Transistor and method of fabricating the same
    12.
    发明授权
    Transistor and method of fabricating the same 有权
    晶体管及其制造方法

    公开(公告)号:US08901608B2

    公开(公告)日:2014-12-02

    申请号:US13908076

    申请日:2013-06-03

    CPC classification number: H01L29/778 H01L29/402 H01L29/42316 H01L29/66431

    Abstract: A high electron mobility transistor includes a T-type gate electrode disposed on a substrate between source and drain electrodes and insulating layers disposed between the substrate and the T-type gate electrode. The insulating layers include first, second, and third insulating layers. The third insulating layer is disposed between the substrate and a head portion of the T-type gate electrode such that a portion of the third insulating layer is in contact with a foot portion of the T-type gate electrode. The second insulating layer is disposed between the substrate and the head portion of the T-type gate electrode to be in contact with the third insulating layer. The first insulating layer and another portion of the third insulating layer are sequentially stacked between the substrate and the head portion of the T-type gate electrode to be in contact with the second insulating layer.

    Abstract translation: 高电子迁移率晶体管包括设置在源极和漏极之间的衬底上的T型栅电极和设置在衬底和T型栅电极之间的绝缘层。 绝缘层包括第一绝缘层,第二绝缘层和第三绝缘层。 第三绝缘层设置在基板和T型栅电极的头部之间,使得第三绝缘层的一部分与T型栅极的脚部接触。 第二绝缘层设置在基板与T型栅电极的头部之间以与第三绝缘层接触。 所述第一绝缘层和所述第三绝缘层的另一部分依次层叠在所述基板与所述T型栅电极的头部之间,以与所述第二绝缘层接触。

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