公开(公告)号：US20170062178A1

公开(公告)日：2017-03-02

申请号：US14868056

申请日：2015-09-28

Applicant: FEI Company

Inventor： Jason Arjavac ,  Matthew P. Knowles

IPC: H01J37/28

CPC classification number: H01J37/28 ,  G01N1/28 ,  G01N1/32 ,  G01N2001/282 ,  H01J37/3023 ,  H01J37/3045 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2826 ,  H01J2237/31732 ,  H01J2237/31745

Abstract: An improved process workflow and apparatus for S/TEM sample preparation and analysis is provided. Preferred embodiments provide improved methods for an automated recipe TEM sample creation, especially for small geometry TEM lamellae, employing CAD data to automatically align various stages of sample preparation. The process automatically verifies and aligns the position of FIB-created fiducials by masking off portions of acquired images, and then comparing them to synthesized images from CAD data. SEM beam positions are verified by comparison to images synthesized from CAD data. FIB beam position is also verified by comparison to already-aligned SEM images, or by synthesizing an FIB image from CAD using techniques for simulating FIB images. The automatic alignment techniques herein allow creation of sample lamellas at specified locations without operator intervention.

Abstract translation: 提供了一种用于S / TEM样品制备和分析的改进的工艺流程和设备。 优选实施例提供了用于自动配方TEM样品创建的改进方法，特别是对于小几何TEM薄片，采用CAD数据来自动对准样品制备的各个阶段。 该过程通过遮蔽所获取图像的部分，然后将其与CAD数据的合成图像进行比较，自动验证并对齐FIB创建的基准点的位置。 通过与从CAD数据合成的图像进行比较来验证SEM束位置。 FIB光束位置也通过与已对准的SEM图像进行比较，或通过使用用于模拟FIB图像的技术从CAD合成FIB图像来验证。 这里的自动对准技术允许在指定位置创建样品薄片，而无需操作员干预。

公开(公告)号：US09576772B1

公开(公告)日：2017-02-21

申请号：US14868056

申请日：2015-09-28

Applicant: FEI Company

Inventor： Jason Arjavac ,  Matthew P. Knowles

IPC: H01J37/304 ,  G01N1/28

CPC classification number: H01J37/28 ,  G01N1/28 ,  G01N1/32 ,  G01N2001/282 ,  H01J37/3023 ,  H01J37/3045 ,  H01J2237/28 ,  H01J2237/2802 ,  H01J2237/2826 ,  H01J2237/31732 ,  H01J2237/31745

Abstract: An improved process workflow and apparatus for S/TEM sample preparation and analysis is provided. Preferred embodiments provide improved methods for an automated recipe TEM sample creation, especially for small geometry TEM lamellae, employing CAD data to automatically align various stages of sample preparation. The process automatically verifies and aligns the position of FIB-created fiducials by masking off portions of acquired images, and then comparing them to synthesized images from CAD data. SEM beam positions are verified by comparison to images synthesized from CAD data. FIB beam position is also verified by comparison to already-aligned SEM images, or by synthesizing an FIB image from CAD using techniques for simulating FIB images. The automatic alignment techniques herein allow creation of sample lamellas at specified locations without operator intervention.

Abstract translation: 提供了一种用于S / TEM样品制备和分析的改进的工艺流程和设备。 优选实施例提供了用于自动配方TEM样品创建的改进方法，特别是对于小几何TEM薄片，采用CAD数据来自动对准样品制备的各个阶段。 该过程通过遮蔽所获取图像的部分，然后将其与CAD数据的合成图像进行比较，自动验证并对齐FIB创建的基准点的位置。 通过与从CAD数据合成的图像进行比较来验证SEM束位置。 FIB光束位置也通过与已对准的SEM图像进行比较，或通过使用用于模拟FIB图像的技术从CAD合成FIB图像来验证。 这里的自动对准技术允许在指定位置创建样品薄片，而无需操作员干预。