Maintenance liquid for inkjet printers
    5.
    发明授权
    Maintenance liquid for inkjet printers 有权
    喷墨打印机维护液

    公开(公告)号:US09328320B2

    公开(公告)日:2016-05-03

    申请号:US14783276

    申请日:2014-04-15

    Abstract: A maintenance liquid for inkjet printers includes at least 50 wt % of at least one ether solvent according to Formula (I) or (II) with the wt % based on the total weight of the maintenance liquid: R1(CO)x(OR2)yOR3  Formula (I), and R4CO(OR5)zOCOR6  Formula (II), wherein R1, R4 and R6 independently represent an alkyl group having 1 to 4 carbon atoms; R2 rand R5 independently represent an ethylene group or a propylene group; R3 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms; x represents an integer of 0 or 1; y and z independently represent an integer of 1 to 4; and wherein the maintenance liquid contains no more than 25 ppm of peroxide expressed as hydrogen peroxide.

    Abstract translation: 用于喷墨打印机的维护液体包含至少50重量%的至少一种根据式(I)或(II)的醚溶剂,其重量%基于维护液的总重量:R1(CO)x(OR2) YOR 3式(I)和R 4 CO(OR 5)zOCOR 6式(II)其中R 1,R 4和R 6独立地表示具有1至4个碳原子的烷基; R2 rand R5独立地表示亚乙基或亚丙基; R3表示氢原子或碳原子数1〜4的烷基。 x表示0或1的整数; y和z独立地表示1〜4的整数。 并且其中维持液含有不超过25ppm的过氧化氢表示的过氧化物。

    MAINTENANCE LIQUID FOR INKJET PRINTERS
    6.
    发明申请
    MAINTENANCE LIQUID FOR INKJET PRINTERS 有权
    喷墨打印机的维护液

    公开(公告)号:US20160068790A1

    公开(公告)日:2016-03-10

    申请号:US14783276

    申请日:2014-04-15

    Abstract: A maintenance liquid for inkjet printers includes at least 50 wt % of at least one ether solvent according to Formula (I) or (II) with the wt % based on the total weight of the maintenance liquid: R1(CO)x(OR2)yOR3   Formula (I), and R4CO(OR5)zOCOR6   Formula (II), wherein R1, R4 and R6 independently represent an alkyl group having 1 to 4 carbon atoms; R2 rand R5 independently represent an ethylene group or a propylene group; R3 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms; x represents an integer of 0 or 1; y and z independently represent an integer of 1 to 4; and wherein the maintenance liquid contains no more than 25 ppm of peroxide expressed as hydrogen peroxide.

    Abstract translation: 用于喷墨打印机的维护液体包含至少50重量%的至少一种根据式(I)或(II)的醚溶剂,其重量%基于维护液体的总重量:R1(CO)x(OR2) YOR 3式(I)和R 4 CO(OR 5)zOCOR 6式(II)其中R 1,R 4和R 6独立地表示具有1至4个碳原子的烷基; R2 rand R5独立地表示亚乙基或亚丙基; R3表示氢原子或碳原子数1〜4的烷基。 x表示0或1的整数; y和z独立地表示1〜4的整数。 并且其中维持液含有不超过25ppm的过氧化氢表示的过氧化物。

    Cleaning compositions for use in closed loop cleaning machines
    8.
    发明授权
    Cleaning compositions for use in closed loop cleaning machines 有权
    用于闭环清洗机的清洁组合物

    公开(公告)号:US09034108B2

    公开(公告)日:2015-05-19

    申请号:US12736446

    申请日:2009-02-27

    Abstract: Embodiments of the present disclosure include cleaning processes, closed loop cleaning machines, and methods of cleaning an article. The cleaning process includes contacting a surface of an article with a cleaning composition in a cleaning chamber, where the cleaning composition includes at least about 85 percent by weight organic solvents, based on total weight of the cleaning composition, and where at least about 5 percent by weight of the organic solvents is propylene glycol, based on total weight of the organic solvents, to clean the surface of the article, collecting the cleaning composition including contaminants, and recovering the cleaning composition via distillation, where a distillation apparatus removes the contaminants from the cleaning composition and is connected to the cleaning chamber by a process stream.

    Abstract translation: 本公开的实施例包括清洁过程,闭环清洁机器和清洁制品的方法。 清洁过程包括将制品的表面与清洁组合物接触,其中清洁组合物基于清洁组合物的总重量包含至少约85重量%的有机溶剂,并且其中至少约5重量% 的有机溶剂是基于有机溶剂的总重量的丙二醇,以清洁制品的表面,收集包括污染物的清洁组合物,并通过蒸馏回收清洁组合物,其中蒸馏装置将污染物从 清洁组合物并通过工艺流连接到清洁室。

    METAL AND DIELECTRIC COMPATIBLE SACRIFICIAL ANTI-REFLECTIVE COATING CLEANING AND REMOVAL COMPOSITION
    9.
    发明申请
    METAL AND DIELECTRIC COMPATIBLE SACRIFICIAL ANTI-REFLECTIVE COATING CLEANING AND REMOVAL COMPOSITION 有权
    金属和电介质兼容抗反射涂层清洁和去除组合物

    公开(公告)号:US20150094248A1

    公开(公告)日:2015-04-02

    申请号:US14558071

    申请日:2014-12-02

    Applicant: ENTEGRIS, INC.

    Abstract: A liquid removal composition and process for removing sacrificial anti-reflective coating (SARC) material from a substrate having same thereon. The liquid removal composition includes at least one fluoride-containing compound, at least one organic solvent, optionally water, and optionally at least one chelating agent. The composition achieves at least partial removal of SARC material in the manufacture of integrated circuitry with minimal etching of metal species on the substrate, such as aluminum, copper and cobalt alloys, and without damage to low-k dielectric materials employed in the semiconductor architecture.

    Abstract translation: 一种液体去除组合物和从其上具有其的基材去除牺牲抗反射涂层(SARC)材料的方法。 液体去除组合物包括至少一种含氟化物的化合物,至少一种有机溶剂,任选的水和任选的至少一种螯合剂。 该组合物在集成电路的制造中至少部分去除SARC材料,同时对基板上的金属物质(例如铝,铜和钴合金)进行最小蚀刻,并且不损坏在半导体结构中使用的低k电介质材料。

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