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    Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures
    11.
    发明申请
    Method and Apparatus to Reduce Thermal Stress by Regulation and Control of Lamp Operating Temperatures 有权
    通过调节和控制灯泡工作温度来减少热应力的方法和装置

    公开(公告)号：US20140060792A1

    公开(公告)日：2014-03-06

    申请号：US13975945

    申请日：2013-08-26

    申请人： KLA-Tencor Corporation

    发明人： Jincheng Wang ,  Anant Chimmalgi ,  Rajeev Patil ,  Erik Kim ,  Rudolf Brunner ,  Quang Giang ,  Lauren Wilson ,  Ken Gross ,  Ilya Bezel ,  Dan Scott ,  Younus Vora ,  Matthew Derstine ,  Cedric Lasfargues

    IPC分类号： F28C3/04

    CPC分类号： F28C3/04 ,  F21V19/00 ,  F21V29/02 ,  F21V29/503 ,  F21V29/60

    摘要： A fluid input manifold distributes injected fluid around the body of a bulb to cool the bulb below a threshold. The injected fluid also distributes heat more evenly along the surface of the bulb to reduce thermal stress. The fluid input manifold may comprise one or more airfoils to direct a substantially laminar fluid flow along the surface of the bulb or it may comprise a plurality of fluid injection nozzles oriented to produce a substantially laminar fluid flow. An output portion may be configured to facilitate fluid flow along the surface of the bulb by allowing injected fluid to easily escape after absorbing heat from the bulb or by applying negative pressure to actively draw injected fluid along the surface of the bulb and away.

    摘要翻译： 流体输入歧管将注入的流体分布在灯泡的主体周围以将灯泡冷却到阈值以下。 喷射的流体还可以沿着灯泡的表面更均匀地分布热量以减少热应力。 流体输入歧管可以包括一个或多个翼型件，以引导基本上层流的流体沿着灯泡的表面，或者其可以包括多个流体喷射喷嘴，其被定向以产生基本上层流的流体流。 输出部分可以被配置为通过允许注入的流体在从灯泡吸收热量之后容易地逸出，或者通过施加负压以沿着灯泡的表面主动地吸取注入的流体并且远离，从而促进沿着灯泡表面的流体流动。

    Open plasma lamp for forming a light-sustained plasma
    14.
    发明授权
    Open plasma lamp for forming a light-sustained plasma 有权

    公开(公告)号：US09721761B2

    公开(公告)日：2017-08-01

    申请号：US15043804

    申请日：2016-02-15

    申请人： KLA-Tencor Corporation

    发明人： Lauren Wilson ,  Anant Chimmalgi ,  Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Gildardo Delgado

    IPC分类号： H01J37/00 ,  H01J37/32 ,  H01J65/04

    CPC分类号： H01J37/32339 ,  H01J37/32449 ,  H01J65/04

    摘要： An open plasma lamp includes a cavity section. A gas input and gas output of the cavity section are arranged to flow gas through the cavity section. The plasma lamp also includes a gas supply assembly fluidically coupled to the gas input of the cavity section and configured to supply gas to an internal volume of the cavity section. The plasma lamp also includes a nozzle assembly fluidically coupled to the gas output of the cavity section. The nozzle assembly and cavity section are arranged such that a volume of the gas receives pumping illumination from a pump source, where a sustained plasma emits broadband radiation. The nozzle assembly is configured to establish a convective gas flow from within the cavity section to a region external to the cavity section such that a portion of the sustained plasma is removed from the cavity section by the gas flow.

    Method and system for controlling convective flow in a light-sustained plasma
    16.
    发明授权
    Method and system for controlling convective flow in a light-sustained plasma 有权
    用于控制光持久等离子体中对流的方法和系统

    公开(公告)号：US09390902B2

    公开(公告)日：2016-07-12

    申请号：US14224945

    申请日：2014-03-25

    申请人： KLA-Tencor Corporation

    发明人： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Derstine ,  Kenneth P. Gross ,  David W. Shortt ,  Wei Zhao ,  Anant Chimmalgi ,  Jincheng Wang

    IPC分类号： H01J65/00

    CPC分类号： H01J65/042 ,  H01J61/28 ,  H01J61/523 ,  H01J65/00 ,  H05H1/24

    摘要： A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.

    摘要翻译： 用于控制光持久等离子体中的对流的系统包括被配置为产生照明的照明源，包括用于容纳一定体积的气体的灯泡的等离子体单元，被布置成将来自照明源的照明聚焦到气体体积中的集电器元件 以便在容纳在灯泡内的气体的体积内产生等离子体。 此外，等离子体单元设置在集电器元件的凹入区域内，其中集电器元件包括用于将等离子体的一部分羽流传播到收集元件的凹部区域外部的区域的开口。

    Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes
    17.
    发明授权
    Switchable laser and fiber based lamphouse for optimal power output in different wavelength bands and pixel sizes 有权
    可切换的激光和光纤灯塔，用于在不同波段和像素尺寸下实现最佳功率输出

    公开(公告)号：US09341761B2

    公开(公告)日：2016-05-17

    申请号：US14301781

    申请日：2014-06-11

    申请人： KLA-Tencor Corporation

    发明人： Anant Chimmalgi ,  Rahul Yadav ,  Joshua Wittenberg

    IPC分类号： F21V8/00 ,  G02B6/35

    CPC分类号： G02B6/0006 ,  G02B6/0008 ,  G02B6/3512 ,  H01J65/04

    摘要： Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.

    摘要翻译： 公开了用于提供激光持续等离子体光源的系统和方法。 与传统的激光持续等离子体光源不同，其中在灯塔中使用一个光纤尺寸和一个波长组合来产生用于不同带和像素尺寸的光，可提供可切换的光纤尺寸和波长组合用于在不同波长带和像素尺寸中的最佳功率输出 。 更具体地说，可提供可切换的光纤配置，其中具有更高的泵浦功率的较大的光纤用于较大的像素尺寸和较高的波长带，而较小的光纤用于较小的像素尺寸和较短的波长带。 附加地和/或替代地，提供泵送方案，其中靠近气体填充物的吸收峰的泵浦波长用于更大的像素尺寸，而远离气体填充吸收峰的泵波长用于较小的像素尺寸。

    Plasma cell for laser-sustained plasma light source
    18.
    发明授权
    Plasma cell for laser-sustained plasma light source 有权
    用于激光持续等离子体光源的等离子体电池

    公开(公告)号：US09318311B2

    公开(公告)日：2016-04-19

    申请号：US13647680

    申请日：2012-10-09

    申请人： KLA-Tencor Corporation

    发明人： Anant Chimmalgi ,  Anatoly Shchemelinin ,  Ilya Bezel ,  Rajeev Patil

    IPC分类号： H01J61/52 ,  H01J61/28 ,  H01J65/04

    CPC分类号： H01J61/526 ,  H01J61/28 ,  H01J65/04

    摘要： A refillable plasma cell for use in a laser-sustained plasma light source includes a plasma bulb, the bulb being formed from a glass material substantially transparent to a selected wavelength of radiation, and a gas port assembly, the gas port assembly being operably connected to the bulb and disposed at a first portion of the gas bulb, wherein the bulb is configured to selectively receive a gas from a gas source via the gas port assembly.

    摘要翻译： 用于激光维持等离子体光源的可再填充等离子体单元包括等离子体灯泡，灯泡由对所选波长的辐射基本上透明的玻璃材料形成，气体端口组件可操作地连接到 所述灯泡并且设置在所述气体灯泡的第一部分处，其中所述灯泡构造成经由所述气体端口组件选择性地从气体源接收气体。

    Broadband Light Source Including Transparent Portion with High Hydroxide Content
    19.
    发明申请
    Broadband Light Source Including Transparent Portion with High Hydroxide Content 审中-公开
    宽带光源包括具有高氢氧化物含量的透明部分

    公开(公告)号：US20150357179A1

    公开(公告)日：2015-12-10

    申请号：US14699781

    申请日：2015-04-29

    申请人： KLA-Tencor Corporation

    发明人： Lauren Wilson ,  Anant Chimmalgi ,  Matthew Panzer ,  Ilya Bezel

    IPC分类号： H01J61/30 ,  H05G2/00 ,  H01J65/04

    CPC分类号： H01J61/302 ,  H01J61/025 ,  H01J65/04 ,  H05G2/008

    摘要： A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.

    摘要翻译： 激光维持等离子体光源包括等离子体灯，其构造成容纳一定体积的气体并且从泵浦激光器接收照明以产生等离子体。 等离子体灯包括对来自泵浦激光器的照明透明的一个或多个透明部分和由等离子体发射的宽带辐射的至少一部分。 一个或多个透明部分由具有高于700ppm的高氢氧化物含量的透明材料形成。

    GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS
    20.
    发明申请
    GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS 有权
    用于激光可持续等离子体燃烧器的气体折射补偿

    公开(公告)号：US20140367592A1

    公开(公告)日：2014-12-18

    申请号：US14476149

    申请日：2014-09-03

    申请人： KLA-Tencor Corporation, a Delaware Corporation

    发明人： Ilya Bezel ,  Anatoly Shchemelinin ,  Alex Salnik ,  Anant Chimmalgi

    IPC分类号： H05G2/00

    CPC分类号： H05G2/008 ,  G03F7/70016 ,  H01J61/02 ,  H01J61/025 ,  H01J61/04 ,  H01J61/302 ,  H01J61/33 ,  H01J65/04

    摘要： A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with at least one property that is varied to compensate for optical aberrations in the system.

    摘要翻译： 激光持续等离子体照明器系统包括至少一个激光源以提供光。 至少一个反射器将来自激光光源的光聚焦在反射器的焦点处。 基本上充满气体的外壳位于反射器的焦点处或附近。 来自激光光源的光至少部分维持包含在外壳中的等离子体。 外壳具有至少一个具有至少一个属性的壁，该特性被改变以补偿系统中的光学像差。