发明授权
US06507634B1 System and method for X-ray reflectometry measurement of low density films 有权
低密度薄膜X射线反射测量系统和方法

  • 专利标题: System and method for X-ray reflectometry measurement of low density films
  • 专利标题(中): 低密度薄膜X射线反射测量系统和方法
  • 申请号: US10067604
    申请日: 2002-02-04
  • 公开(公告)号: US06507634B1
    公开(公告)日: 2003-01-14
  • 发明人: Louis N. KoppelWilliam Johnson
  • 申请人: Louis N. KoppelWilliam Johnson
  • 主分类号: G01N2306
  • IPC分类号: G01N2306
System and method for X-ray reflectometry measurement of low density films
摘要:
A metrology system and method for measuring the thickness of thin-films of semiconductor wafer. This system and method analyze x-ray reflectivity data to determine transmission characteristics of thin-film layers. Based on these transmission characteristics the thickness of the thin-layer can be determined. Unlike some prior systems and methods, the system and method herein does not determine the thickness of the thin-film layer based on a fringe pattern in reflectivity for the thin-film layer. The fact that the system and method herein does not rely the fringe pattern is particularly advantageous in situations where the thin-film layer is of thickness which makes it very difficult to resolve the fringe pattern in the reflectivity data.
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