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    METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING
    11.
    发明申请
    METHOD AND APPARATUS FOR SAMPLE EXTRACTION AND HANDLING 审中-公开
    样品提取和处理方法和装置

    公开(公告)号：US20130153785A1

    公开(公告)日：2013-06-20

    申请号：US13746124

    申请日：2013-01-21

    Applicant: FEI Company

    Inventor： Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

    Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

    Abstract translation: 一种用于提取和处理样品用于S / TEM分析的改进方法和装置。 本发明的优选实施例利用显微操纵器和使用真空压力的中空微探针探针将微针尖附着到样品上。 通过通过微针尖向薄片施加小的真空压力，可以比通过单独使用静电力更牢固地保持薄片并且其布置更准确。 通过使用具有倾斜尖端并且也可围绕其长轴旋转的探针，所提取的样品可以平放放置在样品架上。 这样可以精确控制样品放置和取向，从而大大提高分析和产量的可预测性。

    DELAYERING APPARATUS AND METHODS
    12.
    发明申请
    DELAYERING APPARATUS AND METHODS 有权

    公开(公告)号：US20250095959A1

    公开(公告)日：2025-03-20

    申请号：US18369967

    申请日：2023-09-19

    Applicant: FEI Company

    Inventor： Chad Rue ,  Lilly Landers ,  Jason Arjavac ,  Gavin Mitchson

    IPC: H01J37/305

    Abstract: Methods include conditioning at least a portion of a gas delivery system with a carbon-based conditioning agent to provide a carbon-based residual, and etching a substrate with a focused ion beam, in the presence of an ammonia-based delayering agent provided by the gas delivery system and in the presence of the carbon-based residual, wherein the carbon-based residual reduces a topographical variation of a depth of the etching. Apparatus include a focused ion beam system configured to deliver a focused ion beam to a sample, and a pre-conditioned gas delivery system configured to deliver an ammonia-based delayering agent to the sample at least while the focused ion beam is being delivered to the sample, wherein the pre-conditioned gas delivery system includes a carbon-based residual in the gas delivery system, wherein a portion of the carbon-based residual is present at the sample during the etching of the sample with the ammonia-based delayering agent.

    CAD-ASSISTED TEM PREP RECIPE CREATION
    13.
    发明申请
    CAD-ASSISTED TEM PREP RECIPE CREATION 有权
    CAD辅助型TEM PREP RECIPE CREATION

    公开(公告)号：US20170062178A1

    公开(公告)日：2017-03-02

    申请号：US14868056

    申请日：2015-09-28

    Applicant: FEI Company

    Inventor： Jason Arjavac ,  Matthew P. Knowles

    IPC: H01J37/28

    CPC classification number: H01J37/28 ,  G01N1/28 ,  G01N1/32 ,  G01N2001/282 ,  H01J37/3023 ,  H01J37/3045 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2826 ,  H01J2237/31732 ,  H01J2237/31745

    Abstract: An improved process workflow and apparatus for S/TEM sample preparation and analysis is provided. Preferred embodiments provide improved methods for an automated recipe TEM sample creation, especially for small geometry TEM lamellae, employing CAD data to automatically align various stages of sample preparation. The process automatically verifies and aligns the position of FIB-created fiducials by masking off portions of acquired images, and then comparing them to synthesized images from CAD data. SEM beam positions are verified by comparison to images synthesized from CAD data. FIB beam position is also verified by comparison to already-aligned SEM images, or by synthesizing an FIB image from CAD using techniques for simulating FIB images. The automatic alignment techniques herein allow creation of sample lamellas at specified locations without operator intervention.

    Abstract translation: 提供了一种用于S / TEM样品制备和分析的改进的工艺流程和设备。 优选实施例提供了用于自动配方TEM样品创建的改进方法，特别是对于小几何TEM薄片，采用CAD数据来自动对准样品制备的各个阶段。 该过程通过遮蔽所获取图像的部分，然后将其与CAD数据的合成图像进行比较，自动验证并对齐FIB创建的基准点的位置。 通过与从CAD数据合成的图像进行比较来验证SEM束位置。 FIB光束位置也通过与已对准的SEM图像进行比较，或通过使用用于模拟FIB图像的技术从CAD合成FIB图像来验证。 这里的自动对准技术允许在指定位置创建样品薄片，而无需操作员干预。

    Method and Apparatus for Sample Extraction and Handling
    15.
    发明申请
    Method and Apparatus for Sample Extraction and Handling 审中-公开
    样品提取和处理方法和装置

    公开(公告)号：US20150311034A1

    公开(公告)日：2015-10-29

    申请号：US14674840

    申请日：2015-03-31

    Applicant: FEI Company

    Inventor： Enrique Agorio ,  James Edgar Hudson ,  Gerhard Daniel ,  Michael Tanguay ,  Jason Arjavac

    IPC: H01J37/20 ,  G01N1/28 ,  H01J37/285

    CPC classification number: H01J37/20 ,  G01N1/286 ,  G01N1/32 ,  G01N2001/2873 ,  G01N2001/2886 ,  G01R31/2893 ,  H01J37/26 ,  H01J37/28 ,  H01J37/285 ,  H01J37/31 ,  H01J2237/202 ,  H01J2237/2802 ,  H01J2237/2812 ,  H01J2237/3109 ,  H01J2237/3114 ,  H01J2237/31745

    Abstract: An improved method and apparatus for extracting and handling samples for S/TEM analysis. Preferred embodiments of the present invention make use of a micromanipulator and a hollow microprobe probe using vacuum pressure to adhere the microprobe tip to the sample. By applying a small vacuum pressure to the lamella through the microprobe tip, the lamella can be held more securely and its placement controlled more accurately than by using electrostatic force alone. By using a probe having a beveled tip and which can also be rotated around its long axis, the extracted sample can be placed down flat on a sample holder. This allows sample placement and orientation to be precisely controlled, thus greatly increasing predictability of analysis and throughput.

    Abstract translation: 一种用于提取和处理样品用于S / TEM分析的改进方法和装置。 本发明的优选实施例利用显微操纵器和使用真空压力的中空微探针探针将微针尖附着到样品上。 通过通过微针尖向薄片施加小的真空压力，可以比通过单独使用静电力更牢固地保持薄片并且其布置更准确。 通过使用具有倾斜尖端并且也可围绕其长轴旋转的探针，所提取的样品可以平放放置在样品架上。 这样可以精确控制样品放置和取向，从而大大提高分析和产量的可预测性。

    Automated Sample Oreintation
    16.
    发明申请
    Automated Sample Oreintation 有权
    自动样品氧化

    公开(公告)号：US20140131572A1

    公开(公告)日：2014-05-15

    申请号：US13677940

    申请日：2012-11-15

    Applicant: FEI Company

    Inventor： Jason Arjavac

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/20292 ,  H01J2237/31749

    Abstract: A method for aligning a sample that is placed in the vacuum chamber so that the sample is oriented normal to the focused ion beam is disclosed. The locations of different spots on the sample surface are determined using a focusing routine. The locations of the different spots are used to create an image line or an image plane that determines the proper calibrations that are needed. The image line or image plane is then used to calibrate the sample stage so that the sample is aligned substantially normal to the focused ion beam.

    Abstract translation: 公开了一种将放置在真空室中的样品对准以使样品垂直于聚焦离子束的方法。 使用聚焦程序确定样品表面上不同斑点的位置。 不同点的位置用于创建确定所需的适当校准的图像线或图像平面。 然后将图像线或图像平面用于校准样品台，使得样品基本上垂直于聚焦离子束排列。

    Microscopy feedback for improved milling accuracy
    18.
    发明授权
    Microscopy feedback for improved milling accuracy 有权

    公开(公告)号：US12249482B2

    公开(公告)日：2025-03-11

    申请号：US17873532

    申请日：2022-07-26

    Applicant: FEI Company

    Inventor： Thomas Gary Miller ,  Jason Arjavac ,  Brian Routh, Jr. ,  Mark Biedrzycki

    IPC: H01J37/30 ,  H01J37/147 ,  H01J37/28 ,  H01J37/305

    Abstract: Methods and apparatus are disclosed for integration of image-based metrology into a milling workflow. A first ion beam milling operation is performed to an edge at a distance from a final target position on a sample. An SEM image of the sample is used to determine a distance between the milled edge and a reference structure on the sample. Based on the determined distance, the ion beam is adjusted to perform a second milling operation to shift the milled edge to the final target position. Extensions to iterative procedures are disclosed. Various geometric configurations and corrections are disclosed. Manufacturing and analytic applications are disclosed in a variety of fields, including read-write head manufacture and TEM sample preparation. Other combinations of imaging and milling tools can be used.

    CAD-assisted TEM prep recipe creation
    19.
    发明授权
    CAD-assisted TEM prep recipe creation 有权
    CAD辅助TEM准备食谱创建

    公开(公告)号：US09576772B1

    公开(公告)日：2017-02-21

    申请号：US14868056

    申请日：2015-09-28

    Applicant: FEI Company

    Inventor： Jason Arjavac ,  Matthew P. Knowles

    IPC: H01J37/304 ,  G01N1/28

    CPC classification number: H01J37/28 ,  G01N1/28 ,  G01N1/32 ,  G01N2001/282 ,  H01J37/3023 ,  H01J37/3045 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2826 ,  H01J2237/31732 ,  H01J2237/31745

    Abstract: An improved process workflow and apparatus for S/TEM sample preparation and analysis is provided. Preferred embodiments provide improved methods for an automated recipe TEM sample creation, especially for small geometry TEM lamellae, employing CAD data to automatically align various stages of sample preparation. The process automatically verifies and aligns the position of FIB-created fiducials by masking off portions of acquired images, and then comparing them to synthesized images from CAD data. SEM beam positions are verified by comparison to images synthesized from CAD data. FIB beam position is also verified by comparison to already-aligned SEM images, or by synthesizing an FIB image from CAD using techniques for simulating FIB images. The automatic alignment techniques herein allow creation of sample lamellas at specified locations without operator intervention.

    Abstract translation: 提供了一种用于S / TEM样品制备和分析的改进的工艺流程和设备。 优选实施例提供了用于自动配方TEM样品创建的改进方法，特别是对于小几何TEM薄片，采用CAD数据来自动对准样品制备的各个阶段。 该过程通过遮蔽所获取图像的部分，然后将其与CAD数据的合成图像进行比较，自动验证并对齐FIB创建的基准点的位置。 通过与从CAD数据合成的图像进行比较来验证SEM束位置。 FIB光束位置也通过与已对准的SEM图像进行比较，或通过使用用于模拟FIB图像的技术从CAD合成FIB图像来验证。 这里的自动对准技术允许在指定位置创建样品薄片，而无需操作员干预。

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