Invention Grant
US08401691B2 Dynamic metrology methods and systems 有权
动态计量方法和系统

Dynamic metrology methods and systems
Abstract:
The present invention provides dynamic metrology methods and systems for: periodically determining an actual position of one or more of a machine and a tool with respect to a workpiece using one or more laser interferometers; tracking a tracked position of the one or more of the machine and the tool with respect to the workpiece using one or more accelerometers; and altering a controlled position of the one or more of the machine and the tool with respect to the workpiece when either the actual position or the tracked position of the one or more of the machine and the tool with respect to the workpiece diverges from a desired position of one or more of the machine and the tool with respect to the workpiece.
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