BONDING TOOL, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE

    公开(公告)号:US20240079375A1

    公开(公告)日:2024-03-07

    申请号:US18359020

    申请日:2023-07-26

    Inventor: Hiroaki HOKAZONO

    CPC classification number: H01L24/745 H01L24/85 H01L2224/78343 H01L2224/858

    Abstract: A bonding tool for bonding two conductive plates in contact with each other by pressing the bonding tool against the two conductive plates while vibrating a bonding end portion thereof in a direction parallel to the conductive plates. The bonding end portion of the bonding tool includes a bonding base having an end surface, the end surface having a protrusion area that has two sides facing and parallel to each other in a first direction that is parallel to the end surface, a plurality of protrusions provided in the protrusion area of the end surface, and a suppression portion provided on the end surface along the two sides of the protrusion area. The bonding end portion is configured to vibrate in the first direction.

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