Process integration flow for embedded memory enabled by decoupling processing of a memory area from a non-memory area

    公开(公告)号:US11765909B1

    公开(公告)日:2023-09-19

    申请号:US17345964

    申请日:2021-06-11

    IPC分类号: H10B53/40

    CPC分类号: H10B53/40

    摘要: A process integration and patterning flow used to pattern a memory array area for an embedded memory without perturbing a fabricating process for logic circuitries. The fabrication process uses a pocket mask (e.g., a hard mask) to decouple the etching process of a memory array area and non-memory area. Such decoupling allows for a simpler fabrication process with little to no impact on the current fabrication process. The fabrication process may use multiple pocket masks to decouple the etching process of the memory array area and the non-memory area. This fabrication process (using multiple pocket masks) allows to avoid exposure of memory material into a second pocket etch chamber. The process of etching memory material is decoupled from the process of etching an encapsulation material. Examples of embedded memory include dynamic random-access memory and ferroelectric random-access memory.