Invention Grant
- Patent Title: Complex type microscopic device
- Patent Title (中): 复杂型微型器件
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Application No.: US12588387Application Date: 2009-10-14
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Publication No.: US08351115B2Publication Date: 2013-01-08
- Inventor: Hisashi Isozaki , Fumio Ohtomo , Kazuo Nunokawa
- Applicant: Hisashi Isozaki , Fumio Ohtomo , Kazuo Nunokawa
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha TOPCON
- Current Assignee: Kabushiki Kaisha TOPCON
- Current Assignee Address: JP Tokyo
- Agency: Wenderoth, Lind & Ponack, L.L.P.
- Priority: JP2008-266475 20081015
- Main IPC: G02B21/36
- IPC: G02B21/36

Abstract:
A complex type microscopic device includes a slider unit moving a stage, an optical microscope, a scanning electron microscope with an electron axis intersecting with an optical axis of the optical microscope, an optical measurement/observation unit having a magnification between those of the scanning electron microscope and the optical microscope and co-using an objective lens with the optical microscope, and a control unit controlling the entire device, and a display unit having a display screen. During display of a low-magnification optical microscopic image, the control unit controls the display unit to display, on the image, a representation to designate an area to be observed at a magnification of the optical measurement/observation unit, and to display, on the image, another representation to designate an area to be observed at a magnification of the scanning electron microscope during display of a high-magnification optical microscopic image.
Public/Granted literature
- US20100091362A1 Complex type microscopic device Public/Granted day:2010-04-15
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