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    Three dimensional scanning system
    3.
    发明授权
    Three dimensional scanning system 失效
    三维扫描系统

    公开(公告)号：US5276546A

    公开(公告)日：1994-01-04

    申请号：US945526

    申请日：1992-09-16

    申请人： Steven G. Palm ,  Elwin M. Beaty

    发明人： Steven G. Palm ,  Elwin M. Beaty

    IPC分类号： G01B11/02 ,  G01N21/88 ,  G01N21/93 ,  G01N21/956 ,  G02B26/10 ,  H04N1/19 ,  G02B26/08

    CPC分类号： G02B26/101 ,  G01B11/02 ,  G01N21/88 ,  G01N2021/8887 ,  G01N2021/95638 ,  G01N21/93 ,  G01N2201/102 ,  G01N2201/1053 ,  Y10S359/90

    摘要： A part scanning and part calibration method for the inspection of printed circuit boards and integrated circuits includes a camera and two rotating mirrors to scan an image of a pattern mask retical upon which a precise pattern has been deposited. Small parts are placed upon the retical to be inspected. The third overhead mirror is provided to view the part under inspection from another perspective. The scene of the part is triangulated and the dimensions of the system can thus be calibrated. A precise retical mask is provided with dot patterns which provide an additional set of information needed for calibration. By scanning more than one dot pattern the missing state values can be resolved using an iterative trigonomic solution.

    摘要翻译： 用于检查印刷电路板和集成电路的部件扫描和部件校准方法包括相机和两个旋转镜，用于扫描已经沉积精确图案的图案掩模图案的图像。 小部件放置在被检查的retical上。 提供第三顶置反射镜以从另一个角度来观察被检查的部件。 该部件的场景是三角形的，因此可以校准系统的尺寸。 提供了精确的掩模掩模，其具有提供校准所需的另外一组信息的点图案。 通过扫描多个点阵图，可以使用迭代的三叉型解决方案来解决缺失的状态值。

    Line scanning mechanical streak systems and methods for phosphorescence lifetime imaging
    4.
    发明授权
    Line scanning mechanical streak systems and methods for phosphorescence lifetime imaging 有权

    公开(公告)号：US11815456B2

    公开(公告)日：2023-11-14

    申请号：US17445945

    申请日：2021-08-25

    申请人： Purdue Research Foundation

    发明人： Meng Cui

    IPC分类号： G01N21/64 ,  G06T11/20 ,  G06T11/00 ,  H04N23/56

    CPC分类号： G01N21/6408 ,  G06T11/001 ,  G06T11/206 ,  H04N23/56 ,  G01N2201/06113 ,  G01N2201/1053

    摘要： Systems and methods for analyzing samples, such as tissue samples, and measuring the emissions when these samples are exposed to light are disclosed. Embodiments include illuminating multiple target locations on a sample with laser light, which may first be manipulated by a scanner, and receiving decaying emissions from the target location. At least some embodiments include the emissions traveling backwards along a substantial portion of the laser light pathway and being received by a detector. Additional embodiments include converting the received emissions into streak lines of position versus time, converting the streak lines to plots of signal strength versus time, and curve fitting the plots to determine representative decay times. In some embodiments, the decay times are presented as plots of position on the surface of the sample versus emission strength, which may be color coded. Some embodiment dwell on each target location for multiple scans of the laser.

    OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE
    5.
    发明申请
    OPTICAL METROLOGY SYSTEM FOR SPECTRAL IMAGING OF A SAMPLE 有权
    用于光谱成像的光学计量系统

    公开(公告)号：US20160290927A1

    公开(公告)日：2016-10-06

    申请号：US15178484

    申请日：2016-06-09

    申请人： Nanometrics Incorporated

    发明人： Andrzej Buczkowski ,  Mikhail Sluch

    IPC分类号： G01N21/64 ,  G01J3/28

    CPC分类号： G01N21/6489 ,  G01B11/0625 ,  G01J3/2823 ,  G01N21/47 ,  G01N21/55 ,  G01N21/6456 ,  G01N21/88 ,  G01N21/9501 ,  G01N2021/4735 ,  G01N2021/646 ,  G01N2021/8822 ,  G01N2021/8825 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/1053 ,  H04N3/155

    摘要： An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector collects the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector collects the broadband illumination reflected along the second illumination line. A signal collecting optic may collect the photoluminescence light and broadband light and focus it into a line, which is received by an optical conduit. The output end of the optical conduit has a shape that matches the entrance of the detector.

    摘要翻译： 光学测量装置能够检测光致发光的任何组合，宽带光的镜面反射以及穿过样品宽度的线的散射光。 测量装置包括在样品上产生第一照明线的第一光源。 可以使用扫描系统扫描样品上的照明点以形成照明线。 检测器收集沿着照明线发射的光致发光。 此外，宽带照明源可以用于在样本上产生第二照明线，其中检测器收集沿着第二照明线反射的宽带照明。 信号收集光学器件可以收集光致发光光和宽带光并将其聚焦成由光导管接收的线。 光导管的输出端具有与检测器的入口相匹配的形状。

    Optical illumination apparatus and method having a reflective arrangement with moveable components for adjusting incident light
    6.
    发明授权
    Optical illumination apparatus and method having a reflective arrangement with moveable components for adjusting incident light 有权
    具有反射布置的光学照明装置和方法，其具有用于调节入射光的可移动部件

    公开(公告)号：US08742384B2

    公开(公告)日：2014-06-03

    申请号：US12992608

    申请日：2009-05-18

    申请人： Erik Martinus Hubertus Petrus Van Dijk ,  Cornelius Antonius Hezemans

    发明人： Erik Martinus Hubertus Petrus Van Dijk ,  Cornelius Antonius Hezemans

    IPC分类号： G01N21/86

    CPC分类号： G01N21/6452 ,  G01N2021/6463 ,  G01N2201/1053 ,  G02B21/0032

    摘要： An optical system for detecting light from a 2D area of a sample (36) comprises a collection lens (34) for collecting light from a collection region of the sample. A light detector (44) is positionally fixed with respect to the sample, and a reflector arrangement (61) directs collected light to the detector. The reflector arrangement comprises movable components and the collection lens (34) is movable relative to the sample. The collection lens and the movable components are configurable to define different collection regions, and the movement of the components effects a direction of the light from the collection region to a substantially unchanged area of the light detector (44). This arrangement avoids the need for a bulky detector in order to detect signals from a 2D sample area formed by scanning across the sample.

    摘要翻译： 用于检测来自样品（36）的2D区域的光的光学系统包括用于收集来自样品的收集区域的光的收集透镜（34）。 光检测器（44）相对于样品位置固定，反射器装置（61）将收集的光引导到检测器。 反射器装置包括可移动部件，并且收集透镜（34）可相对于样品移动。 收集透镜和可移动部件可配置为限定不同的收集区域，并且部件的移动影响来自光收集区域的光的方向到光检测器（44）的基本上不变的区域。 这种布置避免了对庞大检测器的需要，以便检测来自通过扫描样品形成的2D样品区域的信号。

    Mapping-measurement apparatus
    8.
    发明授权
    Mapping-measurement apparatus 有权
    测绘仪

    公开(公告)号：US07224460B2

    公开(公告)日：2007-05-29

    申请号：US10970518

    申请日：2004-10-21

    申请人： Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

    发明人： Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

    IPC分类号： G01N21/00 ,  G01N21/55

    CPC分类号： G01N21/3563 ,  G01N21/55 ,  G01N21/59 ,  G01N2201/1053 ,  G01N2201/117

    摘要： A mapping-measurement apparatus includes a light illumination unit, a photodetector for detecting, through an aperture, reflection light or transmission light from a sample, and adjustable scanning mirrors on the illumination and detection sides of the sample, each mirror having two independent rotational axes about which they can be independently rotated by a controller. The aperture restricts light incident on the photodetector from a predetermined portion of the sample surface.

    摘要翻译： 映射测量装置包括光照射单元，用于通过孔径检测来自样品的反射光或透射光的光电检测器，以及在样品的照射和检测侧上的可调扫描反射镜，每个反射镜具有两个独立的旋转轴 它们可以由控制器独立旋转。 孔径从样品表面的预定部分限制入射在光电检测器上的光。

    Foreign particle detecting method and apparatus
    9.
    再颁专利
    Foreign particle detecting method and apparatus 失效

    公开(公告)号：USRE33991E

    公开(公告)日：1992-07-14

    申请号：US360971

    申请日：1989-06-02

    申请人： Masataka Shiba ,  Sachio Uto ,  Mitsuyoshi Koizumi

    发明人： Masataka Shiba ,  Sachio Uto ,  Mitsuyoshi Koizumi

    IPC分类号： G01N15/02 ,  G01N21/94

    CPC分类号： G01N21/94 ,  G01N2015/0238 ,  G01N2021/4792 ,  G01N2201/1053

    摘要： The foreign particle detecting method and apparatus are disclosed wherein a polarized laser beam emitted by a laser beam irradiating system from a direction inclined with respect to the direction perpendicular to the surface of a substrate is used by a scanning means to linearly scan the substrate surface from a direction approximately 90.degree. with respect to the laser light irradiating direction; and the laser light reflected from a foreign particle on the substrate surface is detected by a polarized light analyzer and a photoelectric conversion device from a direction set approximately equal to said scanning direction and inclined with respect to the direction perpendicular to the substrate surface.

    Optoelectronic sensor and method for the transmission monitoring of a front screen
    10.
    发明授权
    Optoelectronic sensor and method for the transmission monitoring of a front screen 有权

    公开(公告)号：US09810626B2

    公开(公告)日：2017-11-07

    申请号：US15092991

    申请日：2016-04-07

    申请人： SICK AG

    发明人： Joachim Kramer ,  Michael Engler ,  Markus Hammes ,  Christof J. Meyer

    IPC分类号： G01N21/59 ,  G01S17/42 ,  G01S7/481 ,  G01S7/497 ,  G01D5/30 ,  G01M11/00

    CPC分类号： G01N21/59 ,  G01D5/30 ,  G01M11/00 ,  G01N2201/06113 ,  G01N2201/1053 ,  G01S7/4817 ,  G01S7/497 ,  G01S17/42 ,  G01S2007/4975

    摘要： An optoelectronic sensor (10) for detecting objects in a monitored zone (20) is provided which has the following: a front screen (38); a light transmitter (12) for transmitting a light beam (16); a movable deflection unit (18) for the periodic sampling of the monitored zone (20) by the light beam (16); a light receiver (26) for generating a received signal from the light beam (22) remitted by the objects; at least one test light transmitter (42); at least one test light transmitter (42), at least one test light receiver (44) and at least one test light reflector (48) which span a test light path (46a-b) through the front screen (38); and an evaluation unit (32) which is configured to acquire pieces of information on the objects in the monitored zone (20) from the received signal and to recognize an impaired light permeability of the front screen (38) from a test light signal which the test light receiver (44) generates from test light which is transmitted from the test light transmitter (42) and which is reflected at the test light reflector (48). In this respect, the test light reflector (48) is arranged such that it moves along with the deflection unit (18).