公开(公告)号：US08351115B2

公开(公告)日：2013-01-08

申请号：US12588387

申请日：2009-10-14

Applicant: Hisashi Isozaki ,  Fumio Ohtomo ,  Kazuo Nunokawa

Inventor： Hisashi Isozaki ,  Fumio Ohtomo ,  Kazuo Nunokawa

IPC: G02B21/36

CPC classification number: G02B21/367 ,  H01J37/226 ,  H01J37/228 ,  H01J37/28

Abstract: A complex type microscopic device includes a slider unit moving a stage, an optical microscope, a scanning electron microscope with an electron axis intersecting with an optical axis of the optical microscope, an optical measurement/observation unit having a magnification between those of the scanning electron microscope and the optical microscope and co-using an objective lens with the optical microscope, and a control unit controlling the entire device, and a display unit having a display screen. During display of a low-magnification optical microscopic image, the control unit controls the display unit to display, on the image, a representation to designate an area to be observed at a magnification of the optical measurement/observation unit, and to display, on the image, another representation to designate an area to be observed at a magnification of the scanning electron microscope during display of a high-magnification optical microscopic image.

Abstract translation: 复合型显微镜装置包括：移动台的滑块单元，光学显微镜，具有与光学显微镜的光轴相交的电子轴的扫描电子显微镜;具有扫描电子的放大率的光学测量/观察单元 显微镜和光学显微镜，并与光学显微镜共同使用物镜，以及控制整个装置的控制单元和具有显示屏的显示单元。 在显示低倍率光学显微镜图像期间，控制单元控制显示单元在图像上显示表示以在光学测量/观察单元的放大倍率下观察的区域，并且显示在 该图像是在显示高倍率光学显微镜图像期间指定在扫描电子显微镜的放大倍率下观察的区域的另一表示。

公开(公告)号：US08334510B2

公开(公告)日：2012-12-18

申请号：US13002448

申请日：2009-07-02

Applicant: Dov Shachal ,  Rafi De Picciotto

Inventor： Dov Shachal ,  Rafi De Picciotto

IPC: H01J37/28 ,  H01J37/20 ,  G01N23/00

CPC classification number: G01N23/22 ,  G01N2223/079 ,  G01N2223/08 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/208 ,  H01J2237/244 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: An interface, a scanning electron microscope and a method for observing an object that is positioned in a non-vacuum environment. The method includes: generating an electron beam in the vacuum environment; scanning a region of the object with the electron beam while the object is located below an object holder; wherein the scanning comprises allowing the electron beam to pass through an aperture of an aperture array, pass through an ultra thin membrane that seals the aperture, and pass through the object holder; wherein the ultra thin membrane withstands a pressure difference between the vacuum environment and the non-vacuum environment; and detecting particles generated in response to an interaction between the electron beam and the object.

Abstract translation: 接口，扫描电子显微镜和用于观察位于非真空环境中的物体的方法。 该方法包括：在真空环境中产生电子束; 当物体位于物体保持器下方时用电子束扫描物体的区域; 其中所述扫描包括允许所述电子束穿过孔阵列的孔，穿过密封所述孔的超薄膜并穿过所述物体保持器; 其中所述超薄膜承受所述真空环境和所述非真空环境之间的压力差; 以及检测响应于电子束和物体之间的相互作用而产生的微粒。

公开(公告)号：US20120257720A1

公开(公告)日：2012-10-11

申请号：US13433362

申请日：2012-03-29

Applicant: Yoshihiro ANAN ,  Masanari KOGUCHI

Inventor： Yoshihiro ANAN ,  Masanari KOGUCHI

IPC: G21K5/00

CPC classification number: H01J37/228 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/2445 ,  H01J2237/24485

Abstract: In a charged particle beam analyzer irradiating a charged particle beam to a sample in a vacuum container and detecting an X-ray generated from the sample to analyze the sample, two or more X-ray lenses configured in different manners are provided in the vacuum container. This no longer requires air opening in the vacuum container following X-ray lens replacement and also no longer requires vacuuming, making it possible to perform analysis with high efficiency and high sensitivity.

Abstract translation: 在带电粒子束分析仪中将带电粒子束照射到真空容器中的样品并检测从样品产生的X射线以分析样品，在真空容器中设置两个或更多个以不同方式配置的X射线透镜 。 这不再需要X射线透镜更换后的​​真空容器中的开口，也不再需要抽真空，可以以高效率和高灵敏度进行分析。

公开(公告)号：US20120193530A1

公开(公告)日：2012-08-02

申请号：US13017016

申请日：2011-01-30

Applicant: N. William Parker ,  Mark W. Utlaut

Inventor： N. William Parker ,  Mark W. Utlaut

IPC: G01N23/225 ,  G01N23/00

CPC classification number: G01N21/6428 ,  G01N21/6458 ,  G01N21/6486 ,  G01N23/225 ,  H01J37/228 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/206 ,  H01J2237/2443 ,  H01J2237/24455 ,  H01J2237/2448 ,  H01J2237/2803 ,  H01J2237/2857

Abstract: A method and system for the imaging and localization of fluorescent markers such as fluorescent proteins or quantum dots within biological samples is disclosed. The use of recombinant genetics technology to insert “reporter” genes into many species is well established. In particular, green fluorescent proteins (GFPs) and their genetically-modified variants ranging from blue to yellow, are easily spliced into many genomes at the sites of genes of interest (GoIs), where the GFPs are expressed with no apparent effect on the functioning of the proteins of interest (PoIs) coded for by the GoIs. One goal of biologists is more precise localization of PoIs within cells. The invention is a method and system for enabling more rapid and precise PoI localization using charged particle beam-induced damage to GFPs. Multiple embodiments of systems for implementing the method are presented, along with an image processing method relatively immune to high statistical noise levels.

Abstract translation: 公开了用于生物样品中荧光标记如荧光蛋白或量子点的成像和定位的方法和系统。 使用重组遗传学技术将“记者”基因插入许多物种已经很成熟。 特别地，绿色荧光蛋白（GFP）及其从蓝色到黄色的遗传修饰的变体易于在感兴趣的基因（GoI）的位点处接合到许多基因组中，其中GFP表达对功能没有明显的影响 的由GoI编码的感兴趣的蛋白质（PoI）。 生物学家的一个目标是更精确地定位细胞内的PoI。 本发明是一种方法和系统，用于使得能够使用带电粒子束对GFP的损伤进行更快速和精确的PoI定位。 提出了用于实现该方法的系统的多个实施例，以及相对不受高统计噪声水平影响的图像处理方法。

公开(公告)号：US20120168623A1

公开(公告)日：2012-07-05

申请号：US13395636

申请日：2010-08-20

Applicant: Martin Edelmann ,  Christian Thomas

Inventor： Martin Edelmann ,  Christian Thomas

IPC: H01J47/00

CPC classification number: G02B21/367 ,  G01N23/2252 ,  H01J37/165 ,  H01J37/228

Abstract: An observation and analysis unit that magnifies an image of a sample and further accomplishes the evaluation and analysis thereof. The observation and analysis unit includes a light-microscopic device designed for the magnified imaging and optical evaluation of the sample and a sample analyzer that analyses selected regions of the sample. The sample analyzer includes an electron source from which an electron beam can be directed to a region of the sample selected by use of the light-microscopic device. The sample analyzer further includes an X-ray detector designed to detect X-ray radiation generated by the interaction of the electron beam with the sample material. The unit further includes an actuation and evaluation unit that generates control commands for the light-microscopic device and the electron source and spectrally analyzes the X-ray radiation.

Abstract translation: 观察和分析单元，其放大样品的图像并进一步完成其评估和分析。 观察和分析单元包括设计用于样品的放大成像和光学评估的光学装置和分析样品的选定区域的样品分析仪。 样品分析仪包括电子源，电子束可以通过电子源被引导到通过使用光学显微镜装置选择的样品的区域。 样品分析仪还包括设计用于检测由电子束与样品材料的相互作用产生的X射线辐射的X射线检测器。 该单元还包括致动和评估单元，其产生用于光学微观装置和电子源的控制命令并且对X射线辐射进行光谱分析。

公开(公告)号：US08119994B2

公开(公告)日：2012-02-21

申请号：US12407918

申请日：2009-03-20

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi

IPC: H01J37/20

CPC classification number: G01N23/2251 ,  G01N23/2204 ,  G01N2223/307 ,  G01N2223/612 ,  G01N2223/637 ,  H01J37/20 ,  H01J37/228 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2004 ,  H01J2237/244 ,  H01J2237/2808

Abstract: Method and apparatus have a film including a first surface to hold the liquid sample thereon, a vacuum chamber for reducing the pressure of an ambient in contact with a second surface of the film, primary beam irradiation means connected with the vacuum chamber and irradiating the sample with a primary beam via the film, signal detection means for detecting a secondary signal produced from the sample in response to the beam irradiation, a partitioning plate for partially partitioning off the space between the film and the primary beam irradiation means in the vacuum chamber, and a vacuum gauge for detecting the pressure inside the vacuum chamber.

Abstract translation: 方法和装置具有包括用于将液体样品保持在其上的第一表面的膜，用于降低与膜的第二表面接触的环境压力的真空室，与真空室连接并照射样品的主光束照射装置 通过胶片具有主光束，信号检测装置，用于响应于光束照射检测从样品产生的二次信号;分隔板，用于在真空室中部分地分隔膜和主光束照射装置之间的空间， 以及用于检测真空室内的压力的真空计。

公开(公告)号：US20120025103A1

公开(公告)日：2012-02-02

申请号：US12847167

申请日：2010-07-30

Applicant: Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

Inventor： Pushkarraj V. Deshmukh ,  Jeffrey J. Gronsky ,  Paul E. Fischione

IPC: G01N21/00 ,  G01N23/00

CPC classification number: G01N21/0303 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/206 ,  H01J2237/2065

Abstract: An in situ optical specimen holder is disclosed which may be utilized for imaging and analysis during dynamic experimentation. This holder assembly includes a set of focusing and reflection optics along with an environmental cell. Electromagnetic radiation can be used to optically excite the specimen in the presence or absence of fluid. A highly reflective mirror may be used to focus the radiation on to the specimen without the presence of any heating components within the cell. The spot size of the irradiation at the specimen surface can be varied, thus exciting only a specific region on the specimen. The window type cell provides a variable fluid path length ranging from the specimen thickness to 500 μm. The holder has the provision to continuously circulate fluids over the specimen. The pressure within the cell can be regulated by controlling the flow rate of the fluids and the speed of the pumps.

Abstract translation: 公开了一种在动态实验中可用于成像和分析的原位光学样本保持器。 该支架组件包括一组聚焦和反射光学器件以及环境细胞。 在存在或不存在流体的情况下，电磁辐射可用于光学激发样品。 可以使用高反射镜来将辐射聚焦在样品上，而不会在电池内存在任何加热组分。 样品表面的照射点尺寸可以变化，从而仅激发样品上的特定区域。 窗型细胞提供从样品厚度到500μm的可变流体路径长度。 支架具有使流体在试样上连续循环的条件。 可以通过控制流体的流量和泵的速度来调节电池内的压力。

公开(公告)号：US20120025075A1

公开(公告)日：2012-02-02

申请号：US13196240

申请日：2011-08-02

Applicant: Thomas M. Moore ,  Cheryl Hartfield ,  Gregory A. Magel

Inventor： Thomas M. Moore ,  Cheryl Hartfield ,  Gregory A. Magel

IPC: G01N23/04

CPC classification number: H01J37/28 ,  G01N23/2251 ,  G01N2223/10 ,  G01N2223/418 ,  G02B21/002 ,  G02B21/367 ,  H01J37/228 ,  H01J2237/2445

Abstract: This disclosure relates to a method and apparatus for producing multiple pixel-by-pixel simultaneous and overlapping images of a sample in a microscope with multiple imaging beams. A scanning electron microscope, a focused ion-beam microscope, or a microscope having both beams, also has an optical microscope. A region of interest on a sample is scanned by both charged-particle and optical beams, either by moving the sample beneath the beams by use of a mechanical stage, or by synchronized scanning of the stationary sample by the imaging beams, or by independently scanning the sample with the imaging beams and recording imaging signals so as to form pixel-by-pixel simultaneous and overlapping images.

Abstract translation: 本公开涉及一种用于在具有多个成像光束的显微镜中产生样品的多个逐像素同时和重叠图像的方法和装置。 扫描电子显微镜，聚焦离子束显微镜或具有两个光束的显微镜也具有光学显微镜。 通过使用机械平台将样品移动到光束下方，或者通过成像光束对静止样品进行同步扫描，或者通过独立扫描，通过带电粒子和光束两者来扫描样品上的感兴趣区域 具有成像光束的样本和记录成像信号，以便形成逐像素同时和重叠的图像。

公开(公告)号：US20120001070A1

公开(公告)日：2012-01-05

申请号：US13152353

申请日：2011-06-03

Applicant: Shigenori Takagi

Inventor： Shigenori Takagi

IPC: G01N23/00

CPC classification number: H01J37/226 ,  G02B21/0004 ,  G02B21/26 ,  G02B21/365 ,  H01J37/023 ,  H01J37/16 ,  H01J37/228 ,  H01J37/28

Abstract: Work to obtain an optical and an electron microscope images at an identical display size is facilitated. A magnifying observation apparatus includes: an electron beam imaging device that obtains an electron microscope image in a chamber; an optical imaging device that obtains an optical image in the chamber; a moving device that moves the both devices such that an optical axis direction of one of the both devices is aligned with an optical axis direction of the other device; a display section that displays the electron microscope and the optical images; and a magnifying power conversion section that recognizes a magnifying power of an image obtained by one of the imaging devices and converts the magnifying power, which is used to obtain an image having a display size substantially identical to that of the image, by the other device into a magnifying power on a basis of the other device.

Abstract translation: 有助于以相同的显示尺寸获得光学和电子显微镜图像。 放大观察装置包括：电子束成像装置，其在室中获得电子显微镜图像; 光学成像装置，其获得所述腔室中的光学图像; 移动装置，其使两个装置移动，使得两个装置中的一个的光轴方向与另一装置的光轴方向对齐; 显示电子显微镜和光学图像的显示部分; 以及放大倍率转换部，其识别通过所述摄像装置之一获得的图像的放大倍数，并且通过所述另一装置转换用于获得具有与图像的显示尺寸基本相同的图像的图像的放大倍数 在其他设备的基础上成为放大倍数。

公开(公告)号：US20090274359A1

公开(公告)日：2009-11-05

申请号：US12501822

申请日：2009-07-13

Applicant: Eiko NAKAZAWA ,  Masahiro Tomita ,  Hiroyuki Kobayashi

Inventor： Eiko NAKAZAWA ,  Masahiro Tomita ,  Hiroyuki Kobayashi

IPC: G06K9/00

CPC classification number: G01N23/2252 ,  H01J37/222 ,  H01J37/226 ,  H01J37/228 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/221 ,  H01J2237/2807

Abstract: It is an object of the present invention to provide a specimen observation method, an image processing device, and a charged-particle beam device which are preferable for selecting, based on an image acquired by an optical microscope, an image area that should be acquired in a charged-particle beam device the representative of which is an electron microscope. In the present invention, in order to accomplish the above-described object, there are provided a method and a device for determining the position for detection of charged particles by making the comparison between a stained optical microscope image and an elemental mapping image formed based on X-rays detected by irradiation with the charged-particle beam.

Abstract translation: 本发明的目的是提供一种样本观察方法，图像处理装置和带电粒子束装置，其优选用于基于由光学显微镜获取的图像来选择应当获取的图像区域 在带电粒子束装置中，其代表是电子显微镜。 在本发明中，为了实现上述目的，提供了一种方法和装置，用于通过对染色的光学显微镜图像和基于图像形成的基本映射图像进行比较来确定带电粒子的检测位置 通过用带电粒子束照射检测X射线。