发明授权
US09390902B2 Method and system for controlling convective flow in a light-sustained plasma
有权
用于控制光持久等离子体中对流的方法和系统
- 专利标题: Method and system for controlling convective flow in a light-sustained plasma
- 专利标题(中): 用于控制光持久等离子体中对流的方法和系统
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申请号: US14224945申请日: 2014-03-25
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公开(公告)号: US09390902B2公开(公告)日: 2016-07-12
- 发明人: Ilya Bezel , Anatoly Shchemelinin , Matthew Derstine , Kenneth P. Gross , David W. Shortt , Wei Zhao , Anant Chimmalgi , Jincheng Wang
- 申请人: KLA-Tencor Corporation
- 申请人地址: US CA Milpitas
- 专利权人: KLA-Tencor Corporation
- 当前专利权人: KLA-Tencor Corporation
- 当前专利权人地址: US CA Milpitas
- 代理机构: Suiter Swantz pc llo
- 主分类号: H01J65/00
- IPC分类号: H01J65/00
摘要:
A system for controlling convective flow in a light-sustained plasma includes an illumination source configured to generate illumination, a plasma cell including a bulb for containing a volume of gas, a collector element arranged to focus illumination from the illumination source into the volume of gas in order to generate a plasma within the volume of gas contained within the bulb. Further, the plasma cell is disposed within a concave region of the collector element, where the collector element includes an opening for propagating a portion of a plume of the plasma to a region external to the concave region of the collect element.
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