公开(公告)号：US07224460B2

公开(公告)日：2007-05-29

申请号：US10970518

申请日：2004-10-21

Applicant: Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

Inventor： Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

IPC: G01N21/00 ,  G01N21/55

CPC classification number: G01N21/3563 ,  G01N21/55 ,  G01N21/59 ,  G01N2201/1053 ,  G01N2201/117

Abstract: A mapping-measurement apparatus includes a light illumination unit, a photodetector for detecting, through an aperture, reflection light or transmission light from a sample, and adjustable scanning mirrors on the illumination and detection sides of the sample, each mirror having two independent rotational axes about which they can be independently rotated by a controller. The aperture restricts light incident on the photodetector from a predetermined portion of the sample surface.

Abstract translation: 映射测量装置包括光照射单元，用于通过孔径检测来自样品的反射光或透射光的光电检测器，以及在样品的照射和检测侧上的可调扫描反射镜，每个反射镜具有两个独立的旋转轴 它们可以由控制器独立旋转。 孔径从样品表面的预定部分限制入射在光电检测器上的光。

公开(公告)号：US20050088656A1

公开(公告)日：2005-04-28

申请号：US10970518

申请日：2004-10-21

Applicant: Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

Inventor： Noriaki Soga ,  Jun Koshoubu ,  Hiroshi Tsukada

IPC: G01N21/27 ,  G01N21/59 ,  G01N21/55

CPC classification number: G01N21/3563 ,  G01N21/55 ,  G01N21/59 ,  G01N2201/1053 ,  G01N2201/117

Abstract: A mapping-measurement apparatus for applying mapping measurement to a predetermined area on a surface of a sample, comprising: a light illumination unit for illuminating the sample with light; a photodetector for detecting, through an aperture, reflection light or transmission light coming from the sample; and a detection-side scanning mirror provided in the optical path from the sample to the aperture. The aperture restricts light to be detected by the photodetector only to light coming from a given measurement portion only on the surface of the sample. The detection-side scanning mirror is structured such that the direction of a reflection plane thereof can be changed. The direction of the reflection plane of the detection-side scanning mirror is changed with respect to the incident direction of the reflection light or the transmission light coming from the sample to change the measurement portion on the surface of the sample where measurement is performed by the photodetector.

Abstract translation: 一种用于将样本测量应用于样品表面上的预定区域的测绘装置，包括：用光照射样品的光照射单元; 光检测器，用于通过孔径检测来自样品的反射光或透射光; 以及设置在从样品到孔的光路中的检测侧扫描反射镜。 孔径仅将光检测器的光限制在仅在样品表面上的来自给定测量部分的光。 检测侧扫描镜的结构使得其反射面的方向可以改变。 检测侧扫描反射镜的反射面的方向相对于来自样品的反射光或透射光的入射方向发生变化，从而将被测定的样品的表面上的测定部变更为 光电探测器

公开(公告)号：US20040223053A1

公开(公告)日：2004-11-11

申请号：US10435625

申请日：2003-05-07

Applicant: Mitutoyo Corporation

Inventor： Paul G. Gladnick ,  Richard M. Wasserman ,  Barry E. Saylor ,  Mark L. Delaney

IPC: H04N007/18

CPC classification number: G01N21/8806 ,  G01N2021/8835 ,  G01N2021/8838 ,  G01N2021/8887 ,  G01N2201/0694 ,  G01N2201/103 ,  G01N2201/117 ,  G06T1/0007 ,  G06T7/0004 ,  G06T2207/30164 ,  G06T2207/30241

Abstract: A precision machine vision inspection system and method for increased inspection throughput. The vision inspection system includes a movable stage for scanning and measuring selected workpiece features. In prior systems, conventional interspersing of image processing and inspection operations with image acquisition operations required stopping and starting the stage motion during image acquisition, necessitating associated delays or wait-states in various operations. Such delays are avoided in this invention by acquiring images continuously, with a timing that is independent of image inspection operations, so that delays and wait-states are avoided. In addition, continuous stage motion is combined with a strobe lighting feature during the image acquisition operations to acquire blur-free images at a high rate. Improved image acquisition and image analysis routines including these features are created and stored by the system.

Abstract translation: 精密机器视觉检测系统和方法，提高检测吞吐量。 视觉检查系统包括用于扫描和测量所选择的工件特征的可移动台。 在现有系统中，图像处理和检查操作与图像采集操作的传统散布需要在图像采集期间停止和启动阶段运动，从而在各种操作中需要相关的延迟或等待状态。 通过以独立于图像检查操作的定时连续获取图像，从而避免了延迟和等待状态，从而避免了这种延迟。 此外，在图像采集操作期间，连续舞台运动与闪光灯照明特征相结合，以高速率获得无模糊图像。 包括这些功能在内的改进的图像采集和图像分析程序由系统创建和存储。

公开(公告)号：US5037207A

公开(公告)日：1991-08-06

申请号：US174977

申请日：1988-03-28

Applicant: L. David Tomei ,  Jogikal Jagadeesh ,  Fred Cornhill ,  Inching Chen

Inventor： L. David Tomei ,  Jogikal Jagadeesh ,  Fred Cornhill ,  Inching Chen

IPC: G01N15/14 ,  G01N21/59 ,  G01N21/64 ,  G02B6/08

CPC classification number: G01N21/5911 ,  G02B6/08 ,  G01N15/1468 ,  G01N2021/174 ,  G01N2021/178 ,  G01N2021/1785 ,  G01N2021/4707 ,  G01N21/64 ,  G01N21/6445 ,  G01N2201/117

Abstract: A laser imaging system is disclosed which provides the versatility of wide field digital imaging with enhanced spatial resolution and light gathering efficiency. The system will scan targets of any size, dependent only upon the data retrieval and storage limitation of the computer support system, for forward light loss densitometry images as well as fluorescent and forward scatter images. The system is easily adaptable for rare event detection and tracking. The laser system will provide image capture of an entire target within 10 to 60 seconds and controls the scan of the laser beam in three-dimensional pattern and speed. The beam may be repositioned to any one of 16 million locations on a target within an accuracy of +/-0.5 um. Finally, the imaging system of the present invention utilizes a novel optical fiber based detector assembly having NA values of 0.58-0.95 and filters having less than 15% loss at emission wavelengths. Thus, the imaging system of the present invention can capture from 14% to 32% of total fluorescence emission.

Abstract translation: 公开了一种激光成像系统，其提供具有增强的空间分辨率和光收集效率的广域数字成像的多功能性。 系统将扫描任何尺寸的目标，仅依赖于计算机支持系统的数据检索和存储限制，用于前向光损耗密度测量图像以及荧光和前向散射图像。 该系统易于适用于罕见的事件检测和跟踪。 激光系统将在10到60秒内提供整个目标的图像捕获，并以三维图案和速度控制激光束的扫描。 光束可以重新定位到目标的1600万个位置中的任何一个，精度为+/- 0.5um。 最后，本发明的成像系统利用了NA值为0.58-0.95的新型基于光纤的检测器组件和在发射波长处具有小于15％损耗的滤波器。 因此，本发明的成像系统可以捕获总荧光发射的14％至32％。

公开(公告)号：US11927527B2

公开(公告)日：2024-03-12

申请号：US17841124

申请日：2022-06-15

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Kai Maruyama ,  Takayuki Wakui

IPC: G01J3/28 ,  G01N21/25 ,  G01N21/33 ,  G01N21/3577 ,  G01N21/359 ,  G01N21/59

CPC classification number: G01N21/255 ,  G01N21/33 ,  G01N21/3577 ,  G01N21/359 ,  G01N21/59 ,  G01N2201/117

Abstract: When a measurement sample whose absorbance greatly changes depending on a wavelength range is measured, measurement with a high S/N ratio and accuracy can be efficiently performed in a short time.
For a plurality of wavelength ranges in wavelength scanning measurement of a measurement sample, based on measurement conditions including one of a plurality of dimming plates (16a to 16e) to be disposed in each wavelength range and a scanning speed of a wavelength to be set in each wavelength range, when wavelength scanning measurement in which the entire measurement wavelength range including all of the plurality of wavelength ranges is scanned at once is performed, a spectrophotometer (100) changes one of the plurality of dimming plates (16a to 16e) and the scanning speed according to the measurement conditions for each wavelength range.

公开(公告)号：US20160238533A1

公开(公告)日：2016-08-18

申请号：US15025464

申请日：2014-09-30

Applicant: RENISHAW PLC

Inventor： Thomas Anthony MASON

IPC: G01N21/65

CPC classification number: G01N21/65 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0248 ,  G01J3/2803 ,  G01J3/2823 ,  G01J3/44 ,  G01J2003/2826 ,  G01N2201/025 ,  G01N2201/06113 ,  G01N2201/103 ,  G01N2201/11 ,  G01N2201/117 ,  G01N2201/122

Abstract: This invention concerns spectroscopy apparatus comprising a light source arranged to generate a light profile on a sample, a photodetector having at least one photodetector element for detecting characteristic light generated from interaction of the sample with light from the light source, a support for supporting the sample, the support movable relative to the light profile, and a processing unit. The processing unit is arranged to associate a spectral value recorded by the photodetector element at a particular time with a point on the sample predicted to have generated the characteristic light recorded by the photodetector element at the particular time based on relative motion anticipated to have occurred between the support and the light profile.

Abstract translation: 本发明涉及光谱装置，其包括被配置为在样品上产生光分布的光源，具有至少一个光电探测元件的光电检测器，该光电检测元件用于检测由样品与来自光源的光的相互作用产生的特征光;支撑样品 ，相对于光轮廓可移动的支撑件，以及处理单元。 处理单元被布置为将由特定时间的光电检测器元件记录的光谱值与预测的样品上的点相关联，以在特定时间基于由光电检测器元件记录的特征光，基于预期发生在 支持和光线。

公开(公告)号：US20150355099A1

公开(公告)日：2015-12-10

申请号：US14297699

申请日：2014-06-06

Applicant: Hamilton Sundstrand Corporation

Inventor： Russell Fordyce ,  Ryan Chase

IPC: G01N21/88

CPC classification number: G01N21/88 ,  G01M5/0033 ,  G01N21/8806 ,  G01N21/8851 ,  G01N29/041 ,  G01N29/2418 ,  G01N2021/8427 ,  G01N2021/8924 ,  G01N2021/9516 ,  G01N2201/117 ,  G01N2201/126

Abstract: A scratch verification method and apparatus for detecting and analyzing defects in a surface, the apparatus include a detection device with a plurality of emission sources and a plurality of sensors. A processor is connected to the detection device and is configured to apply one or more sets of criteria to one or more corresponding target areas of a surface. The processor is further configured to differentiate between data from the one or more target areas.

Abstract translation: 一种用于检测和分析表面缺陷的划痕验证方法和装置，该装置包括具有多个发射源和多个传感器的检测装置。 处理器连接到检测装置，并且被配置为将一组或多组标准应用于表面的一个或多个对应的目标区域。 处理器还被配置为区分来自一个或多个目标区域的数据。