摘要:
Disclosed are an apparatus for monitoring pulsed high-frequency power and a substrate processing apparatus including the same. The apparatus includes an attenuation module configured to attenuate a pulsed high-frequency power signal; a rectifier module configured to convert the pulsed high-frequency power signal into a direct current signal; and a detection module configured to detect a pulse parameter based on the direct current signal.
摘要:
A semiconductor device includes: a counting detection block suitable for generating a counting value of a clock signal transmitted through a first transmission path and a counting value of a target signal transmitted through a second transmission path during a counter enable section, and blocking the first transmission path and the second transmission path based on a comparison result obtained by comparing a predetermined code value with the counting value of the clock signal; and an output block suitable for outputting the counting value of the target signal corresponding to when the first and second transmission paths to a predetermined pad are blocked, based on a test mode signal.
摘要:
In one embodiment, a method for measuring current comprises generating a sensor current based on a current being measured. The method also comprises converting a combined current into a first frequency, wherein the combined current is a sum of the sensor current and a common-mode current, and converting the first frequency into a first count value. The method further comprises converting the common-mode current into a second frequency, converting the second frequency into a second count value, and subtracting the second count value from the first count value to obtain a current reading.
摘要:
In a method for determining a frequency of an input signal, a first count value is determined by counting clock edges of a reference clock signal while the input signal corresponds to a first level value. Further, a second count value is determined by counting clock edges of the reference clock signal while the input signal corresponds to a second level value. The frequency of the input signal is determined as a function of the first and the second count value.
摘要:
A system including a sampling module that generates samples of RF signals on a first channel during first, second, and third periods, which do not overlap. A difference module determines a first difference between i) a first count of polarity reversals during the first period and ii) a second count of polarity reversals during the second period; a second difference between i) the second count and ii) a third count of polarity reversals during the third period; and a third difference between the first and second differences. A third module determines a frequency of the RF signals based on at least one of the first and second counts, determines a frequency variation of the RF signals based on the first and second counts, and identifies a radar type of the RF signals based on at least one of the third difference and the frequency variation.
摘要:
A system including a sampling module that generates samples of RF signals on a first channel during first, second, and third periods, which do not overlap. A difference module determines a first difference between i) a first count of polarity reversals during the first period and ii) a second count of polarity reversals during the second period; a second difference between i) the second count and ii) a third count of polarity reversals during the third period; and a third difference between the first and second differences. A third module determines a frequency of the RF signals based on at least one of the first and second counts, determines a frequency variation of the RF signals based on the first and second counts, and identifies a radar type of the RF signals based on at least one of the third difference and the frequency variation.
摘要:
A frequency detector includes an error measurement unit measuring a time interval between zero-crossing points of an input signal that is modulated. An error conversion unit quantizes the measured time interval using one of modulation time intervals. An error calculation unit calculates a frequency error based upon a difference between the measured time interval and the quantized time interval. An error generation control unit controls whether to output the frequency error based upon the quantized time interval, the calculated frequency error, and a predetermined critical value.
摘要:
A phase frequency detector detects the difference between the edges of a fractional-rate recovered clock signal and the edges within a serial data bit stream, where the edges within the serial data bit stream correspond with the edges of a full-rate clock signal that was used to clock the serial data bit stream.
摘要:
A signal generation circuit includes: a first signal source that generates a first signal; and a variable rate frequency divider section that generates a variable rate frequency-divided signal in which a first frequency-divided signal obtained by frequency-dividing the first signal by a first frequency dividing ratio and a second frequency-divided signal obtained by frequency-dividing the first signal by a second frequency dividing ratio temporally alternately appear in a specified mixing ratio.
摘要:
A system includes a sampling module, a counter module, and a frequency characteristic module. The sampling module samples radio frequency (RF) signals on a first channel for a first predetermined period and a second predetermined period that is subsequent to the first predetermined period. The counter module increments first and second counts when the samples collected during the first and second predetermined periods reverse polarity, respectively. The frequency characteristic module determines a frequency of the RF signal based on at least one of the first and the second counts and determines frequency variation of the RF signal based on the first and second counts.