Method of forming a pattern
    12.
    发明授权
    Method of forming a pattern 有权
    形成图案的方法

    公开(公告)号:US09141751B2

    公开(公告)日:2015-09-22

    申请号:US13950799

    申请日:2013-07-25

    IPC分类号: G06F17/50 H01L21/308

    CPC分类号: G06F17/5081 H01L21/3086

    摘要: A method of forming a pattern includes defining a plurality of patterns, defining a plurality of pitch violating patterns that contact the plurality of patterns and correspond to regions between the patterns, classifying the plurality of pitch violating patterns into a first region and a second region that is adjacent to the first region, selecting one of the first region and the second region, and forming an initial pattern defined as the selected first or second region. The selecting includes performing at least one of i) selecting a region that contact dummy patterns, ii) selecting a region of a same kind as one region, and iii) selecting a region that contacts a concave part of an enclosure from the first region and the second region.

    摘要翻译: 形成图案的方法包括限定多个图案,限定接触所述多个图案并对应于所述图案之间的区域的多个倾斜违规图案,将所述多个音高违规图案分类为第一区域和第二区域, 与第一区域相邻,选择第一区域和第二区域中的一个,以及形成被定义为所选择的第一或第二区域的初始图案。 所述选择包括执行以下各项中的至少一个:i)选择接触虚拟图案的区域,ii)选择与一个区域相同类型的区域,以及iii)从所述第一区域选择与外壳的凹部接触的区域,以及 第二个地区。

    Method of manufacturing semiconductor device

    公开(公告)号:US10217647B2

    公开(公告)日:2019-02-26

    申请号:US16032127

    申请日:2018-07-11

    IPC分类号: H01L21/8238 H01L21/3213

    摘要: A method of manufacturing a semiconductor device may include forming active patterns, forming a polygonal mask pattern having a first width and a second width on the active patterns, forming an active region by executing a first etching process using the mask pattern, forming a first cutting mask for removing a first corner rounding in which a width of the active region is the first width, removing the first corner rounding by executing a second etching process using the first cutting mask, forming a second cutting mask for removing a second corner rounding in which the width of the active region is changed from the first width to the second width, and executing a third etching process using the second cutting mask.

    Semiconductor having cross coupled structure and layout verification method thereof

    公开(公告)号:US09767248B2

    公开(公告)日:2017-09-19

    申请号:US14844420

    申请日:2015-09-03

    IPC分类号: G06F9/455 G06F17/50 G01R31/28

    摘要: A semiconductor device and a layout verification method of a semiconductor device are provided. The layout verification method includes forming a plurality of standard cells each having a first type of a cross coupled structure (XC) and a second type of the XC on a substrate of the semiconductor device, forming a plurality of first inverters in which the first type of the XC is activated in the a plurality of the standard cells and a plurality of second inverters in which the second type of the XC is activated in the a plurality of the standard cells and estimating an electrical characteristic of the first type of the XC or the second type of the XC by measuring a magnitude of a signal delay of the plurality of the first inverters or the plurality of the second inverters.