公开(公告)号：US20230195074A1

公开(公告)日：2023-06-22

申请号：US17558507

申请日：2021-12-21

申请人： Applied Materials, Inc.

发明人： Venkata Ravishankar Kasibhotla ,  Tao Zhang ,  Xiaoqun Zou ,  Bala Shyamala Balaji

IPC分类号： G05B19/404 ,  G06N20/00

CPC分类号： G05B19/404 ,  G06N20/00 ,  G05B2219/37506

摘要： A method includes receiving first sensor data, generated during a manufacturing process by sensors associated with a substrate manufacturing chamber. The method further includes receiving simulated sensor data generated by a trained physics-based model. The method further includes determining which one or more components of the manufacturing chamber contribute to a difference between the first sensor data and the simulated sensor data. The method further includes causing performance of a corrective action in view of the difference.

公开(公告)号：US20230236586A1

公开(公告)日：2023-07-27

申请号：US17586702

申请日：2022-01-27

申请人： Applied Materials, Inc.

发明人： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC分类号： G05B19/418

CPC分类号： G05B19/41875 ,  G05B2219/32194 ,  G05B2219/32193

摘要： A method includes receiving trace sensor data associated with a first manufacturing process of a processing chamber. The method further includes processing the trace sensor data using one or more trained machine learning models that generate a representation of the trace sensor data, and then generate reconstructed sensor data based on the representation of the trace sensor data. The method further includes comparing the trace sensor data to the reconstructed sensor data. The method further includes determining one or more differences between the reconstructed sensor data and the trace sensor data. The method further includes determining whether to recommend a corrective action associated with the processing chamber based on the one or more differences between the trace sensor data and the reconstructed sensor data.

公开(公告)号：US20230237412A1

公开(公告)日：2023-07-27

申请号：US17586700

申请日：2022-01-27

申请人： Applied Materials, Inc.

发明人： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC分类号： G06Q10/06 ,  G06N3/08 ,  G06Q50/04

CPC分类号： G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

摘要： A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.

公开(公告)号：US20240273443A1

公开(公告)日：2024-08-15

申请号：US18634705

申请日：2024-04-12

申请人： Applied Materials, Inc.

发明人： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC分类号： G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

CPC分类号： G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

摘要： A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. Generating the summary data includes identifying a steady state and transient portion of the trace sensor data and generating a first and second portion of summary data based on the steady state and transient portions. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.

公开(公告)号：US11961030B2

公开(公告)日：2024-04-16

申请号：US17586700

申请日：2022-01-27

申请人： Applied Materials, Inc.

发明人： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC分类号： G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

CPC分类号： G06Q10/0639 ,  G06N3/084 ,  G06Q50/04

摘要： A method includes receiving trace sensor data associated with a first manufacturing process of a manufacturing chamber. The method further includes processing the trace sensor data by a processing device to generate summary data associated with the trace sensor data. The method further includes generating a quality index score based on the summary data. The method further includes providing an alert to a user based on the quality index score. The alert includes an indication that the manufacturing chamber performance does not meet a first threshold.

公开(公告)号：US20230259112A1

公开(公告)日：2023-08-17

申请号：US17586701

申请日：2022-01-27

申请人： Applied Materials, Inc.

发明人： Sejune Cheon ,  Jeong Jin Hong ,  Mikyung Shim ,  Xiaoqun Zou ,  Jinkyeong Lee ,  Sang Hong Kim

IPC分类号： G05B23/02

CPC分类号： G05B23/0254 ,  G05B23/0283

摘要： A method includes receiving first data associated with measurements taken by a sensor during a first manufacturing procedure of a manufacturing chamber. The method further includes receiving second data. The second data includes reference data associated with the first data. The method further includes providing the first and second data to a comparison model. The method further includes receiving a similarity score from the comparison model, associated with the first and second data. The method further includes performance of a corrective action in view of the similarity score.