公开(公告)号：US20160290927A1

公开(公告)日：2016-10-06

申请号：US15178484

申请日：2016-06-09

Applicant: Nanometrics Incorporated

Inventor： Andrzej Buczkowski ,  Mikhail Sluch

IPC: G01N21/64 ,  G01J3/28

CPC classification number: G01N21/6489 ,  G01B11/0625 ,  G01J3/2823 ,  G01N21/47 ,  G01N21/55 ,  G01N21/6456 ,  G01N21/88 ,  G01N21/9501 ,  G01N2021/4735 ,  G01N2021/646 ,  G01N2021/8822 ,  G01N2021/8825 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/1053 ,  H04N3/155

Abstract: An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector collects the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector collects the broadband illumination reflected along the second illumination line. A signal collecting optic may collect the photoluminescence light and broadband light and focus it into a line, which is received by an optical conduit. The output end of the optical conduit has a shape that matches the entrance of the detector.

Abstract translation: 光学测量装置能够检测光致发光的任何组合，宽带光的镜面反射以及穿过样品宽度的线的散射光。 测量装置包括在样品上产生第一照明线的第一光源。 可以使用扫描系统扫描样品上的照明点以形成照明线。 检测器收集沿着照明线发射的光致发光。 此外，宽带照明源可以用于在样本上产生第二照明线，其中检测器收集沿着第二照明线反射的宽带照明。 信号收集光学器件可以收集光致发光光和宽带光并将其聚焦成由光导管接收的线。 光导管的输出端具有与检测器的入口相匹配的形状。

公开(公告)号：US09846122B2

公开(公告)日：2017-12-19

申请号：US15178484

申请日：2016-06-09

Applicant: Nanometrics Incorporated

Inventor： Andrzej Buczkowski ,  Mikhail Sluch

IPC: G01N21/00 ,  G01N21/64 ,  G01J3/28 ,  G01N21/47 ,  G01N21/55 ,  G01N21/88 ,  G01N21/95 ,  G01B11/06 ,  H04N3/14

CPC classification number: G01N21/6489 ,  G01B11/0625 ,  G01J3/2823 ,  G01N21/47 ,  G01N21/55 ,  G01N21/6456 ,  G01N21/88 ,  G01N21/9501 ,  G01N2021/4735 ,  G01N2021/646 ,  G01N2021/8822 ,  G01N2021/8825 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/1053 ,  H04N3/155

Abstract: An optical metrology device is capable of detection of any combination of photoluminescence light, specular reflection of broadband light, and scattered light from a line across the width of a sample. The metrology device includes a first light source that produces a first illumination line on the sample. A scanning system may be used to scan an illumination spot across the sample to form the illumination line. A detector collects the photoluminescence light emitted along the illumination line. Additionally, a broadband illumination source may be used to produce a second illumination line on the sample, where the detector collects the broadband illumination reflected along the second illumination line. A signal collecting optic may collect the photoluminescence light and broadband light and focus it into a line, which is received by an optical conduit. The output end of the optical conduit has a shape that matches the entrance of the detector.