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公开(公告)号：US09709597B2
公开(公告)日：2017-07-18
申请号：US14305588
申请日：2014-06-16
申请人： Bruker Nano, Inc.
发明人： Weijie Wang , Chanmin Su
摘要： Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
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公开(公告)号：US20120297510A1
公开(公告)日：2012-11-22
申请号：US13458725
申请日：2012-04-27
申请人： Johannes H. Kindt , Daniel Lyons , Charles Meyer , Russ Mead
发明人： Johannes H. Kindt , Daniel Lyons , Charles Meyer , Russ Mead
IPC分类号： G01Q90/00
摘要： A cleaning station for thoroughly cleaning the AFM component surfaces that are exposed to fluid during imaging of a sample supported in a fluid medium is disclosed. The cleaning station is designed to selectively expose the AFM component surfaces to cleansing agents, such as soap/detergent and water, plasma cleaning, etc., and cleaning tools, such as brushes, while protecting fluid sensitive components from exposure to the cleansing agents. The preferred embodiments are particularly beneficial for scanners in which the fluid sensitive components (actuator, sensor, connector, etc.) are integrated in the same device to which the cantilever holder is attached.
摘要翻译： 公开了一种清洁站，用于在支撑在流体介质中的样品成像期间彻底清洁暴露于流体的AFM组件表面。 清洁站被设计成将AFM组件表面选择性地暴露于清洁剂，例如肥皂/洗涤剂和水，等离子体清洁等，以及清洁工具，例如刷子，同时保护流体敏感组分免于暴露于清洁剂。 优选实施例对于其中流体敏感部件（致动器，传感器，连接器等）集成在悬臂支架附接到的相同装置中的扫描器是特别有益的。
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3.发明授权Method for providing a probe for a probe-microscopic analysis of a test sample in a probe microscope and arrangement with a probe microscope 有权用于在探针显微镜中提供用于探针显微镜分析测试样品并用探针显微镜布置的探针的方法公开(公告)号：US07971266B2
公开(公告)日：2011-06-28
申请号：US12320114
申请日：2009-01-16
申请人： Torsten Jähnke , Torsten Müller , Detlef Knebel , Kathryn Poole
发明人： Torsten Jähnke , Torsten Müller , Detlef Knebel , Kathryn Poole
CPC分类号： G01Q70/00
摘要： The present invention relates to a method for providing a measuring probe (1, 1a, 2) for a probe microscopic examination of a sample in a probe microscope, in particular a scanning probe microscope, in which the measuring probe (1), which has a probe base (1a) and a probe extension (2) formed thereon, is held on a carrier device and the measuring probe (1) is processed before or after a measurement by detaching a section of the probe extension (2). The invention further relates to an arrangement having a probe microscope for the probe microscopic examination of a sample, in particular a scanning probe microscope.
摘要翻译： 本发明涉及一种在探针显微镜，特别是扫描探针显微镜中提供用于样品的探针显微镜检查的测量探针（1,1a，2）的方法，其中测量探针（1）具有 探针基座（1a）和形成在其上的探针延伸部（2）保持在载体装置上，并且在测量之前或之后通过分离探针延伸部分（2）的一部分来处理测量探针（1）。 本发明还涉及具有用于样品的探针显微镜检查的探针显微镜的装置，特别是扫描探针显微镜。
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4.发明申请Method for providing a probe for a probe-microscopic analysis of a test sample in a probe microscope and arrangement with a probe microscope 有权用于在探针显微镜中提供用于探针显微镜分析测试样品并用探针显微镜布置的探针的方法公开(公告)号：US20090300807A1
公开(公告)日：2009-12-03
申请号：US12320114
申请日：2009-01-16
申请人： Torsten Jähnke , Torsten Müller , Detlef Knebel , Kathryn Poole
发明人： Torsten Jähnke , Torsten Müller , Detlef Knebel , Kathryn Poole
IPC分类号： G12B21/08
CPC分类号： G01Q70/00
摘要： The present invention relates to a method for providing a measuring probe (1, 1a, 2) for a probe microscopic examination of a sample in a probe microscope, in particular a scanning probe microscope, in which the measuring probe (1), which has a probe base (1a) and a probe extension (2) formed thereon, is held on a carrier device and the measuring probe (1) is processed before or after a measurement by detaching a section of the probe extension (2). The invention further relates to an arrangement having a probe microscope for the probe microscopic examination of a sample, in particular a scanning probe microscope.
摘要翻译： 本发明涉及一种在探针显微镜，特别是扫描探针显微镜中提供用于样品的探针显微镜检查的测量探针（1,1a，2）的方法，其中测量探针（1）具有 探针基座（1a）和形成在其上的探针延伸部（2）保持在载体装置上，并且在测量之前或之后通过分离探针延伸部分（2）的一部分来处理测量探针（1）。 本发明还涉及具有用于样品的探针显微镜检查的探针显微镜的装置，特别是扫描探针显微镜。
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5.发明申请THERMOMECHANICALLY-ACTIVATED TIP SHAPE AND REGISTRY RESTORATION FOR PROBE ARRAY DEVICES UTILIZING THERMOMECHANICALLY-ACTIVATED POLYMERS 审中-公开使用热机械活化聚合物的探针阵列装置的热物理激活形状和注册恢复公开(公告)号：US20090256275A1
公开(公告)日：2009-10-15
申请号：US12100364
申请日：2008-04-09
IPC分类号： B28B3/00
CPC分类号： G01Q70/00 , G01Q80/00 , G11B9/1409
摘要： A method of repairing worn or blunt probe tips, attaching a desired tip material, or defining the registry of probe tips relative to planar surface, including: pressing a probe tip or an array of probe tips into a substrate pre-patterned with an array of tip-shaped molds, the molds containing a preceramic material that can bond to the worn probe tips by thermal activation, the substrate having a protective layer that prevents the preceramic material and/or thermally-activated ceramic material from bonding to the substrate; pressing the worn probe tips into the molds while heating the worn probe tips causing the preceramic material to bond to the worn probe tips and form a solid ceramic material; forming an array comprising a plurality of reconstructed probe tips that are sharper or consisting of a different material than the original worn or base probe tips; and reading and/or writing, with the array comprising the plurality of reconstructed probe tips, data that was unreadable and/or unwritable with the original probe tips due to tip shape or lack of registry with a planar pattern.
摘要翻译： 修复磨损或钝的探针尖端，附接期望的尖端材料或相对于平坦表面限定探针尖端的注册表的方法，包括：将探针尖端或探针尖端阵列压入预先图案化的衬底中， 所述模具包含预陶瓷材料，所述预陶瓷材料可以通过热活化与所述磨损的探针末端结合，所述基底具有防止所述预陶瓷材料和/或热活化的陶瓷材料结合到所述基底的保护层; 将磨损的探针尖端压入模具中，同时加热磨损的探针尖端，导致预陶瓷材料结合到磨损的探针尖端并形成固体陶瓷材料; 形成包括多个重建的探针尖端的阵列，所述多个重建的探针尖端比原始磨损或基底探针尖端更尖锐或由不同的材料组成; 以及包括多个重建的探针尖端的阵列的读取和/或写入，由于尖端形状或不具有平面图案的注册而与原始探针尖端不可读和/或不可写的数据。
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6.发明公开公开(公告)号：US20230213551A1
公开(公告)日：2023-07-06
申请号：US17928172
申请日：2021-05-28
IPC分类号： G01Q70/00
CPC分类号： G01Q70/00
摘要： A probe cassette for storing, transporting and handling one or more probe devices for a probe based system, the cassette including a body having at least one probe receptacle arranged to accommodate a probe device, wherein, at the probe receptacle, a vacuum clamping member is arranged for selectively holding the probe device under a retaining force, wherein the receptacle includes at least one aperture which is, during selective holding of the probe device, connectable to a vacuum pressure through a passageway arranged in the cassette body, wherein the cassette includes a first fluid port connectable to a first source of vacuum for delivering the vacuum pressure.
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7.发明申请MINIATURIZED CANTILEVER PROBE FOR SCANNING PROBE MICROSCOPY AND FABRICATION THEREOF 有权微型扫描仪扫描探针显微镜及其制作方法公开(公告)号：US20140366230A1
公开(公告)日：2014-12-11
申请号：US14305588
申请日：2014-06-16
申请人： Bruker-Nano, Inc.
发明人： Weijie Wang , Chanmin Su
摘要： Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
摘要翻译： 悬臂探针由包括上基板，下基板，内层，第一分离层和第二分离层的多层结构形成，其中第一分离层位于上基板和内层之间，第二分离层 分离层位于下基板和内层之间，并且其中第一和第二分离层相对于第一和第二基板（内层）可差分蚀刻。 上基板是形成探针尖端的第一器件层。 内层是形成悬臂的第二装置层。 下基板是手柄层，从该手柄层形成手柄或基部。 任何层的图案化和蚀刻处理通过分离层与其他层隔离。
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8.发明授权Method of preserving a sensor in a container and a container containing a sensor and a storage solution 有权将容器中的传感器保持在容纳传感器和储存溶液的容器中的方法公开(公告)号：US08136658B2
公开(公告)日：2012-03-20
申请号：US12745447
申请日：2008-02-18
CPC分类号： G01Q70/00
摘要： The invention relates to a method of preserving a sensor in a container, said sensor comprising a sensing area of metallic or a semi-conducting material covered with molecules having a MW>100 Dalton, said molecules being bound to the material wherein at least the sensing area of the layer is kept submerged in a storage solution, said storage solution having a composition that consists for at least 80% by volume of at least one compound chosen from water, ethanol, triethylene glycol and isopropanol, with the provisios that if the concentration of ethanol is at least 80 vol. % of the storage solution ethanol is present in a concentration of no more than 93% by volume of the storage solution; if water is present, it is present in a concentration of less than 80% by volume of the storage solution. The invention also relates to a container containing a sensor and a storage solution.
摘要翻译： 本发明涉及一种在容器中保存传感器的方法，所述传感器包括用MW> 100道尔顿分子覆盖的金属或半导体材料的感测区域，所述分子结合至材料，其中至少感测 该层的面积保持浸没在储存溶液中，所述储存溶液具有至少80体积％的选自水，乙醇，三甘醇和异丙醇的至少一种化合物的组成，条件是如果浓度 的乙醇为至少80体积％。 存储溶液乙醇的百分比以不超过储存溶液体积的93％的浓度存在; 如果存在水，则其存储浓度小于存储溶液的80体积％。 本发明还涉及一种容纳传感器和储存溶液的容器。
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9.发明授权Method of using scanning probe microscope allowing cleaning of probe tip in ambient atmosphere 失效使用扫描探针显微镜的方法，允许在环境大气中清洁探针尖
公开(公告)号：US5652428A
公开(公告)日：1997-07-29
申请号：US589515
申请日：1996-01-22
申请人： Tadashi Nishioka , Takao Yasue
发明人： Tadashi Nishioka , Takao Yasue
IPC分类号： G01B7/34 , G01N1/00 , G01N27/00 , G01N37/00 , G01Q10/06 , G01Q30/08 , G01Q30/20 , G01Q40/00 , G01Q40/02 , G01Q60/10 , G01Q60/16 , G01Q60/24 , G01Q80/00 , G01Q90/00 , G02B21/00 , H01J37/28
CPC分类号： G01Q70/00 , B82Y35/00 , Y10S977/85 , Y10S977/852 , Y10S977/86 , Y10S977/871 , Y10S977/881
摘要： A method of use of a scanning probe microscope includes the step of mounting a probe to a scanning probe microscope in ambient atmosphere, the step of drawing on a surface of a standard sample by two-dimensionally scanning while keeping constant a tunnel current under feedback control of a distance between a standard sample and the probe, the step of applying pulse voltage between the probe and the standard sample while two-dimensionally scanning, with feedback control stopped at each scanning point, the step for obtaining drawn image of the surface of the standard sample again, comparing the obtained drawn image with the drawn image obtained in the step of drawing on the surface of the standard sample thereby determining cleanness of the probe, the step of repeating the step of pulse application and the step of determination of cleanness until the probe is cleaned, the step for replacing the standard sample by a sample for measurement after cleanness of the probe is confirmed, and the step of drawing.
摘要翻译： 使用扫描探针显微镜的方法包括在环境大气中将探针安装到扫描探针显微镜的步骤，在反馈控制下保持恒定的隧道电流的同时通过二维扫描在标准样品的表面上拉伸的步骤 标准样品和探针之间的距离;在二维扫描期间在探针和标准样品之间施加脉冲电压的步骤，在每个扫描点停止反馈控制的步骤，获得 将所获得的绘制图像与在标准样品的表面上绘制的步骤中获得的绘制图像进行比较，从而确定探针的清洁度，重复脉冲施加步骤的步骤和确定清洁度的步骤直到 探针被清洁，确认了在探头清洁后通过样品进行测量的步骤来替代标准样品 绘图步骤
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公开(公告)号：US20180095108A1
公开(公告)日：2018-04-05
申请号：US15828529
申请日：2017-12-01
申请人： Carl Zeiss SMT GmbH
发明人： Christof Baur , Sylvio Ruhm , Gabriel Baralia , Christoph Pohl , Björn Harnath , Matthias Weber
IPC分类号： G01Q70/00
摘要： The invention relates to a probe system for a scanning probe microscope which (a) has a receptacle apparatus for a probe, (b) has a probe storage, which provides at least one probe for the scanning probe microscope, (c) wherein the probe, the probe storage, and the receptacle apparatus are embodied in such a way that the probe can form a releasable first connection with the probe storage and a releasable second connection with the receptacle apparatus, wherein the first connection and/or the second connection use a magnetic force; and wherein the receptacle apparatus and the probe storage are movable relative to one another in such a way for receiving the probe that the probe forms the second connection before the first connection is released.
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