Invention Grant
- Patent Title: Dynamic metrology methods and systems
- Patent Title (中): 动态计量方法和系统
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Application No.: US12933737Application Date: 2009-04-27
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Publication No.: US08401691B2Publication Date: 2013-03-19
- Inventor: Kevin Scott Smith , Robert J. Hocken
- Applicant: Kevin Scott Smith , Robert J. Hocken
- Applicant Address: US NC Charlotte
- Assignee: University of North Carolina at Charlotte
- Current Assignee: University of North Carolina at Charlotte
- Current Assignee Address: US NC Charlotte
- Agency: Clements Bernard PLLC
- Agent Christopher L. Bernard; Lawrence A. Baratta, Jr.
- International Application: PCT/US2009/041777 WO 20090427
- International Announcement: WO2009/134708 WO 20091105
- Main IPC: G06F19/00
- IPC: G06F19/00
![Dynamic metrology methods and systems](/abs-image/US/2013/03/19/US08401691B2/abs.jpg.150x150.jpg)
Abstract:
The present invention provides dynamic metrology methods and systems for: periodically determining an actual position of one or more of a machine and a tool with respect to a workpiece using one or more laser interferometers; tracking a tracked position of the one or more of the machine and the tool with respect to the workpiece using one or more accelerometers; and altering a controlled position of the one or more of the machine and the tool with respect to the workpiece when either the actual position or the tracked position of the one or more of the machine and the tool with respect to the workpiece diverges from a desired position of one or more of the machine and the tool with respect to the workpiece.
Public/Granted literature
- US20110022220A1 DYNAMIC METROLOGY METHODS AND SYSTEMS Public/Granted day:2011-01-27
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