公开(公告)号：US20120242994A1

公开(公告)日：2012-09-27

申请号：US13423481

申请日：2012-03-19

Applicant: Walter Huber ,  Ralph Joerger

Inventor： Walter Huber ,  Ralph Joerger

IPC: G01B9/02

CPC classification number: G01B11/14 ,  G01B9/02061 ,  G01B9/02081 ,  G01B11/026 ,  G01B2290/30 ,  G01B2290/45 ,  G01B2290/70

Abstract: An interferometric distance measurement device that includes a light source that emits a beam of light and a scanning unit. The scanning unit includes a scanning plate having-a splitter that splits the beam of light into a measurement beam and a reference beam, wherein the reference beam is propagated solely within the scanning plate before reaching interferential superposition with the measurement beam at a unification site. A reflector is provided, wherein the reflector is embodied such that the measurement beam striking the reflector undergoes retroreflection in a direction regardless of any possible relative tilting of the scanning unit and of the reflector downstream of the unification site. A detector arrangement is provided in which a distance signal relating to a distance between the scanning plate and the reflector is detectable from interference between the measurement beam and the reference beam.

Abstract translation: 一种干涉距离测量装置，包括发射光束的光源和扫描单元。 扫描单元包括具有分离器的扫描板，该分离器将光束分成测量光束和参考光束，其中参考光束在与测量光束在统一位置达到相互叠加之前仅在扫描板内传播。 提供反射器，其中反射器被实施为使得撞击反射器的测量光束在一个方向上经历逆向反射，而不管扫描单元和反射器在统一部位下游的任何可能的相对倾斜。 提供了一种检测器装置，其中可以从测量光束和参考光束之间的干涉检测与扫描板和反射器之间的距离相关的距离信号。

公开(公告)号：US20120112050A1

公开(公告)日：2012-05-10

申请号：US13288007

申请日：2011-11-02

Applicant: Ralph Joerger ,  Michael Hermann ,  Wolfgang Holzapfel ,  Walter Huber

Inventor： Ralph Joerger ,  Michael Hermann ,  Wolfgang Holzapfel ,  Walter Huber

IPC: G01D5/347

CPC classification number: G01D5/38 ,  G01B11/2441

Abstract: An optical position-measuring device includes a scanning bar extending in a first or second direction, and a scale extending in the other direction. The scale is offset by a scanning distance from the scanning bar in a third direction perpendicular to the first and second directions. The device has a light source whose light penetrates the scanning bar at an intersection point of the scanning bar and scale to fall on the scale and arrive back at the scanning bar. At a detector, the light is split by diffraction into different partial beams at optically effective structures of the scanning bar and scale and combined again. A periodic signal is obtained in the detector in response to: a shift between the scanning bar and scale in the first direction due to interference of combined partial beams, and a change in the scanning distance between the scanning bar and scale.

Abstract translation: 光学位置测量装置包括沿第一或第二方向延伸的扫描杆和沿另一个方向延伸的刻度。 在与第一和第二方向垂直的第三方向上，刻度尺距离扫描杆的扫描距离偏移。 该装置具有光源，其光在扫描条和刻度的交点处穿过扫描条，落在刻度上并返回扫描条。 在检测器处，通过衍射将光分解成不同的部分光束，在扫描条和刻度的光学有效结构上再次组合。 在检测器中响应于由于组合的部分光束的干扰而在第一方向上的扫描条和标尺之间的偏移以及扫描条和标尺之间的扫描距离的变化而在检测器中获得周期性信号。

公开(公告)号：US08822907B2

公开(公告)日：2014-09-02

申请号：US13288007

申请日：2011-11-02

Applicant: Ralph Joerger ,  Michael Hermann ,  Wolfgang Holzapfel ,  Walter Huber

Inventor： Ralph Joerger ,  Michael Hermann ,  Wolfgang Holzapfel ,  Walter Huber

IPC: G01D5/34 ,  G01B11/24 ,  G01D5/38

CPC classification number: G01D5/38 ,  G01B11/2441

Abstract: An optical position-measuring device includes a scanning bar extending in a first or second direction, and a scale extending in the other direction. The scale is offset by a scanning distance from the scanning bar in a third direction perpendicular to the first and second directions. The device has a light source whose light penetrates the scanning bar at an intersection point of the scanning bar and scale to fall on the scale and arrive back at the scanning bar. At a detector, the light is split by diffraction into different partial beams at optically effective structures of the scanning bar and scale and combined again. A periodic signal is obtained in the detector in response to: a shift between the scanning bar and scale in the first direction due to interference of combined partial beams, and a change in the scanning distance between the scanning bar and scale.

Abstract translation: 光学位置测量装置包括沿第一或第二方向延伸的扫描杆和沿另一个方向延伸的刻度。 在与第一和第二方向垂直的第三方向上，刻度尺距离扫描杆的扫描距离偏移。 该装置具有光源，其光在扫描条和刻度的交点处穿过扫描条，落在刻度上并返回扫描条。 在检测器处，通过衍射将光分解成不同的部分光束，在扫描条和刻度的光学有效结构上再次组合。 在检测器中响应于由于组合的部分光束的干扰而在第一方向上的扫描条和标尺之间的偏移以及扫描条和标尺之间的扫描距离的变化而在检测器中获得周期性信号。

公开(公告)号：US08797546B2

公开(公告)日：2014-08-05

申请号：US13423481

申请日：2012-03-19

Applicant: Walter Huber ,  Ralph Joerger

Inventor： Walter Huber ,  Ralph Joerger

IPC: G01B11/02

CPC classification number: G01B11/14 ,  G01B9/02061 ,  G01B9/02081 ,  G01B11/026 ,  G01B2290/30 ,  G01B2290/45 ,  G01B2290/70

Abstract: An interferometric distance measurement device that includes a light source that emits a beam of light and a scanning unit. The scanning unit includes a scanning plate having a splitter that splits the beam of light into a measurement beam and a reference beam, wherein the reference beam is propagated solely within the scanning plate before reaching interferential superposition with the measurement beam at a unification site. A reflector is provided, wherein the reflector is embodied such that the measurement beam striking the reflector undergoes retroreflection in a direction regardless of any possible relative tilting of the scanning unit and of the reflector downstream of the unification site. A detector arrangement is provided in which a distance signal relating to a distance between the scanning plate and the reflector is detectable from interference between the measurement beam and the reference beam.

Abstract translation: 一种干涉距离测量装置，包括发射光束的光源和扫描单元。 扫描单元包括具有分束器的扫描板，该分离器将光束分成测量光束和参考光束，其中参考光束在与测量光束在统一位置达到相互叠加之前仅在扫描板内传播。 提供反射器，其中反射器被实施为使得撞击反射器的测量光束在一个方向上经历逆向反射，而不管扫描单元和反射器在统一部位下游的任何可能的相对倾斜。 提供了一种检测器装置，其中可以从测量光束和参考光束之间的干涉检测与扫描板和反射器之间的距离相关的距离信号。