripheral area of a micro sample as a target, turning a specimen stage around a line segment perpendicular to the sample surface as a turn axis, irradiating the sample with the focused ion beam while the incident angle on the sample surface is fixed, and separating the micro sample or preparing the micro sample to be separated. A sample fabricating apparatus for forming a sample section in a sample held on a specimen stage by scanning and deflecting an ion beam, wherein an angle between an optical axis of the ion beam and the surface of the specimen stage is fixed and formation of a sample section is controlled by turning the specimen stage.

摘要翻译： 相对于样品表面以小于90度的入射角照射具有聚焦离子束的样品的样品制造方法，消除作为目标的微量样品的周边区域，将样品台围绕线段 垂直于样品表面作为转动轴线，同时在样品表面上的入射角被固定的同时用聚焦离子束照射样品，并分离微量样品或制备待分离的微量样品。 一种样品制造装置，用于通过扫描和偏转离子束来形成保持在样品台上的样品中的样品部分，其中离子束的光轴与样品台的表面之间的角度被固定并形成样品 通过转动样品台来控制切片。

公开(公告)号：US07791043B2

公开(公告)日：2010-09-07

申请号：US12038358

申请日：2008-02-27

申请人： Eiichi Seya ,  Takashi Nagamatsu

发明人： Eiichi Seya ,  Takashi Nagamatsu

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/20264 ,  H01J2237/20278 ,  H02N2/0025 ,  H02N2/026 ,  H02N2/028

摘要： An electron microscope stage mechanism capable of performing high-accuracy positioning while limiting vibration and drift. An ultrasonic motor is used in a stage drive mechanism, and a fixing mechanism capable of increasing stop stiffness is combined integrally with the motor. That is, a structure in which a piezoelectric actuator of the fixing mechanism is mounted in a pre-load mechanism together with the ultrasonic motor is used. When the stage is fixed by the fixing mechanism after acceleration, deceleration and positioning of the stage performed by the drive mechanism, the piezoelectric actuators positioned on opposite sides of the stage are extended to press the stage.

摘要翻译： 一种能够在限制振动和漂移的同时执行高精度定位的电子显微镜载物台机构。 在舞台驱动机构中使用超声波马达，并且与马达一体地组合能够增加止动刚度的固定机构。 也就是说，使用将固定机构的压电致动器与超声波马达一起安装在预加载机构中的结构。 当通过驱动机构进行加速，减速和定位后，通过固定机构固定载物台时，位于载物台相对两侧的压电致动器被延伸以压下载物台。

公开(公告)号：US5420436A

公开(公告)日：1995-05-30

申请号：US155857

申请日：1993-11-23

申请人： Eiichi Seya ,  Massaaki Ito ,  Soichi Katagiri ,  Tsuneo Terasawa ,  Minoru Hidaka ,  Eiji Takeda ,  Norio Saitou

发明人： Eiichi Seya ,  Massaaki Ito ,  Soichi Katagiri ,  Tsuneo Terasawa ,  Minoru Hidaka ,  Eiji Takeda ,  Norio Saitou

IPC分类号： G01M11/02 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  H01L21/00 ,  G01B9/02

CPC分类号： G03F7/70233

摘要： A technique and exposure apparatus measures, with a high degree of accuracy, figure and placement errors of individual optical elements constituting optics embedded inside of an exposure apparatus or the like, with the optics kept in an embedded state as they are. The system measures the distribution of wavefront distortions in the optics while changing the positions of a light source and an image point inside an exposure field of the optics being observed. Optimal displacements of reflective surfaces constituting the optics are then found by calculation based on the measured distribution of wave-front distortions. Finally, the positions of the reflective surfaces are corrected in accordance with the calculated optimal displacements. The positions of the reflective surfaces are corrected by individually controlling displacements output by a plurality of actuators attached to each reflective surface and by mechanically modifying appropriate portions of the reflective surfaces.

摘要翻译： 技术和曝光装置以高度精确度的方式测量构成放置在曝光装置内部的光学元件的各个光学元件的图形和放置误差，其中光学器件保持处于嵌入状态。 该系统在改变光源的位置和观察到的光学元件的曝光场内的图像点的同时测量光学器件中的波前失真的分布。 然后通过基于波前失真的测量分布的计算来找到构成光学器件的反射表面的最佳位移。 最后，根据计算出的最佳位移校正反射面的位置。 通过单独地控制由附接到每个反射表面的多个致动器输出的位移以及通过机械地改变反射表面的适当部分来校正反射表面的位置。

公开(公告)号：US5235591A

公开(公告)日：1993-08-10

申请号：US641309

申请日：1991-01-15

申请人： Shigeru Nakamura ,  Eiichi Seya ,  Seiichi Mita ,  Masuo Kasai ,  Masahiro Ojima ,  Hiroshi Yasuoka ,  Motoyasu Terao ,  Yoshinori Miyamura ,  Takeshi Nakao ,  Kiyoshi Matsumoto ,  Yoshihiro Hamakawa

发明人： Shigeru Nakamura ,  Eiichi Seya ,  Seiichi Mita ,  Masuo Kasai ,  Masahiro Ojima ,  Hiroshi Yasuoka ,  Motoyasu Terao ,  Yoshinori Miyamura ,  Takeshi Nakao ,  Kiyoshi Matsumoto ,  Yoshihiro Hamakawa

IPC分类号： G11B7/12 ,  G11B7/14 ,  G11B33/14

CPC分类号： G11B7/14 ,  G11B33/14 ,  G11B7/122

摘要： A separation type optical head according to the present invention includes at least a light source portion for emitting collimated beams, a focusing device (a focusing lens) for focusing the collimated beams onto an information recording surface of an optical disc medium, a focal point control mechanism for the position of the spot on the information recording surface, and a photo-detection portion for receiving beams reflected by the information recording surface. The structure is divided into a fixed portion including the light source portion and the photo-detection portion and a movable portion including the focusing device (focusing lens) and the focal point control mechanism. At least the movable portion of the separation type optical head is movably accommodated n a frame (sealing case) for the optical head so as to prevent irregular vibrations of the movable portion due to high speed air flows or turbulence. Furthermore, a focal point control mechanism of an air float type may be employed in the movable portion of the separation type optical head so as to actively utilize the high speed air flow generated due to the rotation of the disc medium to perform a rough adjustment of the focal point of the focusing device.

摘要翻译： 根据本发明的分离型光学头至少包括用于发射准直光束的光源部分，用于将准直光束聚焦到光盘介质的信息记录表面上的聚焦装置（聚焦透镜），焦点控制 在信息记录表面上的位置的机构，以及用于接收由信息记录表面反射的光束的光检测部分。 该结构被分为包括光源部分和光检测部分的固定部分和包括聚焦装置（聚焦透镜）和焦点控制机构的可动部分。 至少分离型光学头的可移动部分可移动地容纳在用于光学头的框架（密封壳体）中，以防止由于高速空气流动或湍流引起的可移动部分的不规则振动。 此外，可以在分离型光学头的可动部分中采用气浮式的焦点控制机构，以便主动地利用由于盘介质的旋转而产生的高速气流来进行粗略调整 聚焦装置的焦点。

公开(公告)号：US20080217534A1

公开(公告)日：2008-09-11

申请号：US12043684

申请日：2008-03-06

申请人： Eiichi SEYA

发明人： Eiichi SEYA

IPC分类号： G01N23/00

CPC分类号： G01N23/2251 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/184 ,  H01L21/67028 ,  H01L21/67748 ,  H01L21/6831

摘要： An object of the present invention is to provide a scanning electron microscope capable of facilitating the cleaning of an electrostatic chuck and also reducing unavailable time due to contamination of the electrostatic chuck. To solve the above problems, there is a proposal of an electron microscope in which a sample is loaded via an auxiliary evacuated chamber in order to carry out measurements and observations using an electron beam, the electron microscope including an electrostatic chuck replacement chamber that is different from the auxiliary evacuated chamber, and a vacuum pump for evacuating the replacement chamber. This configuration eliminates the need to restore a sample chamber to atmospheric pressure for the electrostatic chuck, and also enables effective cleaning of the electrostatic chuck.

摘要翻译： 本发明的目的是提供一种能够有助于清洁静电卡盘的扫描电子显微镜，并且还减少由于静电卡盘的污染引起的不可用时间。 为了解决上述问题，提出了一种电子显微镜，其中通过辅助抽真空室装载样品以便使用电子束进行测量和观察，该电子显微镜包括不同的静电卡盘更换室 来自辅助抽真空室，以及用于抽空置换室的真空泵。 该配置消除了将样品室恢复到静电卡盘的大气压力的需要，并且还能够有效地清洁静电卡盘。

公开(公告)号：US20080191151A1

公开(公告)日：2008-08-14

申请号：US11822386

申请日：2007-07-05

申请人： Hiroyasu Shichi ,  Tohru Ishitani ,  Hidemi Koike ,  Kaoru Umemura ,  Eiichi Seya ,  Mitsuo Tokuda ,  Satoshi Tomimatsu ,  Hideo Kashima ,  Muneyuki Fukuda

发明人： Hiroyasu Shichi ,  Tohru Ishitani ,  Hidemi Koike ,  Kaoru Umemura ,  Eiichi Seya ,  Mitsuo Tokuda ,  Satoshi Tomimatsu ,  Hideo Kashima ,  Muneyuki Fukuda

IPC分类号： G21K1/00 ,  H01J37/08

CPC分类号： G01N23/20 ,  B23K15/0006 ,  B23K15/0013 ,  G01N1/286 ,  H01J2237/3114 ,  H01J2237/31745

摘要： A sample fabricating method of irradiating a sample with a focused ion beam at an incident angle less than 90 degrees with respect to the surface of the sample, eliminating the peripheral area of a micro sample as a target, turning a specimen stage around a line segment perpendicular to the sample surface as a turn axis, irradiating the sample with the focused ion beam while the incident angle on the sample surface is fixed, and separating the micro sample or preparing the micro sample to be separated. A sample fabricating apparatus for forming a sample section in a sample held on a specimen stage by scanning and deflecting an ion beam, wherein an angle between an optical axis of the ion beam and the surface of the specimen stage is fixed and formation of a sample section is controlled by turning the specimen stage.

摘要翻译： 相对于样品表面以小于90度的入射角照射具有聚焦离子束的样品的样品制造方法，消除作为目标的微量样品的周边区域，将样品台围绕线段 垂直于样品表面作为转动轴线，同时在样品表面上的入射角被固定的同时用聚焦离子束照射样品，并分离微量样品或制备待分离的微量样品。 一种样品制造装置，用于通过扫描和偏转离子束来形成保持在样品台上的样品中的样品部分，其中离子束的光轴与样品台的表面之间的角度被固定并形成样品 通过转动样品台来控制切片。

公开(公告)号：US06943945B2

公开(公告)日：2005-09-13

申请号：US10825131

申请日：2004-04-16

申请人： Shuichi Nakagawa ,  Eiichi Seya

发明人： Shuichi Nakagawa ,  Eiichi Seya

IPC分类号： G01N23/225 ,  G02B21/26 ,  H01J37/20 ,  H01L21/68

CPC分类号： G02B21/26

摘要： A two axis stage for microscopes that is thin, has reduced vibration, and is adapted for increased stage transportation speeds is capable of being disposed inside a chamber without changing a floor-projected area. The XY stage comprises a base 1, an X table 2 that can be moved in an X direction on the base 1 by an X feed screw 7, and a Y table 3 that is supported on the X table 2 and movable in a Y direction. A third table 4 is disposed on the base 1, the third table being movable in the Y direction by a Y-feed screw 8 positioned on the base 1. Additionally, a slide unit 14 is disposed on the third table 4, the slide unit 14 being movable in the X direction and connected with the Y table 3.

摘要翻译： 用于显微镜的双轴平台，具有减小的振动，并且适于增加平台传送速度能够设置在室内而不改变地面投影面积。 XY台包括基座1，可以通过X馈送螺钉7在基座1上沿X方向移动的X台2和支撑在X台2上并可沿Y方向移动的Y台3 。 第三台4设置在基座1上，第三台可以通过位于基座1上的Y形进给螺钉8沿Y方向移动。 此外，滑动单元14设置在第三工作台4上，滑动单元14可沿X方向移动并与Y工作台3连接。

公开(公告)号：US06664552B2

公开(公告)日：2003-12-16

申请号：US09985537

申请日：2001-11-05

申请人： Hiroyasu Shichi ,  Tohru Ishitani ,  Hidemi Koike ,  Kaoru Umemura ,  Eiichi Seya ,  Mitsuo Tokuda ,  Satoshi Tomimatsu ,  Hideo Kashima ,  Muneyuki Fukuda

发明人： Hiroyasu Shichi ,  Tohru Ishitani ,  Hidemi Koike ,  Kaoru Umemura ,  Eiichi Seya ,  Mitsuo Tokuda ,  Satoshi Tomimatsu ,  Hideo Kashima ,  Muneyuki Fukuda

IPC分类号： G21G500

CPC分类号： G01N23/20 ,  B23K15/0006 ,  B23K15/0013 ,  G01N1/286 ,  H01J2237/3114 ,  H01J2237/31745

摘要： A sample fabricating method of irradiating a sample with a focused ion beam at an incident angle less than 90 degrees with respect to the surface of the sample, eliminating the peripheral area of a micro sample as a target, turning a specimen stage around a line segment perpendicular to the sample surface as a turn axis, irradiating the sample with the focused ion beam while the incident angle on the sample surface is fixed, and separating the micro sample or preparing the micro sample to be separated. A sample fabricating apparatus for forming a sample section in a sample held on a specimen stage by scanning and deflecting an ion beam, wherein an angle between an optical axis of the ion beam and the surface of the specimen stage is fixed and formation of a sample section is controlled by turning the specimen stage.

摘要翻译： 相对于样品表面以小于90度的入射角照射具有聚焦离子束的样品的样品制造方法，消除作为目标的微量样品的周边区域，将样品台围绕线段 垂直于样品表面作为转动轴线，同时在样品表面上的入射角被固定的同时用聚焦离子束照射样品，并分离微量样品或制备待分离的微量样品。 一种样品制造装置，用于通过扫描和偏转离子束来形成保持在样品台上的样品中的样品部分，其中离子束的光轴与样品台的表面之间的角度被固定并形成样品 通过转动样品台来控制切片。

公开(公告)号：US5601686A

公开(公告)日：1997-02-11

申请号：US642510

申请日：1996-05-03

申请人： Yoshio Kawamura ,  Yoshifumi Kawamoto ,  Fumihiko Uchida ,  Kenichi Mizuishi ,  Natsuki Yokoyama ,  Eiichi Murakami ,  Yoshinori Nakayama ,  Eiichi Seya

发明人： Yoshio Kawamura ,  Yoshifumi Kawamoto ,  Fumihiko Uchida ,  Kenichi Mizuishi ,  Natsuki Yokoyama ,  Eiichi Murakami ,  Yoshinori Nakayama ,  Eiichi Seya

IPC分类号： B65G49/00 ,  B65G49/07 ,  H01L21/00 ,  H01L21/02 ,  H01L21/027 ,  H01L21/677

CPC分类号： H01L21/67748 ,  H01L21/67167 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67742 ,  Y10S414/135 ,  Y10S414/139 ,  Y10S438/935

摘要： A wafer transport method including the steps of preparing a semiconductor process equipment having a transport chamber, a process chamber, an interface means for connecting the transport chamber to the process chamber, and a transport means for transporting a semiconductor wafer from the transport chamber to the process chamber by way of the interface means; inserting the transport means mounting a substrate in a communicating corridor including a supply means and an exhaust means; and transporting the substrate while performing the supply and exhaust by sequentially controlling a supply shutoff means, an exhaust shutoff means, and a communicating shutoff means according to the position of a conductance part formed of a gap between the transport means and the communicating corridor. With this method, the substrate is transported at a high throughput without the contamination on the substrate while keeping the different atmospheric conditions of the transport chamber and the process chamber, thereby manufacturing a semiconductor device with a high performance.

摘要翻译： 一种晶片输送方法，包括以下步骤：制备具有输送室的半导体工艺设备，处理室，用于将输送室连接到处理室的接口装置，以及用于将半导体晶片从输送室输送到 处理室; 将安装基板的输送装置插入包括供给装置和排气装置的通信走廊中; 并且通过根据由传送装置和通信走廊之间的间隙形成的电导部分的位置顺序地控制供给关闭装置，排气关闭装置和连通关闭装置，在执行供应和排出的同时运送基板。 利用该方法，在保持输送室和处理室的不同大气条件的同时，以高通量输送基板而不会在基板上产生污染，从而制造具有高性能的半导体器件。

公开(公告)号：US20090236540A1

公开(公告)日：2009-09-24

申请号：US12393580

申请日：2009-02-26

申请人： Eiichi SEYA ,  Takashi Nagamatsu

发明人： Eiichi SEYA ,  Takashi Nagamatsu

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/20264

摘要： A sample stage for electron microscope according to an embodiment of the invention includes at least two actuators capable of expanding and contracting or capable of swinging for moving a target sample in a predetermined direction. With a coordination of the two actuators, various controls are available by combining the operations of the two actuators. Accordingly, a stage mechanism capable of reducing a stop drift as well as moving a stage can be provided.

摘要翻译： 根据本发明的实施例的用于电子显微镜的样品台包括至少两个致动器，所述至少两个致动器能够沿预定方向伸展和收缩或能够摆动以移动目标样品。 通过两个致动器的协调，可以通过组合两个致动器的操作来获得各种控制。 因此，可以提供能够减少停止漂移以及移动平台的平台机构。