发明授权
- 专利标题: Pattern measuring method and electron microscope
- 专利标题(中): 图案测量方法和电子显微镜
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申请号: US12038116申请日: 2008-02-27
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公开(公告)号: US07795581B2公开(公告)日: 2010-09-14
- 发明人: Shuichi Nakagawa , Sho Takami
- 申请人: Shuichi Nakagawa , Sho Takami
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Crowell & Moring LLP
- 优先权: JP2007-052150 20070302
- 主分类号: G01N21/00
- IPC分类号: G01N21/00 ; G01N23/00 ; G21K7/00
摘要:
An object of the present invention is to provide a pattern measuring method and an electron microscope that achieve truly high measurement throughput by achieving both precise location of a measurement target position and high-speed movement of the scanning position of an electron beam to the measurement target position. In order to attain the object described above, according to an aspect of the present invention, there is provided a pattern measuring method and an apparatus that move the scanning position of an electron beam based on coordinate information about a first pattern, which is a target to be measured with the electron beam, move the scanning position of the electron beam to a region comprising a second pattern, the relative distance of which from the first pattern is previously registered, in a case where detection of the first pattern at the point of arrival fails, and move the scanning position of the electron beam based on detection of the second pattern and information about the relative distance.
公开/授权文献
- US20080210865A1 Pattern Measuring Method and Electron Microscope 公开/授权日:2008-09-04
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