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    Charged particle beam apparatus
    21.
    发明授权
    Charged particle beam apparatus 有权
    带电粒子束装置

    公开(公告)号：US08618480B2

    公开(公告)日：2013-12-31

    申请号：US13848854

    申请日：2013-03-22

    Applicant: Hermes Microvision Inc.

    Inventor： Weiming Ren ,  Xiaoli Guo ,  Xuedong Liu ,  Zhongwei Chen

    IPC: H01J37/26 ,  H01J37/28 ,  H01J37/141

    CPC classification number: H01J37/261 ,  H01J37/04 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/0492 ,  H01J2237/1538 ,  H01J2237/2449

    Abstract: The present invention provides a charged particle beam apparatus which employs LVSEM to inspect sample surface with a throughput much higher than the prior art. The high throughput is realized by providing a probe current and a FOV both several times of those of the prior art. Accordingly several means are proposed to avoid obvious degradation of image resolution due to the increases in Coulomb effect and geometric aberrations, and increase efficiency and uniformity of secondary charged particle collection.

    Abstract translation: 本发明提供了一种带电粒子束装置，其使用LVSEM来检查样品表面，其生产量远高于现有技术。 通过提供几倍于现有技术的探针电流和FOV来实现高通量。 因此，提出了几种方法来避免由于库仑效应和几何像差的增加而引起的图像分辨率的明显降低，并且提高了二次带电粒子收集的效率和均匀性。

    Apparatus of plural charged-particle beams
    22.
    发明授权
    Apparatus of plural charged-particle beams 有权

    公开(公告)号：US10276347B2

    公开(公告)日：2019-04-30

    申请号：US16167429

    申请日：2018-10-22

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Xuedong Liu ,  Zhongwei Chen

    IPC: H01J37/28 ,  H01J37/147 ,  H01J37/12

    Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

    Apparatus of Plural Charged-Particle Beams
    25.
    发明申请
    Apparatus of Plural Charged-Particle Beams 审中-公开
    多次充电粒子束装置

    公开(公告)号：US20160284505A1

    公开(公告)日：2016-09-29

    申请号：US15078369

    申请日：2016-03-23

    Applicant: Hermes Microvision Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Xuedong Liu ,  Zhongwei Chen ,  Jack Jau

    IPC: H01J37/147 ,  H01J37/22 ,  H01J37/06 ,  H01J37/20 ,  H01J37/10

    CPC classification number: H01J37/28 ,  H01J2237/0435 ,  H01J2237/1205 ,  H01J2237/1501 ,  H01J2237/151 ,  H01J2237/2806 ,  H01J2237/2813

    Abstract: A multi-beam apparatus for observing a sample with oblique illumination is proposed. In the apparatus, a new source-conversion unit changes a single electron source into a slant virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample with oblique illumination, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means not only forms the slant virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots. The apparatus can provide dark-field images and/or bright-field images of the sample.

    Abstract translation: 提出了一种用于以倾斜照明观察样品的多光束装置。 在该装置中，新的源转换单元将单个电子源改变为倾斜的虚拟多源阵列，初级投影成像系统投射该阵列以在倾斜照明下在样本上形成多个探测点，并且聚光透镜调整 多个探针点的电流。 在源转换单元中，图像形成装置不仅形成倾斜虚拟多源阵列，而且还补偿多个探测点的离轴像差。 该装置可以提供样品的暗场图像和/或亮场图像。

    Apparatus of plural charged particle beams with multi-axis magnetic lenses
    26.
    发明授权
    Apparatus of plural charged particle beams with multi-axis magnetic lenses 有权
    具有多轴磁性透镜的多个带电粒子束的装置

    公开(公告)号：US09431209B2

    公开(公告)日：2016-08-30

    申请号：US14833583

    申请日：2015-08-24

    Applicant: Hermes-Microvision, Inc.

    Inventor： Weiming Ren ,  Xuerang Hu ,  Xuedong Liu ,  Zhongwei Chen

    IPC: H01J37/00 ,  H01J37/141 ,  H01J37/147 ,  H01J37/28

    CPC classification number: H01J37/141 ,  H01J37/1475 ,  H01J37/28 ,  H01J2237/141 ,  H01J2237/1508 ,  H01J2237/1526 ,  H01J2237/28 ,  H01J2237/2817

    Abstract: A new apparatus of plural charged particle beams with multi-axis magnetic lenses is provided, which comprises a plurality of sub-columns The apparatus employs two modified multi-axis magnetic lenses, and magnetic sub-lenses thereof therefore function as the objective lenses and the condenser lenses of all the sub-columns respectively. The plurality of sub-columns can perform the same function or different functions required for observing a surface of a specimen, such as high-throughput inspection and high-resolution review of interested features thereon. Accordingly, the apparatus can be used as a yield management tool in semiconductor manufacturing industry.

    Abstract translation: 提供了具有多轴磁透镜的多个带电粒子束的新装置，其包括多个子列。该装置采用两个改进的多轴磁性透镜，并且其磁性子透镜因此用作物镜，并且 所有子列的聚光透镜分别。 多个子列可以执行用于观察样本表面所需的相同功能或不同的功能，例如高通量检测和对其感兴趣的特征的高分辨率检查。 因此，该装置可以用作半导体制造业的屈服管理工具。

    Energy filter for charged particle beam apparatus
    29.
    发明授权
    Energy filter for charged particle beam apparatus 有权
    带电粒子束装置的能量过滤器

    公开(公告)号：US09000395B2

    公开(公告)日：2015-04-07

    申请号：US14276000

    申请日：2014-05-13

    Applicant: Hermes Microvision, Inc.

    Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

    IPC: H01J37/12 ,  H01J37/05 ,  H01J37/244 ,  H01J37/26

    CPC classification number: H01J37/05 ,  H01J37/10 ,  H01J37/12 ,  H01J37/244 ,  H01J37/263 ,  H01J2237/057 ,  H01J2237/12 ,  H01J2237/14

    Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

    Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

    APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC LENS
    30.
    发明申请
    APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC LENS 有权
    具有多轴磁镜的多重充电粒子的装置

    公开(公告)号：US20150060662A1

    公开(公告)日：2015-03-05

    申请号：US14468674

    申请日：2014-08-26

    Applicant: Hermes-Microvision, Inc.

    Inventor： Zhongwei Chen ,  Weiming Ren ,  Xuerang Hu ,  Xuedong Liu

    IPC: H01J37/141 ,  H01J37/26 ,  H01J37/147 ,  H01J37/073 ,  H01J37/20

    CPC classification number: H01J37/141 ,  H01J37/145 ,  H01J37/28 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/15 ,  H01J2237/281 ,  H01J2237/2817

    Abstract: An apparatus of plural charged particle beams with multi-axis magnetic lens is provided to perform multi-functions of observing a specimen surface, such as high-throughput inspection and high-resolution review of interested features thereof and charge-up control for enhancing image contrast and image resolution. In the apparatus, two or more sub-columns are formed and each of the sub-columns performs one of the multi-functions. Basically the sub-columns take normal illumination to get high image resolutions, but one or more may take oblique illuminations to get high image contrasts.

    Abstract translation: 提供具有多轴磁性透镜的多个带电粒子束的装置，以执行观察样品表面的多功能，例如高通量检测和其感兴趣特征的高分辨率检查以及用于增强图像对比度的充电控制 和图像分辨率。 在该装置中，形成两个或多个子列，并且每个子列执行多功能之一。 基本上，子列采取正常照明以获得高图像分辨率，但是一个或多个可能采取倾斜照明以获得高图像对比度。

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