公开(公告)号：US11892561B2

公开(公告)日：2024-02-06

申请号：US17633830

申请日：2020-08-10

申请人： Nanowave Technologies Inc.

发明人： Justin Dinsdale Miller ,  Charles William Tremlett Nicholls

IPC分类号： G01S7/40 ,  G01B15/02 ,  H01Q13/20

CPC分类号： G01S7/4039 ,  G01B15/025 ,  H01Q13/20

摘要： Disclosed herein is a system and method for determining a thickness of ice on Radio Frequency (RF) systems The system includes a sensor unit for use in determining the thickness of ice on a surface of a RADAR system having a RADAR antenna, the sensor unit including a sensor unit antenna tunable to a harmonic of a RADAR antenna signal, the harmonic having a frequency within an ice absorption band, wherein the sensor unit antenna emits the harmonic at a first signal strength; and, a sensor unit receiver communicatively coupled to the sensor unit antenna and configured to detect a second signal strength of the harmonic received by the sensor unit antenna.

公开(公告)号：US20140110590A1

公开(公告)日：2014-04-24

申请号：US13656918

申请日：2012-10-22

申请人： TROXLER ELECTRONIC LABORATORIES, INC.

发明人： Wewage Hiran Linus Dep ,  Robert Ernest Troxler

IPC分类号： G01N33/18 ,  G01T1/16 ,  G01T1/20 ,  G01T3/00

CPC分类号： G01N23/08 ,  B65G15/08 ,  B65G43/08 ,  B65G2201/045 ,  B65G2203/0208 ,  B65G2203/04 ,  G01B15/025 ,  G01N23/06 ,  G01N23/083 ,  G01N23/09 ,  G01N33/383 ,  G01N2223/04 ,  G01N2223/205 ,  G01N2223/505 ,  G01N2223/613 ,  G01N2223/633 ,  G01N2223/643

摘要： A system is provided. The system includes a conveyor apparatus configured for conveying a material and a water content measurement system positioned about the conveyor apparatus for determining water content in the material. A dimension characteristic measurement system for detecting one or more dimension characteristics of the material is provided and a computer device is configured to manipulate data received from the water content measurement system and the dimension characteristic measurement system to determine a water content of the material.

摘要翻译： 提供了一个系统。 该系统包括构造成输送物料的输送装置和围绕输送装置定位的含水量测量系统，用于确定材料中的含水量。 提供了一种用于检测材料的一个或多个维度特征的维度特征测量系统，并且计算机设备被配置为操纵从含水量测量系统和尺寸特征测量系统接收的数据，以确定材料的含水量。

公开(公告)号：US08228488B2

公开(公告)日：2012-07-24

申请号：US12516012

申请日：2007-12-06

申请人： Peter Schmitt ,  Guenther Kostka

发明人： Peter Schmitt ,  Guenther Kostka

IPC分类号： G01N21/00

CPC分类号： G01B11/0691 ,  G01B11/245 ,  G01B15/025

摘要： The material strength of extensive objects can be determined efficiently by using two distance measurers, wherein a first distance measurer determines the distance to a first main surface of the object and a second distance measurer determines the distance to a second main surface object opposing the first main surface. If potential measurement errors due to the extensive geometry are avoided by determining a reference distance between the first distance measurer and the second distance measurer by a reference unit via X-radiation, the thickness of the object between the first main surface and the second main surface can be determined with high accuracy and velocity.

摘要翻译： 可以通过使用两个距离测量器有效地确定广泛物体的材料强度，其中第一距离测量器确定到物体的第一主表面的距离，第二距离测量器确定到与第一主体相对的第二主表面物体的距离 表面。 如果通过X射线确定第一距离测量器和第二距离测量器之间的参考距离来避免由于广泛几何造成的潜在测量误差，则第一主表面和第二主表面之间的物体的厚度 可以以高精度和高速度确定。

公开(公告)号：US20090128830A1

公开(公告)日：2009-05-21

申请号：US12269449

申请日：2008-11-12

申请人： Christian KOTTLER ,  Rolf KAUFMANN

发明人： Christian KOTTLER ,  Rolf KAUFMANN

IPC分类号： G01B9/02

CPC分类号： G01B15/025 ,  G01B9/02024 ,  G01B2290/30 ,  G01N23/04 ,  G21K2207/005

摘要： The present invention discloses an interferometer device and method. In embodiments, the device comprises an electromagnetic radiation source emitting radiation having a first mean wavelength λLE; a phase grating having a first aspect ratio; an absorption grating having a second aspect ratio; and a detector. The electromagnetic radiation source, the phase grating, the absorption grating and the detector are radiatively coupled with each other. The absorption grating is positioned between the detector and the phase grating; the electromagnetic radiation source is positioned in front of the source grating; and wherein the phase grating is designed such to cause a phase shift that is smaller than π on the emitted radiation. Additional and alternative embodiments are specified and claimed.

摘要翻译： 本发明公开了一种干涉仪装置及方法。 在实施例中，该装置包括发射具有第一平均波长λLE的辐射的电磁辐射源; 具有第一纵横比的相位光栅; 具有第二纵横比的吸收光栅; 和检测器。 电磁辐射源，相位光栅，吸收光栅和检测器彼此辐射耦合。 吸收光栅位于检测器和相位光栅之间; 电磁辐射源位于源光栅前面; 并且其中相位光栅被设计成使得在所发射的辐射上产生小于pi的相移。 具体说明和替代实施例。

公开(公告)号：US07480363B2

公开(公告)日：2009-01-20

申请号：US11108498

申请日：2005-04-18

申请人： Brian W. Lasiuk ,  Thomas J. Batzinger ,  Manoharan Venugopal ,  Elizabeth L. Dixon ,  Michael R. Hopple ,  Nityanand Gopalika ,  Sivaramanivas Ramaswamy ,  Debasish Mishra ,  Rajashekar Venkatachalam ,  Vamishi Krishna Reddy Kommareddy

发明人： Brian W. Lasiuk ,  Thomas J. Batzinger ,  Manoharan Venugopal ,  Elizabeth L. Dixon ,  Michael R. Hopple ,  Nityanand Gopalika ,  Sivaramanivas Ramaswamy ,  Debasish Mishra ,  Rajashekar Venkatachalam ,  Vamishi Krishna Reddy Kommareddy

IPC分类号： G01B15/02

CPC分类号： G01B15/025

摘要： A digital radiography imaging system for acquiring digital images of an object, and a method for transforming digital images into an absolute thickness map characterizing the object under inspection. The system includes a radiation source for directing radiation through a desired region of the object, and a radiation detector having a plurality of sensing elements for detecting radiation passing through the object. Numerical data generated from each sensing element is calibrated, for example by correcting for variations in radiation paths between the source and detector, by correcting for variations in the spatial frequency response (MTF) of the detector, by correcting for variations in the geometric profile of the object under inspection, and by correcting for material contained in and/or around the object. The calibrated data is processed in order to generate and display an absolute thickness map of the object. The calibration procedures are adapted for extracting a thickness map from both isotope sources and X-ray tube sources.

摘要翻译： 一种用于获取对象的数字图像的数字放射线照相成像系统，以及将数字图像转换为表征检查对象的绝对厚度图的方法。 该系统包括用于引导辐射通过物体的期望区域的辐射源，以及具有用于检测通过物体的辐射的多个感测元件的辐射检测器。 通过校正检测器的空间频率响应（MTF）的变化，通过校正各个感测元件的几何轮廓的变化来校正每个感测元件产生的数值数据，例如通过校正源和检测器之间的辐射路径的变化 被检查物体，以及通过校正物体中和/或周围的物质。 对校准后的数据进行处理，以生成和显示对象的绝对厚度图。 校准程序适用于从同位素源和X射线管源提取厚度图。

公开(公告)号：US20080043907A1

公开(公告)日：2008-02-21

申请号：US11840522

申请日：2007-08-17

申请人： Harald Sikora

发明人： Harald Sikora

IPC分类号： G01B21/02 ,  G01N23/083

CPC分类号： G01B15/025

摘要： A method for measuring the wall thickness of a plastic sheathing of an electrical core or cable, in particular a power cable having at least one core, wherein the absorption capacity of the material surrounding the plastic sheathing approximates or is similar to that of the plastic sheathing, wherein the core or the cable is irradiated at a right angle to its extension on one side by x-ray radiation and the wall thickness of the encased core or cable is determined on the opposite side from the distribution of the intensity of the detected x-ray, characterized in that the material of the plastic sheathing or a plastic material surrounding the plastic sheathing is foamed prior to measuring the wall thickness for the purpose of modifying its absorption capacity.

摘要翻译： 一种用于测量电芯或电缆的塑料护​​套的壁厚的方法，特别是具有至少一个芯的电力电缆，其中围绕塑料护套的材料的吸收能力近似于或类似于塑料护套的吸收能力 ，其中芯线或电缆通过x射线辐射在一侧以与其延伸部成直角的角度照射，并且在与检测到的x的强度的分布相反的一侧确定包裹的芯或电缆的壁厚 射线，其特征在于，为了改变其吸收能力，在测量壁厚之前，将塑料护套的材料或围绕塑料护套的塑料材料发泡。

公开(公告)号：US06507634B1

公开(公告)日：2003-01-14

申请号：US10067604

申请日：2002-02-04

申请人： Louis N. Koppel ,  William Johnson

发明人： Louis N. Koppel ,  William Johnson

IPC分类号： G01N2306

CPC分类号： G01N23/20 ,  G01B15/025

摘要： A metrology system and method for measuring the thickness of thin-films of semiconductor wafer. This system and method analyze x-ray reflectivity data to determine transmission characteristics of thin-film layers. Based on these transmission characteristics the thickness of the thin-layer can be determined. Unlike some prior systems and methods, the system and method herein does not determine the thickness of the thin-film layer based on a fringe pattern in reflectivity for the thin-film layer. The fact that the system and method herein does not rely the fringe pattern is particularly advantageous in situations where the thin-film layer is of thickness which makes it very difficult to resolve the fringe pattern in the reflectivity data.

摘要翻译： 一种用于测量半导体晶片薄膜厚度的计量系统和方法。 该系统和方法分析x射线反射率数据，以确定薄膜层的透射特性。 基于这些传输特性，可以确定薄层的厚度。 与一些现有的系统和方法不同，本文的系统和方法不基于薄膜层的反射率中的条纹图案来确定薄膜层的厚度。 这里的系统和方法不依赖于条纹图案的事实在薄膜层的厚度使得非常难以解决反射率数据中的条纹图案的情况下特别有利。

公开(公告)号：US6002740A

公开(公告)日：1999-12-14

申请号：US942757

申请日：1997-10-02

申请人： Franco Cerrina ,  Thomas B. Lucatorto

发明人： Franco Cerrina ,  Thomas B. Lucatorto

IPC分类号： G01B15/02 ,  G01B15/06 ,  G03F1/22 ,  G03F1/24 ,  G03F1/84 ,  G03F7/20

CPC分类号： G03F1/84 ,  G01B15/025 ,  G01B15/06 ,  G03F1/22 ,  G03F1/24 ,  G03F7/7065 ,  G03F7/70666

摘要： Inspection of objects such as X-ray lithography masks is carried out by passing X-rays or extreme ultraviolet light through an object which absorbs in a pattern to provide a patterned X-ray or ultraviolet image which is then directed to a converter. The converter converts the image incident upon it to an image formed by electrons emitted from the converter. The emitted electrons are magnified in an electron microscope and the magnified electron image is displayed by the electron microscope. The visible image may be further digitized and processed by a computer, including long-term storage or display on a computer monitor. X-ray lithography masks may be inspected by passing X-rays through masks of the same type that will be used for lithography so that the magnified image of the X-rays passed through the masks corresponds to the pattern of X-rays that will be incident on a photoresist, allowing accurate inspection of X-ray masks before use.

摘要翻译： 通过将X射线或极紫外光通过吸收图案的物体进行X射线光刻掩模等物体的检查，得到图案化的X射线或紫外线，然后将其导向转换器。 转换器将入射到其上的图像转换成由转换器发射的电子形成的图像。 发射的电子在电子显微镜中放大，放大的电子图像通过电子显微镜显示。 可视图像可以被计算机进一步数字化和处理，包括在计算机监视器上的长期存储或显示。 可以通过将X射线通过用于光刻的相同类型的掩模来检查X射线光刻掩模，使得通过掩模的X射线的放大图像对应于将被 入射到光致抗蚀剂上，允许在使用前对X射线掩模进行精确检查。

公开(公告)号：US5608660A

公开(公告)日：1997-03-04

申请号：US323455

申请日：1994-10-14

申请人： Ira L. Morgan ,  Robert H. Rice ,  Joseph E. Bolger ,  Donald G. Schindler

发明人： Ira L. Morgan ,  Robert H. Rice ,  Joseph E. Bolger ,  Donald G. Schindler

IPC分类号： B21B37/18 ,  B21B37/78 ,  G01B15/02 ,  G01N23/04 ,  G01N23/18 ,  G01B15/04

CPC分类号： G01N23/046 ,  B21B37/78 ,  G01B15/025 ,  G01N23/18 ,  B21B2261/20 ,  G01N2223/419

摘要： An apparatus and method for controlling the quality of cylindrical or other geometrically regular-shaped products, such as tube or rounds, through high precision, continuous, real-time three-dimensional analysis of hot or cold products during their manufacture are disclosed. The apparatus includes multiple penetrating radiation sources and detectors. The apparatus is able to continuously and in real time perform a three-dimensional analysis of hot or cold products, detect cross-sectional and longitudinal flaws in the products, determine the processing steps causing the flaw, and modify the production process through feedback and/or feedforward control of the processing equipment. In performing the analysis on hot or cold products, the apparatus can determine the dimensional measurements of the products at other temperatures and take these measurements into consideration while controlling the manufacturing process in order to produce products of consistent dimensional quality.

摘要翻译： 公开了一种用于通过在制造过程中对热或冷产品进行高精度，连续，实时三维分析来控制圆柱形或其他几何规则形状产品（例如管或圆形）的质量的装置和方法。 该装置包括多个穿透辐射源和检测器。 该装置能够连续且实时地对热或冷产品进行三维分析，检测产品中的横截面和纵向缺陷，确定导致缺陷的处理步骤，并通过反馈和/ 或处理设备的前馈控制。 在对冷或热产品进行分析时，该设备可以在其他温度下确定产品的尺寸测量，并在控制制造过程时考虑这些测量，以便产生一致的尺寸质量的产品。

公开(公告)号：US5255302A

公开(公告)日：1993-10-19

申请号：US845262

申请日：1992-03-03

申请人： Takayuki Shimamune ,  Tamotsu Hayashi

发明人： Takayuki Shimamune ,  Tamotsu Hayashi

IPC分类号： C25D1/04 ,  G01B15/02

CPC分类号： G01B15/025

摘要： A device for continuously measuring the thickness of a foil includes a radiation source opposite a radiation detector, and a movement member which moves the radiation source and detector synchronously in a width-direction of the foil. A signal generator generates a signal indicating a position of a portion of the foil whose thickness is being measured, and a counter having a plurality of integrating channels integrates detection signals output from the detector to generate an integrated count number for each channel. A signal switching member switches each of the plurality of integrating channels of the counter according to signals generated by the signal generator, and a calculator calculates a foil thickness from the integrated counted number for each channel of the counter. This structure allows continuous and precise measurement of the foil's thickness.

摘要翻译： 用于连续测量箔的厚度的装置包括与放射线检测器相对的辐射源，以及沿着箔的宽度方向同步移动辐射源和检测器的移动部件。 信号发生器产生指示其厚度被测量的箔的一部分的位置的信号，并且具有多个积分通道的计数器对从检测器输出的检测信号进行积分，以产生每个通道的积分计数。 信号切换部件根据由信号发生器产生的信号来切换计数器的多个积分通道中的每一个，并且计算器根据计数器的每个通道的积分计数来计算箔厚度。 这种结构允许连续和精确地测量箔的厚度。