公开(公告)号：US07924973B2

公开(公告)日：2011-04-12

申请号：US12269449

申请日：2008-11-12

申请人： Christian Kottler ,  Rolf Kaufmann

发明人： Christian Kottler ,  Rolf Kaufmann

IPC分类号： G03H5/00 ,  G01T1/36

CPC分类号： G01B15/025 ,  G01B9/02024 ,  G01B2290/30 ,  G01N23/04 ,  G21K2207/005

摘要： The present invention discloses an interferometer device and method. In embodiments, the device comprises an electromagnetic radiation source emitting radiation having a first mean wavelength λLE; a phase grating having a first aspect ratio; an absorption grating having a second aspect ratio; and a detector. The electromagnetic radiation source, the phase grating, the absorption grating and the detector are radiatively coupled with each other. The absorption grating is positioned between the detector and the phase grating; the electromagnetic radiation source is positioned in front of the source grating; and wherein the phase grating is designed such to cause a phase shift that is smaller than π on the emitted radiation. Additional and alternative embodiments are specified and claimed.

摘要翻译： 本发明公开了一种干涉仪装置及方法。 在实施例中，该装置包括发射具有第一平均波长λLE的辐射的电磁辐射源; 具有第一纵横比的相位光栅; 具有第二纵横比的吸收光栅; 和检测器。 电磁辐射源，相位光栅，吸收光栅和检测器彼此辐射耦合。 吸收光栅位于检测器和相位光栅之间; 电磁辐射源位于源光栅前面; 并且其中所述相位光栅被设计成导致小于＆pgr的相移; 对发射的辐射。 具体说明和替代实施例。

公开(公告)号：US20090128830A1

公开(公告)日：2009-05-21

申请号：US12269449

申请日：2008-11-12

申请人： Christian KOTTLER ,  Rolf KAUFMANN

发明人： Christian KOTTLER ,  Rolf KAUFMANN

IPC分类号： G01B9/02

CPC分类号： G01B15/025 ,  G01B9/02024 ,  G01B2290/30 ,  G01N23/04 ,  G21K2207/005

摘要： The present invention discloses an interferometer device and method. In embodiments, the device comprises an electromagnetic radiation source emitting radiation having a first mean wavelength λLE; a phase grating having a first aspect ratio; an absorption grating having a second aspect ratio; and a detector. The electromagnetic radiation source, the phase grating, the absorption grating and the detector are radiatively coupled with each other. The absorption grating is positioned between the detector and the phase grating; the electromagnetic radiation source is positioned in front of the source grating; and wherein the phase grating is designed such to cause a phase shift that is smaller than π on the emitted radiation. Additional and alternative embodiments are specified and claimed.

摘要翻译： 本发明公开了一种干涉仪装置及方法。 在实施例中，该装置包括发射具有第一平均波长λLE的辐射的电磁辐射源; 具有第一纵横比的相位光栅; 具有第二纵横比的吸收光栅; 和检测器。 电磁辐射源，相位光栅，吸收光栅和检测器彼此辐射耦合。 吸收光栅位于检测器和相位光栅之间; 电磁辐射源位于源光栅前面; 并且其中相位光栅被设计成使得在所发射的辐射上产生小于pi的相移。 具体说明和替代实施例。