公开(公告)号：US20230195074A1

公开(公告)日：2023-06-22

申请号：US17558507

申请日：2021-12-21

申请人： Applied Materials, Inc.

发明人： Venkata Ravishankar Kasibhotla ,  Tao Zhang ,  Xiaoqun Zou ,  Bala Shyamala Balaji

IPC分类号： G05B19/404 ,  G06N20/00

CPC分类号： G05B19/404 ,  G06N20/00 ,  G05B2219/37506

摘要： A method includes receiving first sensor data, generated during a manufacturing process by sensors associated with a substrate manufacturing chamber. The method further includes receiving simulated sensor data generated by a trained physics-based model. The method further includes determining which one or more components of the manufacturing chamber contribute to a difference between the first sensor data and the simulated sensor data. The method further includes causing performance of a corrective action in view of the difference.

公开(公告)号：US06956656B2

公开(公告)日：2005-10-18

申请号：US10819257

申请日：2004-04-05

申请人： Henry A. Hill

发明人： Henry A. Hill

IPC分类号： G01B9/02 ,  G02B9/02 ,  G02B11/02 ,  G03F7/20 ,  G05B19/19

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02059 ,  G01B9/02067 ,  G01B9/02083 ,  G01B2290/70 ,  G03F7/70725 ,  G03F7/70775 ,  G05B19/19 ,  G05B2219/37275 ,  G05B2219/37506 ,  G05B2219/41184

摘要： The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.

摘要翻译： 本发明的特征在于一种用于确定测量系统中的非线性循环误差的方法，其中基于干涉测量导出的位置信号将测量对象定位在伺服控制下。 该方法包括：以固定速度在伺服控制下平移测量对象; 识别测量对象在固定速度下的位置上的任何振荡的频率; 以及确定在与所述位置信号组合时识别的频率上的正弦分量的幅度和相位系数抑制所述振荡。 本发明还提供了一种用于基于指示测量对象的位置的干涉测量导出的位置信号在伺服控制下定位测量对象的方法。 该方法包括：基于干涉测量导出的位置信号和对测量对象的位置具有正弦依赖性的至少一个校正项来产生补偿位置信号; 以及基于所述补偿位置信号和所述测量对象的期望位置来重新定位所述测量对象。

公开(公告)号：US06615102B1

公开(公告)日：2003-09-02

申请号：US09743359

申请日：2001-01-09

申请人： Giuseppe Morfino

发明人： Giuseppe Morfino

IPC分类号： G05B19404

CPC分类号： G05B19/404 ,  G05B2219/37275 ,  G05B2219/37506

摘要： A system and a process are described for performing the Static Error Compensation on numerically controlled machine tools. The process comprises the steps of: connecting a measuring laser device (5) to a numerically controlled machine tool (1); automatically sending a point 0 of the machine (1) to the laser device (5); sending commands for taking m measure points of the machine (1) from the control (3) to the laser device (5); automatically detecting the measure points and sending consolidated data from the laser device (5) to the control (3); producing a model of static errors of the machine (1); executing the Static Error Compensation depending on said produced model.

摘要翻译： 描述了一种用于在数控机床上执行静态误差补偿的系统和过程。 该方法包括以下步骤：将测量激光装置（5）连接到数控机床（1）; 自动将机器（1）的点0发送到激光装置（5）; 发送用于将所述机器（1）的测量点从所述控制（3）到所述激光装置（5）的命令; 自动检测测量点，并将激光装置（5）的合并数据发送到控制装置（3）; 产生机器的静态误差模型（1）; 根据所产生的模型执行静态误差补偿。

公开(公告)号：US20180314228A1

公开(公告)日：2018-11-01

申请号：US15953861

申请日：2018-04-16

申请人： FANUC CORPORATION

发明人： Shougo SHINODA ,  Satoshi IKAI

IPC分类号： G05B19/402

CPC分类号： G05B19/402 ,  G05B2219/37506

摘要： A servomotor control device includes: a servomotor, detection unit, driven body, connection mechanism, and motor control unit, in which the motor control unit includes: a force estimation section that estimates a drive force acting on the driven body at a connection part between the connection mechanism and the driven body; a correction amount generation section that generates a correction amount for correcting the position command value, based on the drive force estimated and a constant for correction; and a rigidity estimation section that gradually increases the constant for correction in a state suspending generation of the position command value, and estimates a magnitude of rigidity of the connection mechanism based on the constant for correction when a variation point occurs in behavior of rotation position information of the servomotor detected, drive force estimated, or correction amount generated.

公开(公告)号：US10061294B2

公开(公告)日：2018-08-28

申请号：US15019023

申请日：2016-02-09

申请人： FANUC Corporation

发明人： Takenori Ono

IPC分类号： G05B19/40 ,  G05B19/404

CPC分类号： G05B19/404 ,  G05B2219/37506

摘要： A numerical controller sets a parameter actually used for servo control on the basis of command data generated by analyzing a machining program. Based on the set parameter and a predefined allowable position deviation amount, a feed speed which is given by a position deviation not exceeding the predefined allowable position deviation amount is calculated. Then, when a feed speed commanded by the command data is larger than the calculated feed speed, the feed speed commanded by the command data is clamped at the calculated feed speed.

公开(公告)号：US20170308053A1

公开(公告)日：2017-10-26

申请号：US15515866

申请日：2014-10-01

申请人： Mitsubishi Electric Corporation

发明人： Kazunori KUNIMOTO

IPC分类号： G05B19/404

CPC分类号： G05B19/404 ,  G05B2219/37506 ,  G05B2219/41059 ,  G05B2219/41194 ,  G05B2219/49344 ,  Y02P90/265

摘要： A numerical control device controlling a machine tool capable of machining on orthogonal three axes includes a parameter storage to store a noise-command allowable width to be used for determining whether to perform movement based on a movement command, and a path-correction processor to compare an absolute value of a movement amount according to a movement command in a command non-target axis direction that is a direction of an axis not included in a designated plane with the noise-command allowable width when a machining program block includes the movement command in the command non-target axis direction, determine the movement command in the command non-target axis direction to be a noise command when the absolute value of the movement amount according to the movement command in the command non-target axis direction is smaller, and perform path correction to set a movement amount according to the noise command to zero.

公开(公告)号：US09993904B2

公开(公告)日：2018-06-12

申请号：US14959214

申请日：2015-12-04

申请人： Okuma Corporation

发明人： Masashi Miyaji

IPC分类号： B23Q15/013 ,  B23Q15/12 ,  G05B19/404

CPC分类号： B23Q15/013 ,  B23Q15/12 ,  G05B19/404 ,  G05B2219/37506 ,  G05B2219/49168 ,  Y02P90/265

摘要： A position controller includes a position detector, a speed command operator, a first adder, a torque command operator, a second adder, a drive unit, a runout amount correcting device, and a third adder. The runout amount correcting device is configured to employ a value related to deviation between a command value and a detection value in physical quantity of a movable part as a reference signal. The runout amount correcting device is configured to calculate a position correction amount from rotation angle information of the main spindle and the reference signal. The runout amount correcting device is configured to estimate a runout amount of a cutting edge of the tool from the reference signal. The runout amount correcting device is configured to calculate the position correction amount such that influences of the respective cutting edges appearing in the reference signal are leveled.

公开(公告)号：US20160246284A1

公开(公告)日：2016-08-25

申请号：US15019023

申请日：2016-02-09

申请人： FANUC Corporation

发明人： Takenori ONO

IPC分类号： G05B19/404

CPC分类号： G05B19/404 ,  G05B2219/37506

摘要： A numerical controller sets a parameter actually used for servo control on the basis of command data generated by analyzing a machining program. Based on the set parameter and a predefined allowable position deviation amount, a feed speed which is given by a position deviation not exceeding the predefined allowable position deviation amount is calculated. Then, when a feed speed commanded by the command data is larger than the calculated feed speed, the feed speed commanded by the command data is clamped at the calculated feed speed.

摘要翻译： 数值控制器根据通过分析加工程序产生的命令数据设置实际用于伺服控制的参数。 基于设定参数和预先设定的容许位置偏差量，计算由位置偏差不超过规定容许位置偏差量的给定速度。 然后，当由指令数据指令的进给速度大于计算的进给速度时，由指令数据指令的进给速度以计算的进给速度被夹紧。

公开(公告)号：US20120253505A1

公开(公告)日：2012-10-04

申请号：US13419817

申请日：2012-03-14

申请人： Tetsuya MATSUSHITA

发明人： Tetsuya MATSUSHITA

IPC分类号： G05B19/404

CPC分类号： G05B19/401 ,  G05B2219/37506 ,  G05B2219/50353 ,  Y10T409/305824

摘要： The present invention provides a method of computing a correction value for the machine tool having two or more translational axes and one or more rotational axes for correcting error in a position and an orientation of the tool with respect to a workpiece due to the geometric error. The method includes a rotational axis correction value computing step (S3) for computing a correction value for the rotational axis by use of a geometric parameter representing the geometric error, and a translational axis correction value computing step (S4) for computing a correction value for the translational axis by use of a command value for each of the rotational axes, a command value for each of the translational axes, and the geometric parameter.

摘要翻译： 本发明提供了一种用于计算具有两个或多个平移轴和一个或多个旋转轴的机床的校正值的方法，用于根据几何误差校正刀具相对于工件的位置和取向的误差。 该方法包括用于通过使用表示几何误差的几何参数来计算旋转轴的校正值的旋转轴校正值计算步骤（S3），以及用于计算修正值的平移轴校正值计算步骤（S4） 通过使用每个旋转轴的命令值的平移轴，每个平移轴的命令值和几何参数。

公开(公告)号：US20050225772A1

公开(公告)日：2005-10-13

申请号：US11154130

申请日：2005-06-15

申请人： Henry Hill

发明人： Henry Hill

IPC分类号： G01B9/02 ,  G02B9/02 ,  G02B11/02 ,  G03F7/20 ,  G05B19/19

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02059 ,  G01B9/02067 ,  G01B9/02083 ,  G01B2290/70 ,  G03F7/70725 ,  G03F7/70775 ,  G05B19/19 ,  G05B2219/37275 ,  G05B2219/37506 ,  G05B2219/41184

摘要： The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.