公开(公告)号：US20140084157A1

公开(公告)日：2014-03-27

申请号：US13626193

申请日：2012-09-25

Applicant: FEI COMPANY

Inventor： Thomas G. Miller ,  Jason Arjavac ,  Damon Heer ,  Michael Strauss ,  Gerardus Nicolaas Anne van Veen

IPC: G01N1/28 ,  H01J37/02

CPC classification number: G01N1/28 ,  G01N1/32 ,  H01J37/02 ,  H01J37/20 ,  H01J37/3023 ,  H01J37/3056 ,  H01J2237/31745

Abstract: A method and system for creating an asymmetrical lamella for use in an ex situ TEM, SEM, or STEM procedure is disclosed. The shape of the lamella provides for easy orientation such that a region of interest in the lamella can be placed over a hole in a carbon film providing minimal optical and spectral interference from the carbon film during TEM, SEM, or STEM procedure of chemical analysis.

Abstract translation: 公开了一种用于创建用于非原位TEM，SEM或STEM程序的不对称薄片的方法和系统。 薄片的形状提供容易的取向，使得薄片中的感兴趣区域可以放置在碳膜上的孔上，从而在化学分析的TEM，SEM或STEM过程期间从碳膜提供最小的光学和光谱干扰。

公开(公告)号：US08884247B2

公开(公告)日：2014-11-11

申请号：US13626193

申请日：2012-09-25

Applicant: FEI Company

Inventor： Thomas G. Miller ,  Jason Arjavac ,  Damon Heer ,  Michael Strauss ,  Gerardus Nicolaas Anne van Veen

IPC: G01N1/28 ,  H01J37/02 ,  H01J37/305 ,  H01J37/20 ,  G01N1/32

CPC classification number: G01N1/28 ,  G01N1/32 ,  H01J37/02 ,  H01J37/20 ,  H01J37/3023 ,  H01J37/3056 ,  H01J2237/31745

Abstract: A method and system for creating an asymmetrical lamella for use in an ex situ TEM, SEM, or STEM procedure is disclosed. The shape of the lamella provides for easy orientation such that a region of interest in the lamella can be placed over a hole in a carbon film providing minimal optical and spectral interference from the carbon film during TEM, SEM, or STEM procedure of chemical analysis.

Abstract translation: 公开了一种用于创建用于非原位TEM，SEM或STEM程序的不对称薄片的方法和系统。 薄片的形状提供容易的取向，使得薄片中的感兴趣区域可以放置在碳膜上的孔上，从而在化学分析的TEM，SEM或STEM过程期间从碳膜提供最小的光学和光谱干扰。