公开(公告)号：US20130285248A1

公开(公告)日：2013-10-31

申请号：US13836807

申请日：2013-03-15

申请人： ASIA PACIFIC MICROSYSTEMS, INC.

发明人： Hung-Lin Yin ,  Jerwei Hsieh ,  Li-Yuan Lin

IPC分类号： H01L23/498 ,  H01L21/762

CPC分类号： H01L23/49866 ,  B81C1/00269 ,  B81C2203/019 ,  H01L21/50 ,  H01L21/76251 ,  H01L23/10 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/27 ,  H01L24/29 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L24/95 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/0347 ,  H01L2224/03614 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05073 ,  H01L2224/05166 ,  H01L2224/05171 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/1145 ,  H01L2224/11462 ,  H01L2224/1147 ,  H01L2224/11614 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13111 ,  H01L2224/13139 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16503 ,  H01L2224/16507 ,  H01L2224/2745 ,  H01L2224/27462 ,  H01L2224/2747 ,  H01L2224/27614 ,  H01L2224/29011 ,  H01L2224/2908 ,  H01L2224/29082 ,  H01L2224/29084 ,  H01L2224/29111 ,  H01L2224/29139 ,  H01L2224/32146 ,  H01L2224/32148 ,  H01L2224/32235 ,  H01L2224/32238 ,  H01L2224/32503 ,  H01L2224/32507 ,  H01L2224/48091 ,  H01L2224/48148 ,  H01L2224/48228 ,  H01L2224/48463 ,  H01L2224/73103 ,  H01L2224/73203 ,  H01L2224/73215 ,  H01L2224/81011 ,  H01L2224/81013 ,  H01L2224/81022 ,  H01L2224/81121 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81825 ,  H01L2224/81948 ,  H01L2224/83011 ,  H01L2224/83013 ,  H01L2224/83022 ,  H01L2224/83121 ,  H01L2224/83193 ,  H01L2224/83203 ,  H01L2224/83805 ,  H01L2224/83825 ,  H01L2224/83948 ,  H01L2224/9202 ,  H01L2224/92147 ,  H01L2224/95 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/1461 ,  H01L2924/15787 ,  H01L2924/16235 ,  H01L2924/351 ,  H01L2924/00015 ,  H01L2224/83 ,  H01L2224/85 ,  H01L2224/81 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： A substrate bonding method comprises the following steps. Firstly, a first substrate and a second substrate are provided, wherein a surface of the first substrate is covered by a first Ag layer and a surface of the second substrate is covered by a second Ag layer and a metallic layer from bottom to top, wherein the metallic layer comprises a first Sn layer. Secondly, a bonding process is performed by aligning the first and second substrates followed by bringing the metallic layer into contact with the first Ag layer followed by applying a load while heating to a predetermined temperature in order to form Ag3Sn intermetallic compounds. Finally, cool down and remove the load to complete the bonding process.

摘要翻译： 基板接合方法包括以下步骤。 首先，提供第一基板和第二基板，其中第一基板的表面被第一Ag层覆盖，并且第二基板的表面被从第二Ag层和从底部到顶部的金属层覆盖，其中 金属层包括第一Sn层。 其次，通过使第一和第二基板对准，然后使金属层与第一Ag层接触，然后在加热至预定温度的同时施加负载以形成Ag 3 Sn金属间化合物，进行接合工艺。 最后，冷却并清除负载以完成粘合过程。

公开(公告)号：US08916449B2

公开(公告)日：2014-12-23

申请号：US13836807

申请日：2013-03-15

申请人： Asia Pacific Microsystems, Inc.

发明人： Hung-Lin Yin ,  Jerwei Hsieh ,  Li-Yuan Lin

IPC分类号： H01L21/30 ,  H01L21/46 ,  H01L23/498 ,  H01L21/762 ,  H01L23/10 ,  H01L21/50 ,  H01L23/00 ,  H01L25/065 ,  H01L25/00 ,  B81C1/00

CPC分类号： H01L23/49866 ,  B81C1/00269 ,  B81C2203/019 ,  H01L21/50 ,  H01L21/76251 ,  H01L23/10 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L24/16 ,  H01L24/27 ,  H01L24/29 ,  H01L24/32 ,  H01L24/48 ,  H01L24/73 ,  H01L24/81 ,  H01L24/83 ,  H01L24/92 ,  H01L24/95 ,  H01L25/0657 ,  H01L25/50 ,  H01L2224/0347 ,  H01L2224/03614 ,  H01L2224/0401 ,  H01L2224/04042 ,  H01L2224/05073 ,  H01L2224/05166 ,  H01L2224/05171 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/1145 ,  H01L2224/11462 ,  H01L2224/1147 ,  H01L2224/11614 ,  H01L2224/1308 ,  H01L2224/13082 ,  H01L2224/13111 ,  H01L2224/13139 ,  H01L2224/16148 ,  H01L2224/16238 ,  H01L2224/16503 ,  H01L2224/16507 ,  H01L2224/2745 ,  H01L2224/27462 ,  H01L2224/2747 ,  H01L2224/27614 ,  H01L2224/29011 ,  H01L2224/2908 ,  H01L2224/29082 ,  H01L2224/29084 ,  H01L2224/29111 ,  H01L2224/29139 ,  H01L2224/32146 ,  H01L2224/32148 ,  H01L2224/32235 ,  H01L2224/32238 ,  H01L2224/32503 ,  H01L2224/32507 ,  H01L2224/48091 ,  H01L2224/48148 ,  H01L2224/48228 ,  H01L2224/48463 ,  H01L2224/73103 ,  H01L2224/73203 ,  H01L2224/73215 ,  H01L2224/81011 ,  H01L2224/81013 ,  H01L2224/81022 ,  H01L2224/81121 ,  H01L2224/81193 ,  H01L2224/81203 ,  H01L2224/81825 ,  H01L2224/81948 ,  H01L2224/83011 ,  H01L2224/83013 ,  H01L2224/83022 ,  H01L2224/83121 ,  H01L2224/83193 ,  H01L2224/83203 ,  H01L2224/83805 ,  H01L2224/83825 ,  H01L2224/83948 ,  H01L2224/9202 ,  H01L2224/92147 ,  H01L2224/95 ,  H01L2924/00014 ,  H01L2924/01322 ,  H01L2924/1461 ,  H01L2924/15787 ,  H01L2924/16235 ,  H01L2924/351 ,  H01L2924/00015 ,  H01L2224/83 ,  H01L2224/85 ,  H01L2224/81 ,  H01L2924/00012 ,  H01L2924/00 ,  H01L2224/45099 ,  H01L2224/45015 ,  H01L2924/207

摘要： A substrate bonding method comprises the following steps. Firstly, a first substrate and a second substrate are provided, wherein a surface of the first substrate is covered by a first Ag layer and a surface of the second substrate is covered by a second Ag layer and a metallic layer from bottom to top, wherein the metallic layer comprises a first Sn layer. Secondly, a bonding process is performed by aligning the first and second substrates followed by bringing the metallic layer into contact with the first Ag layer followed by applying a load while heating to a predetermined temperature in order to form Ag3Sn intermetallic compounds. Finally, cool down and remove the load to complete the bonding process.

摘要翻译： 基板接合方法包括以下步骤。 首先，提供第一基板和第二基板，其中第一基板的表面被第一Ag层覆盖，并且第二基板的表面被从第二Ag层和从底部到顶部的金属层覆盖，其中 金属层包括第一Sn层。 其次，通过使第一和第二基板对准，然后使金属层与第一Ag层接触，然后在加热至预定温度的同时施加负载以形成Ag 3 Sn金属间化合物，进行接合工艺。 最后，冷却并清除负载以完成粘合过程。