公开(公告)号：US08823309B2

公开(公告)日：2014-09-02

申请号：US13391962

申请日：2010-09-17

申请人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

发明人： Hironori Ogawa ,  Masahiro Koyama ,  Nobuo Shibata ,  Masaru Matsushima ,  Shuichi Nakagawa ,  Katsunori Onuki ,  Yoshimasa Fukushima

IPC分类号： G03B27/42 ,  H01L21/027

CPC分类号： H01J37/20 ,  H01J2237/20228 ,  H01J2237/20278

摘要： Disclosed is a smaller and lighter stage device which can be applied to a device such as a length measurement SEM for inspecting and/or evaluating a semiconductor, and in which the effect of a magnetic field on an electron beam can be reduced. Linear motors 110, 111, 112, 113 are disposed on four sides of a base 104 to be distanced from an electron beam projection position (the center of the stage device), respectively. The base 104 has dimensions substantially equivalent to minimum dimensions determined by the size of a top table 101 and a movable stroke. Linear motor stators 110, 112 are configured to have a “C-shaped” structure whose opening faces outside of the stage device, respectively. Further, a movable table is coupled to the top table via linear guides 107, 109 composed of a nonmagnetic material or roller mechanisms composed of a nonmagnetic material.

摘要翻译： 公开了一种可以应用于诸如用于检查和/或评估半导体的长度测量SEM的装置的较小和较轻的平台装置，其中可以减小磁场对电子束的影响。 直线电动机110,111,112,113分别设置在基座104的四侧，与电子束突出位置（台装置的中心）分开。 基座104的尺寸基本上等于由顶台101和可移动冲程的尺寸确定的最小尺寸。 线性电动机定子110,112被构造为具有开口面分别位于舞台装置外侧的“C”形结构。 此外，可移动工作台通过由非磁性材料构成的线性引导件107,109或由非磁性材料构成的滚子机构联接到顶台。

公开(公告)号：US07795581B2

公开(公告)日：2010-09-14

申请号：US12038116

申请日：2008-02-27

申请人： Shuichi Nakagawa ,  Sho Takami

发明人： Shuichi Nakagawa ,  Sho Takami

IPC分类号： G01N21/00 ,  G01N23/00 ,  G21K7/00

CPC分类号： H01J37/28 ,  H01J37/1472 ,  H01J37/265 ,  H01J37/3045 ,  H01J2237/22 ,  H01J2237/2816 ,  H01J2237/2817

摘要： An object of the present invention is to provide a pattern measuring method and an electron microscope that achieve truly high measurement throughput by achieving both precise location of a measurement target position and high-speed movement of the scanning position of an electron beam to the measurement target position. In order to attain the object described above, according to an aspect of the present invention, there is provided a pattern measuring method and an apparatus that move the scanning position of an electron beam based on coordinate information about a first pattern, which is a target to be measured with the electron beam, move the scanning position of the electron beam to a region comprising a second pattern, the relative distance of which from the first pattern is previously registered, in a case where detection of the first pattern at the point of arrival fails, and move the scanning position of the electron beam based on detection of the second pattern and information about the relative distance.

摘要翻译： 本发明的目的是提供一种图形测量方法和电子显微镜，其通过实现测量目标位置的精确定位和电子束的扫描位置的高速移动到测量目标而实现真正高的测量吞吐量 位置。 为了实现上述目的，根据本发明的一个方面，提供了一种图案测量方法和装置，其基于关于作为目标的第一图案的坐标信息来移动电子束的扫描位置 要用电子束测量，将电子束的扫描位置移动到包括第一图案的第一图案在第一图案的检测的情况下包括第二图案的区域，该第二图案的距离与第一图案的相对距离被预先登记 到达失败，并且基于第二图案的检测和关于相对距离的信息移动电子束的扫描位置。

公开(公告)号：US20090251091A1

公开(公告)日：2009-10-08

申请号：US12420358

申请日：2009-04-08

申请人： Masashi FUJITA ,  Shuichi NAKAGAWA ,  Takashi KOBAYASHI

发明人： Masashi FUJITA ,  Shuichi NAKAGAWA ,  Takashi KOBAYASHI

IPC分类号： G05B11/18

CPC分类号： H01J37/20 ,  H01J2237/20228 ,  H01J2237/20285 ,  H01J2237/20292

摘要： The present invention provides a stage apparatus capable of reducing a positioning time without increasing a positional deviation. A positioning control method of a sample stage apparatus includes: a high-speed movement step of moving a table to a high-speed movement target position at a first movement speed; a positional deviation correcting step of moving the table to a low-speed positioning step start position at a second movement speed that is lower than the first movement speed; a low-speed positioning step of moving the table to a target position at a third movement speed that is lower than the second movement speed. After the low-speed positioning step is completed, a rod connected to a motor returns to its original position to separate a pin of the rod side from a concave portion of the table side.

摘要翻译： 本发明提供一种能够在不增加位置偏差的情况下减少定位时间的舞台装置。 采样台装置的定位控制方法包括：以第一移动速度将桌子移动到高速移动目标位置的高速移动步骤; 位置偏差校正步骤，以低于第一移动速度的第二移动速度将桌子移动到低速定位步骤开始位置; 低速定位步骤，以低于第二移动速度的第三移动速度将桌子移动到目标位置。 在低速定位步骤完成之后，连接到电动机的杆返回到其初始位置，以将杆侧的销与台侧的凹部分开。

公开(公告)号：US07498506B2

公开(公告)日：2009-03-03

申请号：US11527910

申请日：2006-09-27

申请人： Shuichi Nakagawa

发明人： Shuichi Nakagawa

IPC分类号： G10H3/00

CPC分类号： G10H1/348

摘要： A pedal system and method for a musical instrument includes a supporting pedestal operatively connected to a foot pedal such that the foot pedal is pivotal to allow a user to control a musical tone in conformance with the angle of the foot pedal relative to the supporting pedestal. A rotating section is operatively connected to the foot pedal. A pressing member presses upon a contact surface of the rotating section. A leaf spring (or similar bias member) applies pressure on the pressing member causing it to press upon the contact surface of the rotating section. A pressing force adjusting structure to adjust the elastic force with which the leaf spring forces the pressing member upon the contact surface of the rotating section. The rotating section rotates about a central axis of rotation, and the rotating section rotates relative to the supporting pedestal. The rotating section has a contact surface parallel to the central axis of rotation.

摘要翻译： 用于乐器的踏板系统和方法包括可操作地连接到脚踏板的支撑座，使得脚踏板枢转以允许用户根据脚踏板相对于支撑座的角度来控制乐音。 旋转部分可操作地连接到脚踏板。 按压部件按压在旋转部的接触面上。 板簧（或类似的偏压构件）对按压构件施加压力，使其按压在旋转部分的接触表面上。 一种按压力调节结构，用于调节弹簧力使所述按压构件在所述旋转部的接触面上受力。 旋转部分围绕中心旋转轴线旋转，并且旋转部分相对于支撑基座旋转。 旋转部分具有平行于中心旋转轴线的接触表面。

公开(公告)号：US20070074623A1

公开(公告)日：2007-04-05

申请号：US11527910

申请日：2006-09-27

申请人： Shuichi Nakagawa

发明人： Shuichi Nakagawa

IPC分类号： G10H1/32 ,  G10H3/00

CPC分类号： G10H1/348

摘要： A pedal system and method for a musical instrument includes a supporting pedestal operatively connected to a foot pedal such that the foot pedal is pivotal to allow a user to control a musical tone in conformance with the angle of the foot pedal relative to the supporting pedestal. A rotating section is operatively connected to the foot pedal. A pressing member presses upon a contact surface of the rotating section. A leaf spring (or similar bias member) applies pressure on the pressing member causing it to press upon the contact surface of the rotating section. A pressing force adjusting structure to adjust the elastic force with which the leaf spring forces the pressing member upon the contact surface of the rotating section. The rotating section rotates about a central axis of rotation, and the rotating section rotates relative to the supporting pedestal. The rotating section has a contact surface parallel to the central axis of rotation.

摘要翻译： 用于乐器的踏板系统和方法包括可操作地连接到脚踏板的支撑座，使得脚踏板枢转以允许用户根据脚踏板相对于支撑座的角度来控制乐音。 旋转部分可操作地连接到脚踏板。 按压部件按压在旋转部的接触面上。 板簧（或类似的偏压构件）对按压构件施加压力，使其按压在旋转部分的接触表面上。 一种按压力调节结构，用于调节弹簧力使所述按压构件在所述旋转部的接触面上受力。 旋转部分围绕中心旋转轴线旋转，并且旋转部分相对于支撑基座旋转。 旋转部分具有平行于中心旋转轴线的接触表面。

公开(公告)号：US6011921A

公开(公告)日：2000-01-04

申请号：US782310

申请日：1997-01-15

申请人： Akihiro Takahashi ,  Takumi Iwai ,  Kenji Fukunaga ,  Shinichi Hara ,  Shuichi Nakagawa

发明人： Akihiro Takahashi ,  Takumi Iwai ,  Kenji Fukunaga ,  Shinichi Hara ,  Shuichi Nakagawa

IPC分类号： G06F13/00 ,  G06F13/24 ,  H04B10/077 ,  H04B10/27 ,  H04B10/272 ,  H04B10/29 ,  H04L13/08 ,  H04L29/10 ,  G06F13/20

CPC分类号： G06F13/24

摘要： A communication control apparatus includes a master communication control unit for performing communication control for a plurality of slave units, and an intermediate communication control unit which performs the communication control for each slave unit instead of the master communication control unit. The intermediate communication control unit includes a memory section for holding transmission data necessary for slave unit communication processing and response data, which is a response to the transmission data, a transmission/reception section for sending the transmission data and for receiving the response data, and a communication processing control section. The communication processing control sections sends the transmission data in a predetermined order to the slave unit, which writes the response data received in a predetermined order into the memory section, and notifies the master communication control unit of the completion of the communication processing by using an interruption signal when the communication processing is completed.

摘要翻译： 通信控制装置包括用于对多个从单元执行通信控制的主通信控制单元，以及对于每个从单元而不是主通信控制单元进行通信控制的中间通信控制单元。 中间通信控制单元包括：存储部，用于保持作为对发送数据的响应的从单元通信处理所需的发送数据和响应数据;发送/接收部，用于发送发送数据和接收响应数据;以及 通信处理控制部。 通信处理控制部以预定的顺序将发送数据发送到从单元，从单元将按照预定顺序接收到的响应数据写入到存储器部分，并通过使用通信处理通知主通信控制单元完成通信处理 通信处理完成时的中断信号。

公开(公告)号：US5893014A

公开(公告)日：1999-04-06

申请号：US72452

申请日：1998-05-05

申请人： Hiroshi Goto ,  Shuichi Nakagawa ,  Yoichi Fujieda ,  Ryuji Inoue

发明人： Hiroshi Goto ,  Shuichi Nakagawa ,  Yoichi Fujieda ,  Ryuji Inoue

IPC分类号： G03G15/08

CPC分类号： G03G15/0818 ,  G03G2215/0619 ,  G03G2215/0861

摘要： In a developing device according to the present invention, a developer carrying member in which a dielectric layer is formed on the surface of a conductive base substrate is used. In conveying a monocomponent developer containing no carrier to a developing area opposite to the image carrying member with the developer held on the surface of the developer carrying member, to develop a latent image formed on the image carrying member by the developer, the dielectric layer in the developer carrying member satisfies the following conditions:t.gtoreq.50, .di-elect cons..ltoreq.10, and 15.ltoreq.t/.di-elect cons..ltoreq.35where t (.mu.m) is the thickness of the dielectric layer, and .di-elect cons. is the relative dielectric constant of the dielectric layer.

摘要翻译： 在根据本发明的显影装置中，使用在导电性基板的表面上形成有电介质层的显影剂承载构件。 在将不含载体的单组分显影剂输送到显影剂承载构件相对的显影区域上，显影剂保持在显影剂承载构件的表面上，以通过显影剂显影形成在图像承载构件上的潜像， 显影剂承载构件满足以下条件：t> / = 50，+531 35其中t（μm）是介电层的厚度，+ 531是介电层的相对介电常数。

公开(公告)号：US5870658A

公开(公告)日：1999-02-09

申请号：US69171

申请日：1998-04-29

申请人： Hiroshi Goto ,  Shuichi Nakagawa ,  Yoichi Fujieda ,  Ryuji Inoue

发明人： Hiroshi Goto ,  Shuichi Nakagawa ,  Yoichi Fujieda ,  Ryuji Inoue

IPC分类号： G03G15/08

CPC分类号： G03G15/0812

摘要： The present invention is directed to a developing device using a developer carrying member in which an insulating layer is formed on the surface of a conductive base substrate for regulating, in conveying a developer to a developing area opposite to an image carrying member with it being held on the surface of the developer carrying member, the amount of the developer conveyed to the developing area upon pressing a regulating member against the surface of the developer carrying member, wherein a regulating member in which a dielectric layer satisfying the following relationship (1) is formed on an electrical conductive member is used as the regulating member, to press the dielectric layer against the developer carrying member:t/.epsilon..gtoreq.10 (1)where t (.mu.m) is the thickness of the dielectric layer, and .epsilon. is the relative dielectric constant of the dielectric layer.

摘要翻译： 本发明涉及一种使用显影剂承载构件的显影装置，其中在导电基底基板的表面上形成绝缘层，用于在将显影剂传送到与图像承载构件相对的显影区域时进行调节 在显影剂承载构件的表面上，在将调节构件压靠在显影剂承载构件的表面上时，传送到显影区域的显影剂的量，其中满足以下关系式（1）的介电层的调节构件是 形成在导电构件上的电介质层被用作调节构件，以将电介质层压在显影剂承载构件上：t /ε= 10（1）其中t（μm）是电介质层的厚度，ε 是介电层的相对介电常数。

公开(公告)号：US5012285A

公开(公告)日：1991-04-30

申请号：US191122

申请日：1988-05-06

申请人： Tateki Oka ,  Naoki Toyoshi ,  Tomoaki Yokoyama ,  Hiroshi Mizuno ,  Hiroshi Murasaki ,  Akihito Ikegawa ,  Kouichi Etou ,  Shuichi Nakagawa

发明人： Tateki Oka ,  Naoki Toyoshi ,  Tomoaki Yokoyama ,  Hiroshi Mizuno ,  Hiroshi Murasaki ,  Akihito Ikegawa ,  Kouichi Etou ,  Shuichi Nakagawa

IPC分类号： G03G15/08

CPC分类号： G03G15/0822 ,  G03G15/0877 ,  G03G15/0896

摘要： A developing apparatus includes a photosensitive drum positioned in confronting relation to a developing sleeve. A toner accommodating tank is provided for supplying toner to the developing sleeve. The toner accommodating tank is divided into a small chamber and a supplementary chamber which are separated from one another by a partition which permits toner to be supplied from the supplementary chamber to the small chamber but which prevents the return of toner from the small chamber to the supplementary. A movable shutter selectively permits and prevents toner from being supplied from the supplementary chamber to the small chamber in accordance with operation of the apparatus.

摘要翻译： 显影装置包括与显影套筒相对定位的感光鼓。 提供调色剂容纳槽，用于向显影套筒供应调色剂。 调色剂容纳箱被分成小室和辅助室，它们通过隔板彼此分开，隔板允许调色剂从辅助室供应到小室，但防止调色剂从小室返回到 补充。 根据设备的操作，活动快门选择性地允许和防止调色剂从辅助室供应到小室。

公开(公告)号：US4649399A

公开(公告)日：1987-03-10

申请号：US835166

申请日：1986-03-03

申请人： Toshio Kimura ,  Shuichi Nakagawa ,  Teruhiko Tokumo ,  Hiroyuki Yamamoto ,  Hiroshi Kotan ,  Hiroshi Otsu ,  Tetsuya Satoh

发明人： Toshio Kimura ,  Shuichi Nakagawa ,  Teruhiko Tokumo ,  Hiroyuki Yamamoto ,  Hiroshi Kotan ,  Hiroshi Otsu ,  Tetsuya Satoh

IPC分类号： G01D9/10 ,  G01D9/00 ,  G01D9/02 ,  G01D9/04 ,  G08C19/00 ,  G01D7/04

CPC分类号： G01D9/02

摘要： An automatically balancing type pen recorder, which is compact in size and is highly reliable in operation, comprises an integral servo unit formed of a single printed circuit board which incorporates therein a pen carriage and an automatic balancing mechanism adapted to move a recording chart in a direction perpendicular to the direction of feed of the chart, in response to the magnitude of a measuring signal.

摘要翻译： 一种自动平衡式笔式记录仪，其尺寸紧凑并且操作高度可靠，包括由单个印刷电路板形成的整体式伺服单元，该印刷电路板包括笔托架和自动平衡机构，该自动平衡机构适于将记录图表移动到 响应于测量信号的大小，垂直于图表的馈送方向的方向。