Systems and methods for improved metrology for semiconductor device wafers

    公开(公告)号:US12131959B2

    公开(公告)日:2024-10-29

    申请号:US17469280

    申请日:2021-09-08

    CPC classification number: H01L22/12 G05B19/41875 G05B2219/45031

    Abstract: A system and method for generating a quality parameter value of a semiconductor device wafer (SDW), during fabrication thereof, the method including designating a plurality of measurement site sets (MSSs) on the SDW, each of the MSSs including a first measurement-orientation site (FMS) and a second measurement-orientation site (SMS), the FMS and the SMS being different measurement sites on the SDW, generating a first measurement-orientation quality parameter dataset (FMQPD) by measuring features formed within each the FMS of at least one of the MSSs in a first measurement orientation, generating a second measurement-orientation quality parameter dataset (SMQPD) by measuring features formed within each the SMS of the at least one of the MSSs in a second measurement orientation and generating at least one tool-induced-shift (TIS)-ameliorated quality parameter value (TAQPV), at least partially based on the FMQPD and the SMQPD.

    Industrial internet of things system, control method, and storage medium for monitoring sheet workpiece production

    公开(公告)号:US12130613B2

    公开(公告)日:2024-10-29

    申请号:US18407634

    申请日:2024-01-09

    CPC classification number: G05B19/41865 G05B19/4183 G05B19/4185 G05B19/41875

    Abstract: An Industrial Internet of Things system, a control method and storage medium for monitoring sheet workpiece production are provided. The method comprises: obtaining a first target image on a production line; generating a sharpness matrix based on the first target image, calculating a tilt direction and a tilt angle of the target sheet workpiece as tilt data, and determining deformation data of the target sheet workpiece based on the first target image; determining a second target image through a tilt correction model; performing calibration and identification on the second target image, generating horizontal adjustment data and rotational adjustment data corresponding to the second target image, and calculating tilt adjustment data according to the tilt data; determining target adjustment clamping parameters; sending the horizontal adjustment data, the rotational adjustment data, the tilt adjustment data, and the target adjustment clamping parameters to the production line, and adjusting the target sheet workpiece.

    Molding Management System
    5.
    发明公开

    公开(公告)号:US20240319721A1

    公开(公告)日:2024-09-26

    申请号:US18613657

    申请日:2024-03-22

    CPC classification number: G05B19/41875 G05B2219/32222

    Abstract: A molding management system includes: a molded article item storage unit configured to store a plurality of pieces of molded article item information that are identification information of an item of a molded article; a defect classification storage unit configured to store master data including a plurality of pieces of defect classification information that are information related to classification of a defect of the molded article; a first receiving unit configured to receive selection of the molded article item information stored in the molded article item storage unit; a second receiving unit configured to receive selection of the defect classification information provided in the master data; an item defect storage unit configured to store the molded article item information received by the first receiving unit and the defect classification information received by the second receiving unit in association with each other; and a third receiving unit configured to receive, when the defect occurs in the molded article, selection of the defect classification information stored in the item defect storage unit in association with the molded article item information of an item of the molded article in which the defect occurs.

    Methods and devices for inspecting tubes

    公开(公告)号:US12067702B1

    公开(公告)日:2024-08-20

    申请号:US17386803

    申请日:2021-07-28

    Inventor: Joel Corn

    CPC classification number: G06T7/0004 G05B19/41875 G06K7/143

    Abstract: A system for inspecting a tube can comprise a first image acquisition device that is configured to capture at least one image of the first end of the tube. A second image acquisition device can be configured to capture at least one image of at least a portion of the outer surface of the circumferential wall of the tube. A first conveyor can be configured to position the tube so that the first image acquisition device can capture the at least one image of the first end of the tube and the second image acquisition device can capture the at least one image of at least a portion of the circumferential wall of the tube. A computing device can be configured to determine, based on the at least one image from the first image acquisition device or the at least one image from the second image acquisition device, if the tube has a flaw.

    Systems and methods for enabling and disabling operation of manufacturing machines

    公开(公告)号:US12061463B2

    公开(公告)日:2024-08-13

    申请号:US18230538

    申请日:2023-08-04

    CPC classification number: G05B19/41875 Y02P90/02

    Abstract: A system for enabling and disabling operation of manufacturing machines provides a manufacturing machine user interface that facilitates receiving quality control information regarding the manufacturing machine from a user. For quality assurance purposes, the computer system of the manufacturing machine may decide whether to enable operation of the manufacturing machine based on the received quality control information. The computer system of the manufacturing machine may also decide to disable operation of the manufacturing machine if the quality control information provided is incomplete, out of date, or otherwise insufficient to indicate the manufacturing machine is ready for safe and effective operation. In some embodiments, one or more client systems, telecommunications devices, and/or personal digital assistant (PDA) devices on which the user interface is displayed and with which the manufacturing machine is in communication may enable operation of the manufacturing machine based on the received quality control information.

    Analysis system and analysis method

    公开(公告)号:US12055922B2

    公开(公告)日:2024-08-06

    申请号:US17423111

    申请日:2020-01-08

    CPC classification number: G05B19/41875 G05B2219/32368

    Abstract: An analysis system 10 includes: an operational data acquisition unit 11 that acquires operational data including an operational state of a production line 20; a product information acquisition unit 13 that acquires a state of a product manufactured in the production line and outputs the state of the product as product information; a production state analyzer 12 that obtains a predetermined physical quantity of the product on a basis of the operational data acquired by the operational data acquisition unit 11 and outputs the predetermined physical quantity as information on the physical quantity; and a correlation analyzer 14 that performs analysis of a correlation between the information on the physical quantity and the product information.

    MONITORING METHOD FOR PRODUCTION LINE BASED ON INDUSTRIAL INTERNET OF THINGS, MONITORING SYSTEM, AND STORAGE MEDIUM THEREOF

    公开(公告)号:US20240255930A1

    公开(公告)日:2024-08-01

    申请号:US18634997

    申请日:2024-04-14

    CPC classification number: G05B19/4185 G05B19/41875

    Abstract: A monitoring method for a production line based on Industrial Internet of Things is provided. The method includes: sending, by a management platform, defective product testing information in the perception information sent by an object platform to a service platform; comparing, by the service platform, a count of defective products with a first count threshold of defective products preset by each process and generating an instruction for retrieving process information when the count exceeds the first count threshold; receiving, by the management platform, the instruction and sending object platform configuration information and latest-stored operation information to the service platform; performing, by the service platform, a parameter comparison with a same parameter name and generating a parameter configuration instruction; receiving, by the object platform, the instruction and performing configuration, performing the parameter comparison again, and feeding a comparison result back.

Patent Agency Ranking