公开(公告)号：US10707137B2

公开(公告)日：2020-07-07

申请号：US16405506

申请日：2019-05-07

Applicant: FEI Company

Inventor： Konstantin Balashov ,  Thomas G. Miller

IPC: H01L21/66 ,  G01N9/24 ,  G01N1/28 ,  G03F7/20 ,  G01N23/20025 ,  G01N23/2204 ,  G01N1/32

Abstract: Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.

公开(公告)号：US20200095688A1

公开(公告)日：2020-03-26

申请号：US16566647

申请日：2019-09-10

Applicant: FEI Company

Inventor： Thomas G. Miller ,  Jason Arjavac ,  Michael Moriarty

IPC: C23F1/04 ,  H01J37/302 ,  G01N1/32 ,  H01J37/305

Abstract: A method, system, and computer-readable medium for forming transmission electron microscopy sample lamellae using a focused ion beam including directing a high energy focused ion beam toward a bulk volume of material; milling away the unwanted volume of material to produce an unfinished sample lamella with one or more exposed faces having a damage layer; characterizing the removal rate of the focused ion beam; subsequent to characterizing the removal rate, directing a low energy focused ion beam toward the unfinished sample lamella for a predetermined milling time to deliver a specified dose of ions per area from the low energy focused ion beam; and milling the unfinished sample lamella with the low energy focused ion beam to remove at least a portion of the damage layer to produce the finished sample lamella including at least a portion of the feature of interest.

公开(公告)号：US09978586B2

公开(公告)日：2018-05-22

申请号：US15087968

申请日：2016-03-31

Applicant: FEI Company

Inventor： Brian Roberts Routh, Jr. ,  Thomas G. Miller ,  Chad Rue ,  Noel Thomas Franco

IPC: H01L21/00 ,  H01L21/02 ,  C23C14/22 ,  G01N1/32 ,  H01J37/305 ,  C23C14/30

CPC classification number: H01L21/02266 ,  C23C14/221 ,  C23C14/30 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/3174 ,  H01J2237/31744 ,  H01J2237/31745 ,  H01J2237/31749 ,  H01L21/02164 ,  H01L21/02214 ,  H01L21/02362

Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.

公开(公告)号：US08884247B2

公开(公告)日：2014-11-11

申请号：US13626193

申请日：2012-09-25

Applicant: FEI Company

Inventor： Thomas G. Miller ,  Jason Arjavac ,  Damon Heer ,  Michael Strauss ,  Gerardus Nicolaas Anne van Veen

IPC: G01N1/28 ,  H01J37/02 ,  H01J37/305 ,  H01J37/20 ,  G01N1/32

CPC classification number: G01N1/28 ,  G01N1/32 ,  H01J37/02 ,  H01J37/20 ,  H01J37/3023 ,  H01J37/3056 ,  H01J2237/31745

Abstract: A method and system for creating an asymmetrical lamella for use in an ex situ TEM, SEM, or STEM procedure is disclosed. The shape of the lamella provides for easy orientation such that a region of interest in the lamella can be placed over a hole in a carbon film providing minimal optical and spectral interference from the carbon film during TEM, SEM, or STEM procedure of chemical analysis.

Abstract translation: 公开了一种用于创建用于非原位TEM，SEM或STEM程序的不对称薄片的方法和系统。 薄片的形状提供容易的取向，使得薄片中的感兴趣区域可以放置在碳膜上的孔上，从而在化学分析的TEM，SEM或STEM过程期间从碳膜提供最小的光学和光谱干扰。

公开(公告)号：US20210118678A1

公开(公告)日：2021-04-22

申请号：US17116504

申请日：2020-12-09

Applicant: FEI Company

Inventor： Brian Roberts Routh ,  Thomas G. Miller ,  Chad Rue ,  Noel Thomas Franco

IPC: H01L21/02 ,  G01N1/32 ,  H01J37/305 ,  C23C14/22

Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.

公开(公告)号：US20180182676A1

公开(公告)日：2018-06-28

申请号：US15851357

申请日：2017-12-21

Applicant: FEI Company

Inventor： Thomas G. Miller

IPC: H01L21/66 ,  G01R31/28 ,  G01R31/307

CPC classification number: H01L22/12 ,  G01R31/2831 ,  G01R31/307

Abstract: A system for analyzing defects comprises determining coordinates of a defect using a wafer inspection tool; identifying a structure of interest near the defect coordinates; directing a focused ion beam toward the wafer to expose the structure of interest; and forming an image of the exposed structure of interest, wherein the focused ion beam is directed to the mill at a location corresponding to the identified structure of interest rather than at the coordinates of the defect.

公开(公告)号：US20170256380A1

公开(公告)日：2017-09-07

申请号：US15464307

申请日：2017-03-20

Applicant: FEI Company

Inventor： Valerie Brogden ,  Jeffrey Blackwood ,  Michael Schmidt ,  Dhruti Trivedi ,  Richard J. Young ,  Thomas G. Miller ,  Brian Roberts Routh, JR. ,  Stacey Stone ,  Todd Templeton

IPC: H01J37/302 ,  H01J37/31 ,  H01J37/28 ,  H01J37/285

CPC classification number: H01J37/3023 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/285 ,  H01J37/3045 ,  H01J37/31 ,  H01J2237/208 ,  H01J2237/31745

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

公开(公告)号：US20140084157A1

公开(公告)日：2014-03-27

申请号：US13626193

申请日：2012-09-25

Applicant: FEI COMPANY

Inventor： Thomas G. Miller ,  Jason Arjavac ,  Damon Heer ,  Michael Strauss ,  Gerardus Nicolaas Anne van Veen

IPC: G01N1/28 ,  H01J37/02

CPC classification number: G01N1/28 ,  G01N1/32 ,  H01J37/02 ,  H01J37/20 ,  H01J37/3023 ,  H01J37/3056 ,  H01J2237/31745

Abstract: A method and system for creating an asymmetrical lamella for use in an ex situ TEM, SEM, or STEM procedure is disclosed. The shape of the lamella provides for easy orientation such that a region of interest in the lamella can be placed over a hole in a carbon film providing minimal optical and spectral interference from the carbon film during TEM, SEM, or STEM procedure of chemical analysis.

Abstract translation: 公开了一种用于创建用于非原位TEM，SEM或STEM程序的不对称薄片的方法和系统。 薄片的形状提供容易的取向，使得薄片中的感兴趣区域可以放置在碳膜上的孔上，从而在化学分析的TEM，SEM或STEM过程期间从碳膜提供最小的光学和光谱干扰。

公开(公告)号：US20140007307A1

公开(公告)日：2014-01-02

申请号：US13919656

申请日：2013-06-17

Applicant: FEI Company

Inventor： Brian Roberts Routh, JR. ,  Peter Christiaan Tiemeijer ,  Bart Jozef Janssen ,  Thomas G. Miller ,  David Foord ,  Ivan Lazic

IPC: G01Q10/04

CPC classification number: H01J37/28 ,  B82Y35/00 ,  G01Q10/04 ,  H01J37/26 ,  H01J37/295 ,  H01J37/3056 ,  H01J2237/2067 ,  H01J2237/208 ,  H01J2237/226 ,  H01J2237/2442 ,  H01J2237/24455 ,  H01J2237/2447 ,  H01J2237/2611 ,  H01J2237/2614 ,  H01J2237/31749

Abstract: The invention relates to a method of preparing and imaging a sample using a particle-optical apparatus, equipped with an electron column and an ion beam column, a camera system, a manipulator.The method comprising comprises the steps of deriving a first ptychographic image of the sample from a first electron image, thinning the sample, and forming a second ptychographic image of the sample. In an embodiment of the invention the seed image used for the second image is the first ptychografic image. In another embodiment the second ptychographic image is the image of the layer removed during the thinning. In another embodiment the inner potential of the sample is determined and dopant concentrations are determined.

Abstract translation: 本发明涉及使用装备有电子柱和离子束柱的粒子光学装置，相机系统，机械手来制备和成像样品的方法。 该方法包括以下步骤：从第一电子图像导出样本的第一ptychographic图像，使样本变薄，并形成样本的第二ptychographic图像。 在本发明的一个实施例中，用于第二图像的种子图像是第一个ptychografic图像。 在另一个实施例中，第二ptychographic图像是在稀化期间去除的层的图像。 在另一个实施方案中，确定样品的内部电位并确定掺杂剂浓度。

公开(公告)号：US11798804B2

公开(公告)日：2023-10-24

申请号：US17116504

申请日：2020-12-09

Applicant: FEI Company

Inventor： Brian Roberts Routh ,  Thomas G. Miller ,  Chad Rue ,  Noel Thomas Franco

IPC: H01L21/00 ,  H01L21/02 ,  G01N1/32 ,  H01J37/305 ,  C23C14/22 ,  C23C14/30

CPC classification number: H01L21/02266 ,  C23C14/221 ,  G01N1/32 ,  H01J37/3056 ,  H01L21/02164 ,  H01L21/02362 ,  C23C14/30 ,  H01J2237/3174 ,  H01J2237/31744 ,  H01J2237/31745 ,  H01J2237/31749 ,  H01L21/02214

Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.