Abstract:
A semiconductor device includes a bit line, a channel, a word line and a capacitor. The bit line is disposed on a substrate, and extends in a first direction substantially perpendicular to an upper surface of the substrate. The channel at least partially surrounds a sidewall of the bit line. The word line is disposed on the substrate, and at least a portion of the word line overlaps the channel in a horizontal direction substantially parallel to the upper surface of the substrate. The capacitor is electrically connected to the channel, and at least a portion of the capacitor overlaps the channel and the word line in the horizontal direction.
Abstract:
A spacer covering a sidewall of a contact plug includes a relatively more damaged first portion and a relatively less damaged second portion. An interface of the first and second portions of the spacer is spaced apart from a metal silicide layer of the contact plug. Thus reliability of the semiconductor device may be improved. Related fabrication methods are also described.
Abstract:
Provided are a phase-change memory device and a method of fabricating the same. The device may include memory cells provided at intersections of word lines and bit lines that extend along first and second directions crossing each other, and a mold layer including thermal insulating regions, such as air gaps, that may be provided between the memory cells to separate the memory cells from each other. Each of the memory cells may include a lower electrode electrically connected to the word line to have a first width in the first direction, an upper electrode electrically connected to the bit line to have a second width greater than the first width in the first direction, and a phase-change layer provided between the lower and upper electrodes to have the first width in the first direction.
Abstract:
A variable resistance memory device includes a first conductive line structure having an adiabatic line therein on a substrate, a variable resistance pattern contacting an upper surface of the first conductive line structure, a low resistance pattern contacting an upper surface of the variable resistance pattern, a selection structure on the low resistance pattern, and a second conductive line on the selection structure.
Abstract:
Variable resistance memory devices are provided. A variable resistance memory device includes conductive lines and a memory cell including a variable resistance element on one of the conductive lines. The variable resistance memory device includes a first insulating region between the conductive lines. Moreover, the variable resistance memory device includes a second insulating region on the first insulating region between the conductive lines. Methods of forming variable resistance memory devices are also provided.
Abstract:
Provided are a phase-change memory device and a method of fabricating the same. The device may include memory cells provided at intersections of word lines and bit lines that extend along first and second directions crossing each other, and a mold layer including thermal insulating regions, such as air gaps, that may be provided between the memory cells to separate the memory cells from each other. Each of the memory cells may include a lower electrode electrically connected to the word line to have a first width in the first direction, an upper electrode electrically connected to the bit line to have a second width greater than the first width in the first direction, and a phase-change layer provided between the lower and upper electrodes to have the first width in the first direction.
Abstract:
A semiconductor device includes a base structure comprising a semiconductor substrate, a first conductive structure disposed on the base structure, and extending in a first direction, the first conductive structure including lower layers, and at least one among the lower layers including carbon, and a data storage pattern disposed on the first conductive structure. The semiconductor device further includes an intermediate conductive pattern disposed on the data storage pattern, and including intermediate layers, at least one among the intermediate layers including carbon, a switching pattern disposed on the intermediate conductive pattern, and a switching upper electrode pattern disposed on the switching pattern, and including carbon. The semiconductor device further includes a second conductive structure disposed on the switching upper electrode pattern, and extending in a second direction intersecting the first direction, and a hole spacer disposed on a side surface of the data storage pattern.
Abstract:
A semiconductor device includes a back gate line that is on a substrate and extends in a first direction, a plurality of channel structures that are on side walls of the back gate line and spaced apart from each other in a second first direction that intersects the first direction, a word line that at least partially surrounds the plurality of channel structures, and a bit line on a lower surface of each of the plurality of channel structures, where each of the plurality of channel structures includes: a first side wall facing the word line, and a second side wall that faces the back gate line and contacts an edge of the first side wall, where the first side wall is curved, and where the second side wall is flat.
Abstract:
A semiconductor memory device including a substrate; a first conductive line on the substrate and extending in a first direction that is parallel to an upper surface of the substrate; a second conductive line extending in a second direction that intersects the first direction; a memory cell between the conductive lines and including a lower electrode pattern, a data storage element, an intermediate electrode pattern, a switching element, and an upper electrode pattern sequentially stacked on the first conductive line; and a sidewall spacer on a side surface of the memory cell, wherein the side surface of the memory cell includes a first concave portion at a side surface of the switching element, and the sidewall spacer includes a first portion on a side surface of the upper electrode pattern, and a second portion on the first concave portion, the second portion being thicker than the first portion.
Abstract:
Variable resistance memory devices are provided. A variable resistance memory device includes conductive lines and a memory cell including a variable resistance element on one of the conductive lines. The variable resistance memory device includes a first insulating region between the conductive lines. Moreover, the variable resistance memory device includes a second insulating region on the first insulating region between the conductive lines. Methods of forming variable resistance memory devices are also provided.