公开(公告)号：US20240258061A1

公开(公告)日：2024-08-01

申请号：US18588895

申请日：2024-02-27

申请人： ELVE INC.

发明人： Diana Gamzina Daugherty

IPC分类号： H01J23/083 ,  H01J9/18 ,  H01J23/06 ,  H01J23/16 ,  H01J25/34 ,  H01J29/62 ,  H01J29/70

CPC分类号： H01J23/083 ,  H01J9/18 ,  H01J23/06 ,  H01J23/165 ,  H01J29/62 ,  H01J29/70 ,  H01J25/34 ,  H01J2229/581 ,  H01J2229/582

摘要： Vacuum electron devices (VEDs) are produced having a plurality of two-dimensional layers of various materials that are bonded together to form one or more VEDs simultaneously. The two-dimensional material layers are machined to include features needed for device operation so that when assembled and bonded into a three-dimensional structure, three-dimensional features are formed. The two-dimensional layers are bonded together using brazing, diffusion bonding, assisted diffusion bonding, solid state bonding, cold welding, ultrasonic welding, and the like. The manufacturing process enables incorporation of metallic, magnetic, and ceramic materials required for VED fabrication while maintaining required positional accuracy and multiple devices per batch capability. The VEDs so produced include a combination of magnetic and electrostatic lenses for electron beam control.

公开(公告)号：US20180114672A1

公开(公告)日：2018-04-26

申请号：US15527119

申请日：2016-03-24

申请人： KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

发明人： Takashi OGAWA ,  Ju Hwang KIM ,  In Yong PARK

IPC分类号： H01J37/30 ,  H01J37/305

CPC分类号： H01J37/3007 ,  H01J29/62 ,  H01J29/70 ,  H01J31/24 ,  H01J37/05 ,  H01J37/3005 ,  H01J37/3053 ,  H01J2237/03 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/103 ,  H01J2237/12 ,  H01J2237/2802

摘要： The present invention relates to a charged particle beam apparatus enabling a selection of a charged particle beam in a specified energy range by symmetrically arranging cylindrical electrostatic lenses deflecting a path of the charged particle beam and disposing an energy selection aperture between the cylindrical electrostatic lenses. Since an integral structure in which a central electrode and a plurality of electrodes that are arranged at a front portion and a rear portion in relation to the central electrode of a monochromator are fixed to each other through insulator, is applied, a mechanism for adjusting an offset with respect to an optical axis is simplified as compared to the case of separately providing the lenses at the front portion and the rear portion, respectively, and a secondary aberration is canceled in an exit plane due to symmetry of an optical system.

公开(公告)号：US09564283B2

公开(公告)日：2017-02-07

申请号：US14408085

申请日：2012-06-14

申请人： Oscar Hemberg ,  Tomi Tuohimaa ,  Per Takman

发明人： Oscar Hemberg ,  Tomi Tuohimaa ,  Per Takman

IPC分类号： H01J29/62 ,  H01J35/04 ,  H01J35/08 ,  G21K1/08 ,  G21K5/04 ,  H01J35/14

CPC分类号： H01J29/62 ,  G21K1/08 ,  G21K5/04 ,  H01J35/04 ,  H01J35/08 ,  H01J35/14 ,  H01J2235/082 ,  H01J2235/16

摘要： In an electron irradiation system, a gas-tight housing encloses a cathode region and an irradiation region, which communicate through at least an aperture. In the cathode region, there is arranged a high-voltage cathode for emitting an electron beam. In the irradiation region, there is an irradiation site arranged to accommodate a stationary or moving object to be irradiated. The migration of cathode-degrading debris is limited by means of an electric field designed to prevent positively charged particles from entering the cathode region via the aperture. The invention can be embodied with an axial electric field, which realizes an energy threshold, or a transversal field which deflects charged particles away from trajectories leading into the cathode region.

摘要翻译： 在电子照射系统中，气密壳体包围通过至少一个孔连通的阴极区域和照射区域。 在阴极区域中设置有用于发射电子束的高电压阴极。 在照射区域中，存在被配置为容纳待照射的静止或移动物体的照射部位。 阴极降解碎屑的迁移通过设计用于防止带正电荷的颗粒经由孔径进入阴极区域的电场而受到限制。 本发明可以用实现能量阈值的轴向电场或使带电粒子远离导入阴极区域的横向场来实现。

公开(公告)号：US20150117617A1

公开(公告)日：2015-04-30

申请号：US14582782

申请日：2014-12-24

申请人： Kabushiki Kaisha Toshiba ,  Toshiba Electron Tubes & Devices Co., Ltd.

发明人： Tomonari ISHIHARA ,  Naoki Akahori ,  Hidero Anno

IPC分类号： H01J35/14 ,  H05G1/10 ,  H01J35/10

CPC分类号： H01J35/06 ,  A61B6/44 ,  H01J1/16 ,  H01J1/18 ,  H01J1/88 ,  H01J3/06 ,  H01J3/18 ,  H01J19/10 ,  H01J19/42 ,  H01J23/04 ,  H01J23/083 ,  H01J29/04 ,  H01J29/50 ,  H01J29/62 ,  H01J35/14 ,  H01J37/065 ,  H01J2229/481 ,  H01J2229/4827 ,  H01J2229/4831 ,  H01J2229/50 ,  H01J2229/582 ,  H01J2229/5835 ,  H01J2235/06 ,  H01J2237/032 ,  H01J2237/049 ,  H01J2237/06375 ,  H01J2893/0005 ,  H01J2893/005 ,  H01J2893/0088 ,  H01J2893/0089 ,  H01J2893/0094

摘要： According to one embodiment, an X-ray tube includes an anode target, a cathode including a filament and a convergence electrode which includes a groove portion, and an envelope. The groove portion includes a pair of first bottom surfaces which are located in the same plane as the filament and between which the filament is interposed in a width direction of the groove portion, and a pair of second bottom surfaces between which the filament and the pair of first bottom surfaces are interposed in a length direction of the groove portion and which are located closer to an opening of the groove portion than the pair of first bottom surfaces.

摘要翻译： 根据一个实施例，X射线管包括阳极靶，包括细丝的阴极和包括沟槽部分的会聚电极和外壳。 槽部包括一对第一底面，该第一底面位于与灯丝相同的平面上，并且灯丝沿沟槽部的宽度方向插入其间，一对第二底面之间形成有灯丝和一对 的第一底表面沿着槽部的长度方向设置，并且位于比一对第一底面更靠近槽部的开口部。

公开(公告)号：US20140212815A1

公开(公告)日：2014-07-31

申请号：US13756178

申请日：2013-01-31

申请人： Taiwan Semiconductor Manufacturing Company, Ltd.

发明人： Jimmy Hsiao ,  Ming-Zhang Kuo ,  Ping-Lin Yang ,  Cheng-Chung Lin ,  Osamu Takahashi ,  Sang Hoo Dhong

IPC分类号： H01J29/60 ,  H01J29/62

CPC分类号： H01J29/62 ,  H01J3/12 ,  H01J3/16 ,  H01J3/18 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/1205 ,  H01J2237/31789

摘要： A system includes an integrated circuit (IC) design data base having a feature, a source configured to generate a radiation beam, a pattern generator (PG) including a mirror array plate and an electrode plate disposed over the mirror array plate, wherein the electrode plate includes a lens let having a first dimension and a second dimension perpendicular to the first dimension with the first dimension larger than the second dimension so that the lens let modifies the radiation beam to form the long shaped radiation beam, and a stage configured secured the substrate. The system further includes an electric field generator connecting the minor array plate. The mirror array plate includes a mirror. The mirror absorbs or reflects the radiation beam. The radiation beam includes electron beam or ion beam. The second dimension is equal to a minimum dimension of the feature.

摘要翻译： 一种系统包括具有特征的集成电路（IC）设计数据库，被配置为产生辐射束的源，包括反射镜阵列板的图案发生器（PG）和设置在所述反射镜阵列板上的电极板，其中所述电极 板包括透镜，其具有垂直于第一尺寸的第一尺寸和第二尺寸，其第一尺寸大于第二尺寸，使得透镜使得辐射束修改以形成长形辐射束，并且被配置为将 基质。 该系统还包括连接小阵列板的电场发生器。 镜阵列板包括镜子。 镜子吸收或反射辐射束。 辐射束包括电子束或离子束。 第二个维度等于该特征的最小尺寸。

公开(公告)号：US08084930B2

公开(公告)日：2011-12-27

申请号：US12957576

申请日：2010-12-01

申请人： Artush A. Abgaryan ,  Eli Levi

发明人： Artush A. Abgaryan ,  Eli Levi

IPC分类号： H01J29/46

CPC分类号： H01J29/62 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J35/14 ,  H01J37/063 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0492 ,  H01J2237/0656 ,  H01J2237/28

摘要： System that focuses electron beams in an electro-static area to a laminar flow of electrons with uniform distribution of current density and extraordinary demagnification includes a housing having a first interior portion and a second interior portion electrically insulated from the first interior portion. The second interior portion has an electric field-free space. An electrode system is disposed in the first interior portion and includes a cathode assembly and at least one anode assembly. The cathode assembly generates an electron beam that passes through each anode assembly and then into the electric field-free space in the second interior portion. The system parameters may be calculated and created due to the CGMR conceptual method.

摘要翻译： 将静电区域中的电子束聚焦到具有均匀分布的电流密度和非常缩小的电子层流的系统包括具有与第一内部部分电绝缘的第一内部部分和第二内部部分的壳体。 第二内部部分具有无电场的空间。 电极系统设置在第一内部部分中并且包括阴极组件和至少一个阳极组件。 阴极组件产生通过每个阳极组件然后进入第二内部部分中的无电场空间的电子束。 由于CGMR概念方法，系统参数可能会被计算和创建。

公开(公告)号：US20110068675A1

公开(公告)日：2011-03-24

申请号：US12957576

申请日：2010-12-01

申请人： Artush A. Abgaryan ,  Eli Levi

发明人： Artush A. Abgaryan ,  Eli Levi

IPC分类号： H01J29/46

CPC分类号： H01J29/62 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/18 ,  H01J35/14 ,  H01J37/063 ,  H01J37/065 ,  H01J37/3174 ,  H01J2237/0492 ,  H01J2237/0656 ,  H01J2237/28

摘要： System that focuses electron beams in an electro-static area to a laminar flow of electrons with uniform distribution of current density and extraordinary demagnification includes a housing having a first interior portion and a second interior portion electrically insulated from the first interior portion. The second interior portion has an electric field-free space. An electrode system is disposed in the first interior portion and includes a cathode assembly and at least one anode assembly. The cathode assembly generates an electron beam that passes through each anode assembly and then into the electric field-free space in the second interior portion. The system parameters may be calculated and created due to the CGMR conceptual method.

摘要翻译： 将静电区域中的电子束聚焦到具有均匀分布的电流密度和非常缩小的电子层流的系统包括具有与第一内部部分电绝缘的第一内部部分和第二内部部分的壳体。 第二内部部分具有无电场的空间。 电极系统设置在第一内部部分中并且包括阴极组件和至少一个阳极组件。 阴极组件产生通过每个阳极组件然后进入第二内部部分中的无电场空间的电子束。 由于CGMR概念方法，系统参数可能会被计算和创建。

公开(公告)号：US06597096B1

公开(公告)日：2003-07-22

申请号：US09252237

申请日：1999-02-18

申请人： Yasunobu Amano ,  Norifumi Kikuchi ,  Makoto Natori

发明人： Yasunobu Amano ,  Norifumi Kikuchi ,  Makoto Natori

IPC分类号： H01J2915

CPC分类号： H01J29/62

摘要： In an inline three-beam system color cathode-ray tube, there is provided an inline three-beam system color cathode-ray tube electron gun in which beam spot shapes of three electron beams on the left and right end portions of a fluorescent screen may be uniformed as much as possible and focusing voltages may be adjusted with ease and also deteriorations of beam spot shapes of three electron beams on the left and right end portions of the fluorescent screen may be alleviated and a satisfactory convergence characteristic may be obtained on the whole region of the screen. A color cathode-ray tube electron gun includes trisected focusing electrodes. Of the trisected focusing electrodes, a voltage of a waveform similar to a sawtooth synchronized with the horizontal scanning is applied to a central focusing electrode thereof, a housed resistor is connected to the central focusing electrode and two outside focusing electrodes and a voltage which results from passing the voltage Ef3 of the waveform similar to the sawtooth through the housed resistor is applied to the two outside focusing electrodes. A color cathode-ray tube electron gun includes trisected cathodes comprising a uni-potential lens and in which a voltage of a waveform synchronized with-a horizontal direction deflection and a vertical direction deflection is applied to the center electrode of the trisected electrodes.

摘要翻译： 在线性三光束系统彩色阴极射线管中，提供了一种在线三光束系统彩色阴极射线管电子枪，荧光屏左右两端的三束电子束的光斑形状可以 尽可能地均匀化，并且可以容易地调整聚焦电压，并且可以减轻荧光屏的左端部和右端部上的三束电子束的光点形状的劣化，并且可以获得令人满意的收敛特性 一个彩色阴极射线管电子枪包括三个聚焦电极。 在三重聚焦电极中，将与水平扫描同步的锯齿波形类似的波形的电压施加到其中心聚焦电极，将收纳的电阻器连接到中心聚焦电极和两个外部聚焦电极以及由 通过所容纳的电阻将与锯齿波形类似的波形的电压Ef3传递到两个外部聚焦电极。 彩色阴极射线管电子枪具有包括单电位透镜的三相阴极，其中与三维电极的中心电极施加与水平方向偏转和垂直方向偏转同步的波形的电压。

公开(公告)号：US5663609A

公开(公告)日：1997-09-02

申请号：US530731

申请日：1995-09-19

申请人： Eiji Kamohara ,  Junichi Kimiya

发明人： Eiji Kamohara ,  Junichi Kimiya

IPC分类号： H01J29/48 ,  H01J29/50 ,  H01J29/51 ,  H01J29/62 ,  H01J29/58

CPC分类号： H01J29/503 ,  H01J29/62

摘要： A color cathode ray tube apparatus is provided with an electron gun assembly. In the electron gun assembly, three electron beams, which are emitted from cathodes of an in-line arrangement, are accelerated and converged onto a phosphor screen by an electron lens system of the electron gun assembly. The electron lens system is constituted by a plurality of grid electrodes and includes individual electron lenses and a common electron lens. Each of the individual electron lenses has first and second lens powers in horizontal and vertical planes, respectively. Each of the electron beams is diverged in the horizontal plane and converged in the vertical plane by the corresponding individual electron lens due to the first and second lens powers. The common electron lens has third and forth lens powers in the horizontal and vertical planes, respectively. The electron beams from the individual electron lenses are converged in the horizontal plane by the common electron lens due to the third lens power and each of the electron beams diverged by the common electron lens due to the fourth lens power.

摘要翻译： 彩色阴极射线管装置设有电子枪组件。 在电子枪组件中，从串联排列的阴极发射的三束电子束通过电子枪组件的电子透镜系统被加速并会聚到荧光屏上。 电子透镜系统由多个栅格电极构成，并且包括单个电子透镜和公共电子透镜。 每个单独的电子透镜分别在水平和垂直平面中具有第一和第二透镜功率。 每个电子束在水平面上发散，并由于第一和第二透镜光焦度而被相应的单个电子透镜会聚在垂直平面中。 普通电子透镜在水平和垂直平面上分别具有第三和第三透镜光焦度。 各个电子透镜的电子束由于第三透镜光焦度而由公共电子透镜在水平面中会聚，并且由于第四透镜光焦度而由公共电子透镜发散的每个电子束。

公开(公告)号：US4900980A

公开(公告)日：1990-02-13

申请号：US802068

申请日：1985-11-25

申请人： Antonius H. P. M. Peels

发明人： Antonius H. P. M. Peels

IPC分类号： H01J9/14 ,  H01J29/50 ,  H01J29/56 ,  H01J29/62

CPC分类号： H01J29/62 ,  H01J29/503 ,  H01J29/56 ,  H01J2229/4865 ,  H01J2229/4872

摘要： The astigmatism of the electron beams (6, 7, 8) generated by an electron gun system (5) are substantially reduced by constructing the lens electrode components (25, 26) between which a focusing lens is formed in an operating electron gun to be inverted replicas of each other. The lens electrode components should be provided with the corresponding sides (45, 46) facing each other and with the corresponding apertures (38, 42) opposite to each other.

摘要翻译： 由电子枪系统（5）产生的电子束（6,7,8）的散光通过构成在工作电子枪中形成聚焦透镜的透镜电极部件（25,26）而大大减小， 倒置的副本。 透镜电极部件应设有彼此面对的对应的边（45,46）以及与彼此相对的对应的孔（38,42）。