Coating method for continuous preparation of diamond thin film with HFCVD device

    公开(公告)号:US11939669B2

    公开(公告)日:2024-03-26

    申请号:US17627754

    申请日:2019-11-26

    摘要: A coating method for preparing diamond thin film continuously by HFCVD device includes the steps of: (a) carbonizing left and right chamber hot filaments; (b) disposing a substrate on a platform along with a trolley in a sample access chamber under vacuum condition; opening a left chamber gate valve and moving the substrate to left thin film growth chamber; closing the left chamber gate valve to grow diamond thin film on the substrate; (c) repeating step (b) by using a right chamber gate valve and right thin film growth chamber to grow diamond thin film; (d) opening the left chamber gate valve and moving the substrate to the sample access chamber; closing the left chamber gate valve and dropping to room temperature while under vacuum condition; releasing the vacuum condition and taking out the substrate with diamond thin film; (e) repeating step (d) for the right chamber gate valve.

    Hot filament CVD device
    2.
    发明授权

    公开(公告)号:US11846017B2

    公开(公告)日:2023-12-19

    申请号:US17271433

    申请日:2019-08-19

    IPC分类号: C23C16/27 C23C16/458

    CPC分类号: C23C16/271 C23C16/458

    摘要: Provided is a hot filament CVD device capable of easily attaching, detaching, and replacing a filament. The hot filament CVD device includes a chamber, a base material support that supports multiple base materials, filament cartridges, and paired holding parts. The filament cartridges each include multiple filaments (60), a first frame, a second frame, and paired connecting members. The paired holding parts guide each of the filament cartridges when it is inserted into the chamber, and hold the filament cartridges in the chamber so that the filament cartridges face the multiple base materials.

    DIAMOND-COATED MACHINING TOOL AND METHOD FOR PRODUCTION THEREOF

    公开(公告)号:US20170145563A1

    公开(公告)日:2017-05-25

    申请号:US15367688

    申请日:2016-12-02

    申请人: Guhring KG

    摘要: A machining tool comprising at least one diamond-coated functional region having a substrate surface composed of a hard metal or a ceramic material arranged beneath the diamond layer. The substrate surface contains hard material particles on the basis of carbide and/or nitride and/or oxide, which are embedded in a cobalt-containing binding matrix. The diamond layer is directly arranged on the substrate surface without cobalt having been removed by chemical or physical methods in substantial amounts out of the binding matrix of the substrate surface. Such a tool is produced by pre-treating a hard metal substrate surface with a positively charged ion beam, followed by conventional CVD-diamond coating directly onto the ion beam-pre-treated cobalt-containing substrate surface. The ion-underlying atoms thereby largely remain in the substrate. The tools according to the invention have good diamond layer bonding to the substrate and a high wear resistance.

    COATED TOOL
    5.
    发明申请
    COATED TOOL 审中-公开
    涂装工具

    公开(公告)号:US20170043406A1

    公开(公告)日:2017-02-16

    申请号:US15305917

    申请日:2015-04-24

    发明人: Masahiro WAKI

    摘要: A coated tool is provided which is capable of inhibiting occurrence of chipping, peeling-off, or the like of a diamond layer by enhancing fracture resistance, and which has the diamond layer with high wear resistance. The coating tool is, for example, a drill having a diamond layer coated on a surface of a base material. The diamond layer has a first coating layer located close to the base material, and a second coating layer located on the first coating layer. A mean particle size of second diamond particles constituting the second coating layer is smaller than a mean particle size of first diamond particles constituting the first coating layer. The diamond layer contains hydrogen, and a hydrogen content in the second coating layer is larger than a hydrogen content in the first coating layer.

    摘要翻译: 提供了一种涂覆的工具,其能够通过提高抗断裂性而抑制金刚石层的切屑,剥离等的发生,并且具有高耐磨性的金刚石层。 涂覆工具是例如具有涂覆在基材表面上的金刚石层的钻头。 金刚石层具有靠近基材的第一涂层和位于第一涂层上的第二涂层。 构成第二涂层的第二金刚石颗粒的平均粒径小于构成第一涂层的第一金刚石颗粒的平均粒径。 金刚石层含有氢,第二涂层中的氢含量大于第一涂层中的氢含量。

    Diamond coated tool
    7.
    发明授权
    Diamond coated tool 有权
    金刚石涂层工具

    公开(公告)号:US09302327B2

    公开(公告)日:2016-04-05

    申请号:US13139799

    申请日:2010-06-08

    摘要: The present invention provides a diamond coated tool which is resistant to exfoliation at an interface between a base material and a diamond layer. The diamond coated tool of the present invention is a diamond coated tool including a base material and a diamond layer coating a surface of the base material, and characterized in that the surface of the base material has an arithmetic average roughness Ra of not less than 0.1 μm and not more than 10 μm and an average length of roughness profile elements RSm of not less than 1 μm and not more than 100 μm, and that the diamond layer has a plurality of cavities extending from a portion bordering on the base material in a crystal growth direction.

    摘要翻译: 本发明提供一种金刚石涂层的工具,其耐磨性在基材和金刚石层之间的界面处。 本发明的金刚石涂层工具是金刚石涂层工具,其包括基材和涂覆基材表面的金刚石层,其特征在于,基材表面的算术平均粗糙度Ra为0.1以上 μm且不大于10μm,粗糙度轮廓元素RSm的平均长度不小于1μm且不大于100μm,并且金刚石层具有从基体材料上接合的部分延伸的多个空腔 晶体生长方向。

    Carbon material covered with diamond thin film and method of manufacturing same
    8.
    发明授权
    Carbon material covered with diamond thin film and method of manufacturing same 有权
    用金刚石薄膜覆盖的碳材料及其制造方法

    公开(公告)号:US09102541B2

    公开(公告)日:2015-08-11

    申请号:US13260065

    申请日:2010-03-19

    摘要: A carbon material and a method of manufacturing the carbon material are provided. By affixing diamond particles onto a carbonaceous substrate in a condition in which etching caused by hydrogen radicals is unlikely to occur, the substrate etching rate can be suppressed, and the carbon material is allowed to have a diamond thin film having excellent adhesion capability. The carbon material has a carbonaceous substrate showing a weight decrease under a diamond synthesis condition, diamond particles disposed on a surface of the carbonaceous substrate, and a diamond layer having the diamond particles as seeds. The weight of the diamond particles per unit area is set to from 1.0×10−4 g/cm2 to less than 3.0×10−3 g/cm2.

    摘要翻译: 提供碳材料和碳材料的制造方法。 通过在不可能发生由氢自由基引起的蚀刻的条件下将金刚石颗粒固定在碳质基材上,可以抑制基板蚀刻速率,并且使碳材料具有优异的粘附性能的金刚石薄膜。 碳材料具有显示在金刚石合成条件下重量减少的碳质基材,设置在碳质基材的表面上的金刚石颗粒和具有金刚石颗粒作为晶种的金刚石层。 每单位面积的金刚石颗粒的重量为1.0×10 -4 g / cm 2至小于3.0×10 -3 g / cm 2。

    ELECTRODE FOR ELECTROCHEMISTRY AND MANUFACTURING METHOD FOR THE SAME
    10.
    发明申请
    ELECTRODE FOR ELECTROCHEMISTRY AND MANUFACTURING METHOD FOR THE SAME 审中-公开
    电化学电极及其制造方法

    公开(公告)号:US20140322632A1

    公开(公告)日:2014-10-30

    申请号:US14357462

    申请日:2012-11-01

    IPC分类号: F27D7/06 G01N27/30 H01M4/86

    摘要: The present invention provides an electrode for electrochemistry with a high quality, in which the surface area of the polycrystalline conductive diamond layer is increased and the crystal plane is controlled. In addition, when the catalyst layer of electrode substance is coated on the polycrystalline conductive diamond layer, adherence between the two layers is increased to provide an electrode for electrochemistry with a high durability. The polycrystalline conductive diamond layer is held under an atmosphere of carbon dioxide at a temperature 400 degrees Celsius or higher but 1000 degreesCelsius or lower to make the polycrystalline conductive diamond layer porous and make a specific crystal plane to remain and be formed.

    摘要翻译: 本发明提供了一种高质量的电化学电极,其中多晶导电金刚石层的表面积增加并且晶面受到控制。 此外,当电极物质的催化剂层涂覆在多晶导电金刚石层上时,增加两层之间的粘附性,以提供具有高耐久性的用于电化学的电极。 多晶导电金刚石层在二氧化碳气氛下在400摄氏度或更高但是1000摄氏度或更低的温度下保持,以使多晶导电金刚石层多孔,并形成特定的晶面保留并形成。