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    Perpendicular magnetic recording write head with milling defined track width
    11.
    发明授权
    Perpendicular magnetic recording write head with milling defined track width 有权
    垂直磁记录写头具有铣削定义的轨道宽度

    公开(公告)号：US08625235B2

    公开(公告)日：2014-01-07

    申请号：US13929181

    申请日：2013-06-27

    Applicant: Headway Technologies, Inc

    Inventor： Kenichi Takano ,  Yuchen Zhou ,  Min Li ,  Joe Smyth

    IPC: G11B5/31

    CPC classification number: G11B5/1278 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/315 ,  G11B5/3163 ,  G11B2005/0024

    Abstract: A main pole layer having at least a leading taper and trimmed pole tip portion is described. The leading taper increases head field up to ≧15000 Oe even for narrow track widths approaching 50 nm. For MAMR applications, a STO and trailing shield are sequentially formed on a trailing pole tip side. Furthermore, full side shields may be added to reduce fringing field. A preferred embodiment includes both of a leading taper and trailing taper at the pole tip where leading taper angle is between 20° and 60° and trailing taper angle is from 10° to 45°. A method is provided for forming various embodiments of the present invention. A key feature is that milling depth at an effective neck height distance is greater than or equal to the pole tip thickness. A self aligned STO may be formed by the same ion milling step that defines track width.

    Abstract translation: 描述了至少具有前导锥形和微调极尖部分的主极层。 即使对于接近50nm的窄轨道宽度，领先的锥形也增加了头部场>达15000 Oe。 对于MAMR应用，STO和后屏蔽依次形成在尾极端侧。 此外，可以添加全侧屏蔽以减少边缘场。 一个优选的实施例包括磁极尖端处的前锥形和后锥形，前锥度角在20°至60°之间，后锥角为10°至45°。 提供了一种用于形成本发明的各种实施例的方法。 一个关键特征是在有效颈部高度距离处的铣削深度大于或等于极尖厚度。 可以通过定义轨道宽度的相同离子铣削步骤形成自对准STO。

    Discrete contact MR bio-sensor with magnetic label field alignment
    12.
    发明授权
    Discrete contact MR bio-sensor with magnetic label field alignment 有权

    公开(公告)号：US11313834B2

    公开(公告)日：2022-04-26

    申请号：US13955041

    申请日：2013-07-31

    Applicant: Headway Technologies, Inc.

    Inventor： Yuchen Zhou

    IPC: G01N27/74 ,  G01R33/12 ,  G01R33/09 ,  B82Y25/00

    Abstract: The invention describes a family of sensors for assaying macro-molecules and/or biological cells in solution. The invention also describes methods of making and using the sensors. Each sensor has the form of a well (a hollow cylinder having a floor but no lid) or a trench whose walls comprise a plurality of GMR or TMR devices. Suitably shaped magnets located below each well's floor pull labeled particles into the well/trench and up against the inner wall where a field gradient orients them for optimum detection. Any unattached labels that happen to also be in the well/trench are removed through suitably sized holes in the floor.

    Side Shielded Magnetoresistive (MR) Read Head with Perpendicular Magnetic Free Layer
    14.
    发明申请
    Side Shielded Magnetoresistive (MR) Read Head with Perpendicular Magnetic Free Layer 审中-公开
    侧屏蔽磁阻（MR）读头与垂直磁性层

    公开(公告)号：US20170077391A1

    公开(公告)日：2017-03-16

    申请号：US15363168

    申请日：2016-11-29

    Applicant: Headway Technologies, Inc.

    Inventor： Yuchen Zhou ,  Kunliang Zhang ,  Zhi Gang Bai

    IPC: H01L43/02 ,  G11B5/39 ,  G01R33/09 ,  H01L43/08 ,  H01F10/32

    CPC classification number: G11B5/398 ,  B82Y10/00 ,  B82Y25/00 ,  B82Y40/00 ,  G01R33/093 ,  G01R33/098 ,  G11B5/3906 ,  G11B5/3909 ,  G11B5/3912 ,  G11B2005/3996 ,  H01F10/30 ,  H01F10/3259 ,  H01F10/3286 ,  H01F10/3295 ,  H01F41/307 ,  H01L43/02 ,  H01L43/08

    Abstract: A MR sensor is disclosed that has a free layer (FL) with perpendicular magnetic anisotropy (PMA), which eliminates the need for an adjacent hard bias structure to stabilize free layer magnetization, and minimizes shield-FL interactions. In a TMR embodiment, a seed layer, free layer, junction layer, reference layer, and pinning layer are sequentially formed on a bottom shield. After forming a sensor sidewall that stops in the seed layer or on the bottom shield, a conformal insulation layer is deposited. Thereafter, a top shield is formed on the insulation layer and includes side shields that are separated from the FL by a narrow read gap. The sensor is scalable to widths

    Abstract translation: 公开了具有垂直磁各向异性（PMA）的自由层（FL）的MR传感器，其不需要相邻的硬偏置结构来稳定自由层磁化，并且使屏蔽-FL相互作用最小化。 在TMR实施例中，种子层，自由层，结层，参考层和钉扎层依次形成在底部屏蔽上。 在形成在种子层或底部屏蔽物中停止的传感器侧壁之后，沉积保形绝缘层。 此后，在绝缘层上形成顶部屏蔽，并且包括通过窄的读取间隙与FL分离的侧面屏蔽。 当PMA大于FL自扫描场时，传感器可缩放到宽度<50 nm。 有效偏置场对传感器纵横比不敏感，这使得高条纹和窄宽度传感器对于高RA TMR配置是可行的。

    Heat Assisted Narrow Pole Design with Trailing Shield
    15.
    发明申请
    Heat Assisted Narrow Pole Design with Trailing Shield 有权
    热辅助窄杆设计与拖尾盾

    公开(公告)号：US20130140268A1

    公开(公告)日：2013-06-06

    申请号：US13758561

    申请日：2013-02-04

    Applicant: HEADWAY TECHNOLOGIES, INC.

    Inventor： Xuhui Jin ,  Yuchen Zhou ,  Kenichi Takano ,  Joe Smith

    IPC: G11B5/84

    CPC classification number: G11B5/84 ,  B82Y10/00 ,  G11B5/3116 ,  G11B5/314 ,  G11B2005/0021

    Abstract: A TAMR (Thermally Assisted Magnetic Recording) write head is formed with a narrow pole tip, a trailing edge magnetic shield and, optionally, a plasmon shield. The narrow pole tipped write head uses the energy of laser generated edge plasmons, formed in a plasmon generating layer, to locally heat a PMR magnetic recording medium slightly below its Curie temperature, Tc. When combined with the effects of the narrow tip, this local heating to a temperature below Tc is sufficient to create good transitions and narrow track widths in the magnetic medium. The write head is capable of writing effectively on state-of-the-art PMR recording media having Hk of 20 kOe or more.

    Abstract translation: TAMR（热辅助磁记录）写头形成有窄极尖，后缘磁屏蔽和任选的等离子体屏蔽。 窄极头写头使用在等离子体发生层中形成的激光产生的边缘等离子体激元的能量来局部加热略低于其居里温度Tc的PMR磁记录介质。 当与窄尖端的作用相结合时，该局部加热到低于Tc的温度足以在磁性介质中产生良好的转变和窄的轨道宽度。 写头能够有效地写入具有20kOe以上Hk的最先进的PMR记录介质。

    Patterned MR Device with Controlled Shape Anisotropy
    18.
    发明申请
    Patterned MR Device with Controlled Shape Anisotropy 审中-公开
    具有受控形状各向异性的图案化MR器件

    公开(公告)号：US20160047865A1

    公开(公告)日：2016-02-18

    申请号：US14926069

    申请日：2015-10-29

    Applicant: Headway Technologies, Inc.

    Inventor： Yuchen Zhou ,  Yimin Guo

    IPC: G01R33/09

    CPC classification number: G01R33/093 ,  B82Y25/00 ,  B82Y40/00 ,  G01R33/09 ,  G01R33/091 ,  G11B5/3906 ,  G11B5/3925 ,  G11B5/398 ,  G11B2005/3996 ,  H01F10/325 ,  H01F10/3254 ,  H01F41/302

    Abstract: A magnetic sensor with increased sensitivity, lower noise, and improved frequency response is described. The sensor's free layer is ribbon shaped and is closely flanked at each long edge by a ribbon of magnetically soft, high permeability material. Side stripes of soft magnetic material absorb external field flux and concentrate the flux to flow into the sensor's edges to promote larger MR sensor magnetization rotation. Side stripes may be located in the plane of the free layer a maximum distance of 0.1 microns, above a plane that includes a free layer top surface, or below a plane that includes the magnetic sensor bottom surface. Edges of each side stripe may be aligned above or below a portion of the magnetic sensor. Moreover, each side stripe may have a tapered edge such that the side stripes have increasing thickness with increasing distance from the magnetic sensor.

    Abstract translation: 描述了具有增加的灵敏度，较低噪声和改善的频率响应的磁传感器。 传感器的自由层是带状的，并且通过磁软，高磁导率材料的带在每个长边缘处紧密地侧接。 软磁材料的侧条吸收外部磁场通量，并将磁通集中到流体传感器的边缘，以促进较大的MR传感器磁化旋转。 侧条可以位于自由层的平面中，最大距离为0.1微米，高于包括自由层顶表面或包括磁性传感器底表面的平面的平面。 每个侧条纹的边缘可以在磁传感器的一部分上方或下方对准。 此外，每个侧条可以具有锥形边缘，使得侧条具有随着与磁传感器的距离的增加而增加的厚度。

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