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    ZrO2-Al2O3 composite ceramic material and production method therefor
    79.
    发明授权
    ZrO2-Al2O3 composite ceramic material and production method therefor 有权
    ZrO2-Al2O3复合陶瓷材料及其制备方法

    公开(公告)号：US08093168B2

    公开(公告)日：2012-01-10

    申请号：US13072893

    申请日：2011-03-28

    申请人： Masahiro Nawa ,  Hideo Nakanishi ,  Yasuhiko Suehiro

    发明人： Masahiro Nawa ,  Hideo Nakanishi ,  Yasuhiko Suehiro

    IPC分类号： C04B35/106

    CPC分类号： C04B35/119 ,  C04B35/4885 ,  C04B35/622 ,  C04B35/6261 ,  C04B35/62645 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3225 ,  C04B2235/3229 ,  C04B2235/3232 ,  C04B2235/5409 ,  C04B2235/765 ,  C04B2235/785 ,  C04B2235/786 ,  C04B2235/85

    摘要： A ZrO2—Al2O3 composite ceramic material having excellent wear resistance, hardness, strength and toughness is provided. This ceramic material comprises a ZrO2 phase composed of 90 vol % or more of tetragonal ZrO2, and containing 10 to 12 mol % of CeO2 as a stabilizer, and an Al2O3 phase. An amount of the Al2O3 phase in the ceramic material is in a range of 20 to 70 vol %, and preferably 40 to 70 vol %. In the composite ceramic material, Al2O3 grains each having a fine ZrO2 grain therein are dispersed. Some of the Al2O3 grains each having the fine ZrO2 grain therein are trapped within ZrO2 grains to form composite grains. A ratio of the number of the Al2O3 grains each having the fine ZrO2 grain therein relative to the number of the entire Al2O3 grains dispersed in the composite ceramic material is 10% or more, and preferably 50% or more.

    摘要翻译： 提供了具有优异的耐磨性，硬度，强度和韧性的ZrO 2 -Al 2 O 3复合陶瓷材料。 该陶瓷材料包括由90质量％以上的四方晶ZrO 2构成的含有10〜12摩尔％的作为稳定剂的CeO 2和Al 2 O 3相的ZrO 2相。 陶瓷材料中的Al 2 O 3相的量为20〜70体积％，优选为40〜70体积％。 在复合陶瓷材料中，分散有ZrO 2颗粒微小的Al 2 O 3粒子。 一些具有细ZrO 2颗粒的Al 2 O 3颗粒被捕获在ZrO 2晶粒内以形成复合晶粒。 每个具有细ZrO 2颗粒的Al 2 O 3颗粒的数量相对于分散在复合陶瓷材料中的整个Al 2 O 3颗粒的数量的比例为10％以上，优选为50％以上。

    Silicon nitride-melilite composite sintered body and device utilizing the same
    80.
    发明授权
    Silicon nitride-melilite composite sintered body and device utilizing the same 有权
    氮化硅 - 辉石复合烧结体及其利用方法

    公开(公告)号：US08071496B2

    公开(公告)日：2011-12-06

    申请号：US12616514

    申请日：2009-11-11

    申请人： Yasushi Hara ,  Tetsuya Maeda ,  Akifumi Tosa ,  Takenori Sawamura

    发明人： Yasushi Hara ,  Tetsuya Maeda ,  Akifumi Tosa ,  Takenori Sawamura

    IPC分类号： C04B35/587 ,  G01R31/26

    CPC分类号： G01R31/2886 ,  C04B35/593 ,  C04B35/5935 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3217 ,  C04B2235/3224 ,  C04B2235/3225 ,  C04B2235/3227 ,  C04B2235/3229 ,  C04B2235/5436 ,  C04B2235/5445 ,  C04B2235/77 ,  C04B2235/85

    摘要： A silicon nitride-melilite composite sintered body in accordance with the invention includes silicon nitride and a melilite Me2Si3O3N4, where Me denotes a metal element combining with silicon nitride to generate the melilite. The silicon nitride-melilite composite sintered body contains Si in a range of 41 to 83 mole percent in Si3N4 equivalent and Me in a range of 13 to 50 mole percent in oxide equivalent. The silicon nitride-melilite composite sintered body has an average thermal expansion coefficient that is arbitrarily adjustable in a range of 2 to 6 ppm/K at temperatures of 23 to 150° C. The silicon nitride-melilite composite sintered body has a high Young's modulus, a high mechanical strength, and excellent sintering performance. A device used for inspection of semiconductor in accordance with the invention utilizes such a silicon nitride-melilite composite sintered body.

    摘要翻译： 根据本发明的氮化硅 - 辉石复合烧结体包括氮化硅和Meliteite Me2Si3O3N4，其中Me表示与氮化硅结合以产生melilite的金属元素。 氮化硅 - 辉石复合烧结体的Si 3 N 4当量中Si为41〜83摩尔％，Me为氧化物当量的13〜50摩尔％。 氮化硅 - 辉石复合烧结体的平均热膨胀系数在23〜150℃的温度范围内可以在2〜6ppm / K的范围内任意调整。氮化硅 - 辉石复合烧结体的杨氏模量高 ，机械强度高，烧结性能优异。 根据本发明的用于半导体检查的装置利用这种氮化硅 - 辉石复合烧结体。