Abstract:
A simulation method includes storing a plurality of structure parameters of transistors for a semiconductor chip, imaging generating a first local layout which includes a first structure parameter extracted from a semiconductor device included in the first local layout, the first structure parameter being an actual parameter determined using the imaging equipment, generating second to n-th local layouts by modifying the first structure parameter included in the first local layout, wherein the second to n-th local layouts respectively have second to n-th structure parameters modified from the first structure parameter, calculating first to n-th effective density factors (EDF) respectively for the first to n-th structure parameters, determining a first effective open silicon density for a first chip using the first to n-th effective density factors and a layout of the first chip, and calculating first to m-th epitaxy times for first to m-th effective open silicon densities.
Abstract:
A semiconductor device and a method of manufacturing a semiconductor device, the semiconductor device including a channel pattern on a substrate, the channel pattern extending in a first direction; a gate pattern on the substrate, the gate pattern extending in a second direction crossing the first direction and surrounding the channel pattern; and an interface layer between the channel pattern and the gate pattern, the interface layer being formed on at least one surface of an upper surface and a lower surface of the channel pattern.
Abstract:
A bus interface device for requesting and receiving data from a memory controller connected to a bus includes a request buffer and a request merger. The request buffer is configured to store a first data request signal for requesting first data and a second data request signal for requesting second data. The request merger is configured to determine whether to merge the first and second data request signals, and transmit a merged request signal for requesting the first data and the second data from the memory controller to the bus upon determining that the first and second data request signals are to be merged.
Abstract:
A graphics processing unit includes a shader configured to perform one operation among tessellation and texturing. The shader generates level-of-detail (LOD) using geometry information for the tessellation or texturing and adjusts the LOD using non-geometry information for the tessellation or texturing.
Abstract:
A method of operating a graphics processing unit includes determining, based on input data, whether to perform a tiling operation before or after a tessellation operation and performing the tiling operation according to the determination result. Performing the tiling operation after the tessellation operation if the input data is not a patch, and if a geometry of the patch is at the out-side of a convex hull defined by control points of the patch. Performing the tiling operation after the tessellation operation if a geometry of a tessellated primitive corresponding to the patch changes according to a shading operation.
Abstract:
A bus interface device for requesting and receiving data from a memory controller connected to a bus includes a request buffer and a request merger. The request buffer is configured to store a first data request signal for requesting first data and a second data request signal for requesting second data. The request merger is configured to determine whether to merge the first and second data request signals, and transmit a merged request signal for requesting the first data and the second data from the memory controller to the bus upon determining that the first and second data request signals are to be merged.
Abstract:
A method of operating a graphics processing unit includes determining, based on input data, whether to perform a tiling operation before or after a tessellation operation and performing the tiling operation according to the determination result. Performing the tiling operation after the tessellation operation if the input data is not a patch, and if a geometry of the patch is at the out-side of a convex hull defined by control points of the patch. Performing the tiling operation after the tessellation operation if a geometry of a tessellated primitive corresponding to the patch changes according to a shading operation.
Abstract:
A semiconductor device includes a multi-channel active pattern, a plurality of gate structures on the multi-channel active pattern and spaced apart from each other in a first direction, the plurality of gate structures including a gate electrode that extends in a second direction different from the first direction, a source/drain recess between the adjacent gate structures, and a source/drain pattern on the multi-channel active pattern in the source/drain recess, wherein the source/drain pattern includes: a semiconductor liner layer including silicon-germanium and extending along the source/drain recess, a semiconductor filling layer including silicon-germanium on the semiconductor liner layer, and at least one or more semiconductor insertion layers between the semiconductor liner layer and the semiconductor filling layer, and wherein the at least one or more semiconductor insertion layers have a saddle structure.
Abstract:
A wafer cleaning apparatus is provided. The wafer cleaning apparatus includes comprising a chamber configured to be loaded with a wafer, a nozzle on the wafer and configured to provide liquid chemicals on an upper surface of the wafer, a housing under the wafer, a laser module configured to irradiate laser on the wafer, a transparent window disposed between the wafer and the laser module, and a controller configured to control on/off of the laser module, wherein the controller is configured to control repetition of turning the laser module on and off, and retain temperature of the wafer within a temperature range, and a ratio of time when the laser module is on in one cycle including on/off of the laser module is 30% to 50%.
Abstract:
A semiconductor device including first fin-shaped patterns in a first region of a substrate and spaced apart from each other in a first direction, second fin-shaped patterns in a second region of the substrate and spaced apart from each other in a second direction, a first field insulating film on the substrate and covering sidewalls of the first fin-shaped patterns, a second field insulating film on the substrate and covering sidewalls of the second fin-shaped patterns, a first source/drain pattern on the first field insulating film, connected to the first fin-shaped patterns, and including a first silicon-germanium pattern, and a second source/drain pattern on the second field insulating film, connected to the second fin-shaped patterns, and including a second silicon-germanium pattern, the second source/drain pattern and the second field insulating film defining one or more first air gaps therebetween may be provided.