公开(公告)号：US20240219167A1

公开(公告)日：2024-07-04

申请号：US18573123

申请日：2022-06-22

Applicant: DUKE UNIVERSITY

Inventor： Joseph A. IZATT ,  Al-Hafeez Z. DHALLA ,  Jingkai ZHANG

IPC: G01B9/02001 ,  G01B9/02 ,  G01B9/02002 ,  G01B9/02055 ,  G01S17/36

CPC classification number: G01B9/02007 ,  G01B9/02005 ,  G01B9/02081 ,  G01B9/02087 ,  G01S17/36 ,  G01B2290/70

Abstract: A method of rapid coherent synthetic wavelength interferometric absolute distance measurement includes receiving, from an optical system, an image from an object scene of at least two distinct wavelengths of light, each wavelength's light source having a coherence length greater than a desired ambiguity length of the absolute distance measurement, and whose synthetic wavelength in combination provides the desired ambiguity length of the absolute distance measurement. A phase-based approach, a magnitude-based approach, or an envelope of the magnitude-based approach can be taken to determine an interference between light returning from the object scene and light traversing a separate reference arm path of the optical system and calculate an optical distance to an object in the object scene.

公开(公告)号：US11885607B2

公开(公告)日：2024-01-30

申请号：US17673976

申请日：2022-02-17

Applicant: DR. JOHANNES HEIDENHAIN GmbH

Inventor： Herbert Huber-Lenk

IPC: G01B9/02061 ,  G01B11/02 ,  G01B9/02055

CPC classification number: G01B11/026 ,  G01B9/02081 ,  G01B9/02061 ,  G01B2290/45 ,  G01B2290/70

Abstract: An interferometric distance-measurement device includes a multi-wavelength light source which provides a beam having at least three different wavelengths. An interferometer unit splits the beam into measuring and reference beams. The measuring beam propagates in the direction of a measuring reflector movable along a measuring axis and undergoes a back-reflection, and the reference beam propagates in the direction of a stationary reference reflector and undergoes a back-reflection. The back-reflected measuring and reference beams interfere with each other in an interference beam. A detection unit splits the interference beam such that several phase-shifted partial interference signals result for each wavelength. A signal processing unit determines absolute position information regarding the measuring reflector from the partial interference signals of different wavelengths and an additional coarse position signal.

公开(公告)号：US09921051B2

公开(公告)日：2018-03-20

申请号：US14323211

申请日：2014-07-03

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Jae-Wan Kim ,  Jong-Ahn Kim ,  Chu-Shik Kang ,  Jong-Han Jin

IPC: G01B11/06 ,  G01B11/14 ,  G01B9/02 ,  G01N21/21 ,  G01S17/36 ,  G01N21/45

CPC classification number: G01B11/06 ,  G01B9/0201 ,  G01B9/02081 ,  G01B11/14 ,  G01N21/211 ,  G01N21/45 ,  G01N2021/213 ,  G01S17/36

Abstract: Provided are a thickness measuring apparatus and a thickness measuring method. The thickness measuring method includes irradiating a first laser beam of a first wavelength λ1 to a transparent substrate and measuring intensity of the first laser beam transmitting through the transparent substrate; irradiating a second laser beam of a second wavelength λ2 to the transparent substrate and measuring intensity of the second laser beam transmitting through the transparent substrate; and extracting a rotation angle on a Lissajous graph using the first and second laser beams transmitting through the transparent substrate. A phase difference between adjacent rays by multiple internal reflection of the first laser beam and a phase difference between adjacent rays by multiple internal reflection of the second laser beam is maintained at π/2.

公开(公告)号：US09812846B2

公开(公告)日：2017-11-07

申请号：US15140125

申请日：2016-04-27

Applicant: The General Hospital Corporation

Inventor： Seok-Hyun Yun ,  Brett Eugene Bouma ,  Guillermo J. Tearney ,  Johannes Fitzgerald De Boer

IPC: H01S3/08 ,  H01S5/50 ,  H01S5/00 ,  H01S5/14 ,  H01S5/10 ,  A61B5/00 ,  G01J3/02 ,  G01J3/453 ,  G01N21/47 ,  G02B27/48 ,  G01B9/02 ,  G02B6/36 ,  G02B26/12 ,  G02F1/09 ,  G02F1/11 ,  H01S3/00 ,  H01S3/106 ,  G01J9/02 ,  H01S3/105

CPC classification number: H01S5/5045 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/7257 ,  G01B9/02002 ,  G01B9/02004 ,  G01B9/02043 ,  G01B9/02075 ,  G01B9/02081 ,  G01B9/02083 ,  G01B9/02084 ,  G01B9/0209 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0218 ,  G01J3/0264 ,  G01J3/453 ,  G01J9/0215 ,  G01N21/4795 ,  G02B6/3604 ,  G02B26/12 ,  G02B27/48 ,  G02F1/093 ,  G02F1/11 ,  H01S3/0071 ,  H01S3/0078 ,  H01S3/08009 ,  H01S3/08063 ,  H01S3/105 ,  H01S3/1068 ,  H01S5/0071 ,  H01S5/0078 ,  H01S5/1025 ,  H01S5/14 ,  H01S5/141 ,  H01S5/146

Abstract: Exemplary apparatus and method are provided. In particular, an electromagnetic radiation can be emitted with, e.g. a light source arrangement. For example, the light source arrangement can include a cavity and a filter, and a spectrum of the electromagnetic radiation can be controlled, e.g., with such cavity and filter, to have a mean frequency that changes (i) at an absolute rate that is greater than about 100 terahertz per millisecond, and (ii) over a range that is greater than about 10 terahertz. Additionally or alternatively, the light source arrangement can include a frequency shifting device which can shift the mean frequency of the electromagnetic radiation.

公开(公告)号：US09513105B2

公开(公告)日：2016-12-06

申请号：US13733885

申请日：2013-01-03

Applicant: Science Applications International Corporation

Inventor： Troy Rhoadarmer ,  Eric Berg

IPC: G01B9/02 ,  G01B11/02

CPC classification number: G01B9/02097 ,  G01B9/02081 ,  G01B2290/70

Abstract: Systems and methods are described herein for a self-referencing interferometer. The interferometer can comprise an improved spatial phase shifter that reduces the number of components, size and complexity of the spatial phase shifter and maintains a common path for a combined reference beam and signal beam. The self-referencing interferometer further comprises a single mode fiber shunt for filtering the reference beam and further reducing the size of the interferometer. The angle of the reference beam can be tilted before being recombined with the single beam which further simplifies the spatial phase shifting component of the interferometer.

公开(公告)号：US08854629B2

公开(公告)日：2014-10-07

申请号：US13297356

申请日：2011-11-16

Applicant: Steven James Frisken ,  Daniel Royston Neill

Inventor： Steven James Frisken ,  Daniel Royston Neill

IPC: G01B9/02 ,  G01N21/47

CPC classification number: G01B9/02069 ,  G01B9/02004 ,  G01B9/02081 ,  G01B9/02091 ,  G01B2290/45 ,  G01B2290/70 ,  G01N21/4795

Abstract: A method of analysis of a sample, including the steps of: (a) splitting an input optical beam into a probe beam and reference beam; (b) utilizing the probe beam to interrogate a sample and obtaining a return sample beam there from; (c) manipulating the reference beam into a predetermined polarization state; (d) mixing the return sample beam and reference beam producing a series of mixed beams; and (e) analyzing the polarization components of the series of mixed beams.

Abstract translation: 一种分析样品的方法，包括以下步骤：（a）将输入光束分成探针光束和参考光束; （b）利用探测光束来询问样品并从中获得返回样品束; （c）将参考光束操纵成预定的偏振状态; （d）混合返回样品光束和参考光束，产生一系列混合光束; 和（e）分析一系列混合光束的偏振分量。

公开(公告)号：US08797546B2

公开(公告)日：2014-08-05

申请号：US13423481

申请日：2012-03-19

Applicant: Walter Huber ,  Ralph Joerger

Inventor： Walter Huber ,  Ralph Joerger

IPC: G01B11/02

CPC classification number: G01B11/14 ,  G01B9/02061 ,  G01B9/02081 ,  G01B11/026 ,  G01B2290/30 ,  G01B2290/45 ,  G01B2290/70

Abstract: An interferometric distance measurement device that includes a light source that emits a beam of light and a scanning unit. The scanning unit includes a scanning plate having a splitter that splits the beam of light into a measurement beam and a reference beam, wherein the reference beam is propagated solely within the scanning plate before reaching interferential superposition with the measurement beam at a unification site. A reflector is provided, wherein the reflector is embodied such that the measurement beam striking the reflector undergoes retroreflection in a direction regardless of any possible relative tilting of the scanning unit and of the reflector downstream of the unification site. A detector arrangement is provided in which a distance signal relating to a distance between the scanning plate and the reflector is detectable from interference between the measurement beam and the reference beam.

Abstract translation: 一种干涉距离测量装置，包括发射光束的光源和扫描单元。 扫描单元包括具有分束器的扫描板，该分离器将光束分成测量光束和参考光束，其中参考光束在与测量光束在统一位置达到相互叠加之前仅在扫描板内传播。 提供反射器，其中反射器被实施为使得撞击反射器的测量光束在一个方向上经历逆向反射，而不管扫描单元和反射器在统一部位下游的任何可能的相对倾斜。 提供了一种检测器装置，其中可以从测量光束和参考光束之间的干涉检测与扫描板和反射器之间的距离相关的距离信号。

公开(公告)号：US20140204389A1

公开(公告)日：2014-07-24

申请号：US14083636

申请日：2013-11-19

Applicant: HITACHI MEDIA ELECTRONICS CO., LTD.

Inventor： Masaki MUKOH ,  Kentaro OSAWA ,  Tatsuro IDE

IPC: G01B9/02

CPC classification number: G01B9/02091 ,  A61B3/102 ,  G01B9/02007 ,  G01B9/02081 ,  G01B2290/70

Abstract: A luminous flux including laser light of different wavelengths outgoing from a light source unit is split into two luminous fluxes, the first luminous flux is focused on a sample with an objective lens, and the second luminous flux functions as reference light without radiating it onto the sample. Signal light reflected from the sample and the reference light are multiplexed by a polarized beam splitter and are made to interfere on four photodetectors out of phase in a photodetection unit. A signal processing unit acquires the optical axis distribution of an object of examination in the sample by operating using the outputs of the plural photodetectors for input every wavelength, acquiring a detection signal and calculating the ratio of detection signals of different wavelengths every position in the sample.

Abstract translation: 将包含从光源单元出射的不同波长的激光的光通量分成两个光束，第一光束聚焦在具有物镜的样品上，第二光束用作参考光，而不将其照射到 样品。 从采样和参考光反射的信号光被偏振光束分离器多路复用，并使其在光检测单元中相互干涉四个光电探测器。 信号处理单元通过使用多个光电检测器的输出进行各波长的输入来获取样本中的检查对象的光轴分布，获取检测信号并计算样本中每个位置的不同波长的检测信号的比率 。

公开(公告)号：US08687200B2

公开(公告)日：2014-04-01

申请号：US13479933

申请日：2012-05-24

Applicant: Sun-Kyu Lee ,  ChaBum Lee ,  Gyu Ha Kim

Inventor： Sun-Kyu Lee ,  ChaBum Lee ,  Gyu Ha Kim

IPC: G01B9/02 ,  G01N21/86 ,  G01V8/00 ,  G01D5/36

CPC classification number: G01B9/02081 ,  G01B9/02027 ,  G01B2290/30 ,  G01B2290/45 ,  G01B2290/70

Abstract: Measurement of motion errors of a linear stage is performed to enable accurate measurement of motion errors in linear directions and a rotational direction in the linear stage using a diffraction grating. A first beam splitter splits a laser beam emitted from a light emitting unit. A first measurement unit measures a unidirectional linear motion error of the linear stage using one laser beam component split by the first beam splitter and a second measurement unit measures an angular motion error and another unidirectional linear motion of the linear stage error using a diffracted beam component obtained by diffracting another laser beam component split by the first beam splitter through the diffraction grating. A third measurement unit circularly polarizes the beam component diffracted through the diffraction grating to measure a third unidirectional linear motion error of the linear stage.

Abstract translation: 执行线性级的运动误差的测量以使得能够使用衍射光栅精确地测量线性方向上的运动误差和线性级中的旋转方向。 第一分束器分离从发光单元发射的激光束。 第一测量单元使用由第一分束器分裂的一个激光束分量来测量线性平台的单向线性运动误差，第二测量单元使用衍射光束分量来测量角运动误差和线性级误差的另一单向线性运动 通过衍射由第一分束器分裂的另一激光束分量衍射光栅获得。 第三测量单元使通过衍射光栅衍射的束分量圆偏振，以测量线性级的第三单向线性运动误差。

公开(公告)号：US08289524B2

公开(公告)日：2012-10-16

申请号：US12458590

申请日：2009-07-16

Applicant: Maarten J. Jansen

Inventor： Maarten J. Jansen

IPC: G01B9/02

CPC classification number: G01B9/02057 ,  G01B9/02011 ,  G01B9/02081 ,  G01B2290/35 ,  G01B2290/70

Abstract: An interferometer includes a light source, adapted to generate a coherent light beam, a detector adapted to analyze the phase difference of optical light beams, a location unit for locating an object to be measured, a first optical path from the light source to the object and a second optical path from the object to the detector. The first and the second optical path have a common section adjacent to the object. An optical polarization modulator has been arranged in the first path.

Abstract translation: 干涉仪包括适于产生相干光束的光源，适于分析光束的相位差的检测器，用于定位待测物体的位置单元，从光源到物体的第一光路 以及从物体到检测器的第二光路。 第一和第二光路具有与物体相邻的公共部分。 光偏振调制器已经布置在第一路径中。