公开(公告)号：US20140367592A1

公开(公告)日：2014-12-18

申请号：US14476149

申请日：2014-09-03

申请人： KLA-Tencor Corporation, a Delaware Corporation

发明人： Ilya Bezel ,  Anatoly Shchemelinin ,  Alex Salnik ,  Anant Chimmalgi

IPC分类号： H05G2/00

CPC分类号： H05G2/008 ,  G03F7/70016 ,  H01J61/02 ,  H01J61/025 ,  H01J61/04 ,  H01J61/302 ,  H01J61/33 ,  H01J65/04

摘要： A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with at least one property that is varied to compensate for optical aberrations in the system.

摘要翻译： 激光持续等离子体照明器系统包括至少一个激光源以提供光。 至少一个反射器将来自激光光源的光聚焦在反射器的焦点处。 基本上充满气体的外壳位于反射器的焦点处或附近。 来自激光光源的光至少部分维持包含在外壳中的等离子体。 外壳具有至少一个具有至少一个属性的壁，该特性被改变以补偿系统中的光学像差。