公开(公告)号：US20180173188A1

公开(公告)日：2018-06-21

申请号：US15736650

申请日：2016-06-15

申请人： HPT SINERGY S.R.L.

发明人： Luca POLETTO ,  Massimo FEDEL ,  Gabriele PICCOLO

IPC分类号： G05B19/19 ,  B23Q1/62 ,  G01B11/03 ,  B23Q17/22

CPC分类号： G05B19/19 ,  B23Q1/626 ,  B23Q17/22 ,  B23Q17/24 ,  B23Q17/2495 ,  G01B11/03 ,  G05B19/00 ,  G05B19/404 ,  G05B2219/37113 ,  G05B2219/37275 ,  G05B2219/49192 ,  G05B2219/49193 ,  G05B2219/49195 ,  Y02P90/265

摘要： A Cartesian numerically controlled machine tool for high-precision machining includes a footing, a first part with first movement elements for the movement of a second part with respect to a first controlled axis, a second part with second movement elements for the movement of a third part with respect to a second controlled axis, and a third part with third movement elements for the movement of a machining head with respect to a third controlled axis. The Cartesian machine tool further includes a machining head, and, on board, optical elements for detecting and monitoring the position of at least one reference nodal point for each of one or more of the controlled axes with respect to a reference that is integral with a part of the machine tool.

公开(公告)号：US20180011462A1

公开(公告)日：2018-01-11

申请号：US15202301

申请日：2016-07-05

申请人： The Boeing Company

发明人： Jared L. Bolin ,  Philip L. Freeman ,  Samuel J. Easley

IPC分类号： G05B19/042 ,  G05B15/02

CPC分类号： G05B19/0428 ,  G01C15/002 ,  G01S17/66 ,  G01S17/88 ,  G05B15/02 ,  G05B19/402 ,  G05B19/404 ,  G05B2219/36415 ,  G05B2219/37275 ,  G05B2219/39033 ,  H02P6/17

摘要： Provided is a machine system having optical endpoint control and associated method for maintaining having is provided constant optical contact. Specifically, the machine system comprises a machine capable of movement in at least one direction. The machine is configured such that, during a calibration phase, a steerable retroreflective system is mounted upon the machine for movement therewith. A controller is configured to control the movement of the machine in at least one direction. The machine system may be configured to automatically adjust the feedrate of the machine, upon determining that a velocity required for the positioner to move the retroreflector to a desired position exceeds a certain segment feedrate threshold, such that an incident beam of light can maintain constant contact with the retroreflector throughout movement of the machine from the first position to the second position.

公开(公告)号：US08401691B2

公开(公告)日：2013-03-19

申请号：US12933737

申请日：2009-04-27

申请人： Kevin Scott Smith ,  Robert J. Hocken

发明人： Kevin Scott Smith ,  Robert J. Hocken

IPC分类号： G06F19/00

CPC分类号： G05B19/401 ,  G05B2219/37275 ,  G05B2219/37388

摘要： The present invention provides dynamic metrology methods and systems for: periodically determining an actual position of one or more of a machine and a tool with respect to a workpiece using one or more laser interferometers; tracking a tracked position of the one or more of the machine and the tool with respect to the workpiece using one or more accelerometers; and altering a controlled position of the one or more of the machine and the tool with respect to the workpiece when either the actual position or the tracked position of the one or more of the machine and the tool with respect to the workpiece diverges from a desired position of one or more of the machine and the tool with respect to the workpiece.

摘要翻译： 本发明提供了动态计量方法和系统，用于：使用一个或多个激光干涉仪周期性地确定机器和工具中的一个或多个相对于工件的实际位置; 使用一个或多个加速度计跟踪相对于工件的机器和工具中的一个或多个的跟踪位置; 并且当机器和工具中的一个或多个相对于工件的实际位置或跟踪位置相对于工件偏离期望的位置时，相对于工件改变机器和工具中的一个或多个的受控位置 一个或多个机器和工具相对于工件的位置。

公开(公告)号：US20110213490A1

公开(公告)日：2011-09-01

申请号：US12713181

申请日：2010-02-26

申请人： Chien-Hung LIU ,  Wen-Yuh JYWE ,  Yi-Tsung LI

发明人： Chien-Hung LIU ,  Wen-Yuh JYWE ,  Yi-Tsung LI

IPC分类号： G05B19/404 ,  G05B19/402

CPC分类号： G05B19/401 ,  B23Q1/5437 ,  B23Q17/2233 ,  B23Q17/2495 ,  G01B11/03 ,  G01B11/27 ,  G01B21/045 ,  G05B2219/37008 ,  G05B2219/37275 ,  Y10T409/305824

摘要： A method of detecting a dynamic path of a five-axis machine tool having a spindle and a turntable and has a preparing step, a correcting step and a detecting step. The preparing step includes mounting a detector on the spindle, mounting a cat-eye reflector on the turntable, emitting a laser light to the cat-eye reflector, reflecting the laser light to the detector and splitting into two light beams. One of the light beams is emitted to a four-quadrant position sensitive detector. The correcting step includes rotating the detector, detecting a signal of the laser light by the four-quadrant position sensitive detector to eliminate an offset between the detecting assembly and the spindle. The detecting step includes detecting the dynamic path of the five-axis machine tool by detecting the positions of at least two of the linear axes and at least one of the rotation axes of the five-axis machine tool.

摘要翻译： 一种检测具有主轴和转盘的五轴机床的动态路径的方法，具有准备步骤，校正步骤和检测步骤。 制备步骤包括将检测器安装在心轴上，将猫眼反射器安装在转盘上，向猫眼反射器发射激光，将激光反射到检测器并分成两束光束。 一个光束被发射到四象限位置敏感检测器。 校正步骤包括旋转检测器，通过四象限位置敏感检测器检测激光的信号，以消除检测组件和主轴之间的偏移。 检测步骤包括通过检测五轴机床的至少两个线性轴线和至少一个旋转轴线的位置来检测五轴机床的动态路径。

公开(公告)号：US20050225772A1

公开(公告)日：2005-10-13

申请号：US11154130

申请日：2005-06-15

申请人： Henry Hill

发明人： Henry Hill

IPC分类号： G01B9/02 ,  G02B9/02 ,  G02B11/02 ,  G03F7/20 ,  G05B19/19

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02059 ,  G01B9/02067 ,  G01B9/02083 ,  G01B2290/70 ,  G03F7/70725 ,  G03F7/70775 ,  G05B19/19 ,  G05B2219/37275 ,  G05B2219/37506 ,  G05B2219/41184

摘要： The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.

公开(公告)号：US06909517B2

公开(公告)日：2005-06-21

申请号：US10957823

申请日：2004-10-04

申请人： Richard M. Coleman ,  Russell C. McCrum

发明人： Richard M. Coleman ,  Russell C. McCrum

IPC分类号： B25J9/18 ,  G05B19/401 ,  G05B19/404 ,  G01B11/14 ,  G06F19/00

CPC分类号： G05B19/401 ,  G05B19/404 ,  G05B2219/32191 ,  G05B2219/32201 ,  G05B2219/37275 ,  G05B2219/37605 ,  G05B2219/42155 ,  Y02P90/22 ,  Y10T409/307672 ,  Y10T409/309576

摘要： A method is provided for assessing accuracy of positioning a NC machine having a spindle that is movable along each of at least two mutually orthogonal translational axes. The method Includes creating a master flame of reference relative to the translational axes by moving the machine along first and second translational axes. For each translational axis, coordinates of a target mounted adjacent the spindle are determined at a number of points along the respective translational axis. A linear fit of the coordinates is then calculated so as to create a set of mutually orthogonal axes defining the master frame of reference. Accuracy of positioning the machine in the master frame of reference is checked by positioning the spindle at a number of locations, measuring the coordinates of the target for each location, and determining errors in positioning of the machine by based upon the measured coordinates and machine-determined coordinates.

摘要翻译： 提供了一种用于评估定位具有可沿着至少两个相互正交的平移轴中的每一个移动的主轴的NC机床的精度的方法。 该方法包括通过沿着第一和第二平移轴移动机器来创建相对于平移轴的参考主火焰。 对于每个平移轴，沿着相应的平移轴在多个点处确定安装在主轴附近的目标的坐标。 然后计算坐标的线性拟合，以便创建一组定义主要参照系的相互正交的轴。 通过将主轴定位在多个位置，测量每个位置的目标坐标，并根据所测量的坐标和机器的位置确定机器的定位误差，来检查机床在主机架中的定位精度， 确定坐标。

公开(公告)号：US06819789B1

公开(公告)日：2004-11-16

申请号：US09708160

申请日：2000-11-08

申请人： Zeev Kantor ,  Amnon Ganot

发明人： Zeev Kantor ,  Amnon Ganot

IPC分类号： G06K900

CPC分类号： G03F9/00 ,  G05B2219/37275 ,  G05B2219/37563 ,  G05B2219/45035 ,  H05K1/0269 ,  H05K3/0008 ,  H05K3/0035 ,  H05K3/0082 ,  H05K3/4652 ,  H05K2201/09063 ,  H05K2201/09918

摘要： A method is disclosed for calibrating a camera used in a scanner for scanning images onto a printed circuit board. The calibration method determines a transformation between the camera and the scanner by writing a pattern on a photosensitized substrate using the scanner, where the pattern is visible without development, and using the camera to image the pattern, from which a transformation between the imager and scanner coordinate systems is determined.

摘要翻译： 公开了一种用于校准用于扫描仪中用于将图像扫描到印刷电路板上的相机的方法。 校准方法通过使用扫描仪将图案写在光敏底物上，确定相机和扫描仪之间的变换，其中图案在未显影的情况下是可见的，并且使用照相机对图案进行成像，从该图像成像器和扫描仪之间的变换 确定坐标系。

公开(公告)号：US06603562B1

公开(公告)日：2003-08-05

申请号：US09692960

申请日：2000-10-21

申请人： Yutaka Ono ,  Shigeru Hashida ,  Yutaka Koizumi ,  Fumio Kaiho ,  Yasuhito Kosugi ,  Ryuichi Jimbo ,  Atsufumi Kimura

发明人： Yutaka Ono ,  Shigeru Hashida ,  Yutaka Koizumi ,  Fumio Kaiho ,  Yasuhito Kosugi ,  Ryuichi Jimbo ,  Atsufumi Kimura

IPC分类号： G01B1102

CPC分类号： G03F7/70716 ,  G01B9/02019 ,  G01B9/02021 ,  G01B9/02081 ,  G01B2290/70 ,  G03F7/70775 ,  G05B19/231 ,  G05B2219/37275 ,  G05B2219/49276 ,  H02K11/00 ,  H02K41/033 ,  H02K2201/18

摘要： A two-dimensional positioning apparatus for positioning an object in a two dimensional direction, wherein are provided a platen, a slider having two X-axis motors and sensors and a Y-axis motor and sensor disposed above the platen, a converter for providing signals to detect the X-axis position of the center point of the slider, a controller for feedback control of the slider in a X-axis direction and a yaw direction, and for feedback control in the Y-direction, and a converter circuit for converting output of the controller to propulsion commands to be supplied to the motors, wherein a limiter is provided to restrict one axis limits of the propulsion commands. In this manner, accuracy is improved and flexibility is increased.

摘要翻译： 一种用于在二维方向上定位物体的二维定位装置，其中设置有压板，具有两个X轴电动机和传感器的滑块和设置在压板上方的Y轴电机和传感器，用于提供信号的转换器 检测滑块的中心点的X轴位置，用于在X轴方向和偏航方向上反馈控制滑块的控制器，以及用于在Y方向上的反馈控制的转换器电路，以及用于转换 将控制器输出到要提供给电动机的推进命令，其中提供限制器以限制推进命令的一个轴限制。 以这种方式，提高精度并提高灵活性。

公开(公告)号：US20020089671A1

公开(公告)日：2002-07-11

申请号：US09879428

申请日：2001-06-12

发明人： Henry A. Hill

IPC分类号： G01B009/02

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02059 ,  G01B9/02067 ,  G01B9/02083 ,  G01B2290/70 ,  G03F7/70725 ,  G03F7/70775 ,  G05B19/19 ,  G05B2219/37275 ,  G05B2219/37506 ,  G05B2219/41184

摘要： The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.

摘要翻译： 本发明的特征在于一种用于确定测量系统中的非线性循环误差的方法，其中基于干涉测量导出的位置信号将测量对象定位在伺服控制下。 该方法包括：以固定速度在伺服控制下平移测量对象; 识别测量对象在固定速度下的位置上的任何振荡的频率; 以及确定在与所述位置信号组合时识别的频率上的正弦分量的幅度和相位系数抑制所述振荡。 本发明还提供了一种用于基于指示测量对象的位置的干涉测量导出的位置信号在伺服控制下定位测量对象的方法。 该方法包括：基于干涉测量导出的位置信号和对测量对象的位置具有正弦依赖性的至少一个校正项来产生补偿位置信号; 以及基于所述补偿位置信号和所述测量对象的期望位置来重新定位所述测量对象。

公开(公告)号：US5939852A

公开(公告)日：1999-08-17

申请号：US919480

申请日：1997-08-28

申请人： Kotaro Akutsu ,  Eiji Osanai ,  Hirohito Ito

发明人： Kotaro Akutsu ,  Eiji Osanai ,  Hirohito Ito

IPC分类号： H01L21/027 ,  B23Q1/62 ,  B23Q5/28 ,  B23Q11/00 ,  G03F7/20 ,  G05B19/23 ,  G05B5/01 ,  G05B19/18

CPC分类号： G03F7/70716 ,  B23Q1/621 ,  B23Q11/0032 ,  B23Q5/28 ,  G03F7/709 ,  G05B19/232 ,  G05B2219/37275 ,  G05B2219/49275 ,  G05B2219/49276

摘要： A stage feeding device has a movable guide which is guided on a reference surface of a platen to be movable in the Y-direction, a Y-linear motor for moving the movable guide in the Y-direction, a movable stage which is supported by the movable guide to be movable in the X-direction, and carries an object, and an X-linear motor for moving the movable stage in the X-direction. The stator of the X-linear motor is supported by a second stationary guide to be movable in only the Y-direction independently of the movable guide, and is moved in the Y-direction by a driving mechanism. The stator of the Y-linear motor and the second stationary guide are fixed to the base, and mount members for removing vibrations are arranged between the base and the platen.

摘要翻译： 台架供给装置具有可在Y方向上可移动的台板的基准面上引导的可动引导件，Y方向上移动可动引导件的Y线性马达，由Y方向支承的可动引导件 所述可动引导件能够沿X方向移动并承载物体;以及X线性电动机，用于沿X方向移动所述可动台。 X线性电动机的定子由第二固定引导件支撑，仅在Y方向上可移动地独立于可动引导件，并且通过驱动机构沿Y方向移动。 Y线性电动机的定子和第二静止导轨固定在基座上，用于去除振动的安装构件设置在基座和压板之间。