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公开(公告)号：US20240125599A1
公开(公告)日：2024-04-18
申请号：US18347875
申请日：2023-07-06
Applicant: The Regents of the University of California
Inventor： Andrei M. SHKEL , Mohammad H. ASADIAN ARDAKANI , Yusheng WANG
IPC: G01C19/5719 , B81C1/00 , H03H3/007 , H03H9/10
CPC classification number: G01C19/5719 , B81C1/00182 , H03H3/0072 , H03H9/1057 , B81B3/0051 , B81B2203/0172
Abstract: A dual-shell architecture and methods of fabrication of fused quartz resonators is disclosed. The architecture may include two encapsulated and concentric cavities using plasma-activated wafer bonding followed by the high-temperature glassblowing. The dual-shell architecture can provide a protective shield as well as a “fixed-fixed” anchor for the sensing element of the resonators. Structures can be instrumented to operate as a resonator, a gyroscope, or other vibratory sensor and for precision operation in a harsh environment. Methods for fabricating a dual-shell resonator structure can include pre-etching cavities on a cap wafer, pre-etching cavities on a device wafer, bonding the device wafer to a substrate wafer to form a substrate pair and aligning and bonding the cap wafer to the substrate pair to form a wafer stack with aligned cavities including a cap cavity and a device cavity. The wafer stack may be glassblown to form a dual-shell structure.
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公开(公告)号：US08711495B2
公开(公告)日：2014-04-29
申请号：US13632965
申请日：2012-10-01
Applicant: Apple Inc.
Inventor： Richard J. Topliss
CPC classification number: G02B7/08 , B81B3/0062 , B81B2201/047 , B81B2203/0136 , B81B2203/0172 , B81B2203/053 , G02B13/0075 , G02B26/0841
Abstract: A micro-electro-mechanical systems (MEMS) autofocus actuator having a support member for supporting a lens element, the support member including a stationary portion and a movable portion, the movable portion attached to the stationary portion by a movable support beam. An electrostatic drive member is attached to the stationary portion and the movable portion to drive movement of the movable portion with respect to the stationary portion. A lens holder is suspended within the support member by a resilient arm member attached to the movable portion and a deflection beam attached to the stationary portion so that in a non-actuated state, the lens element is in a first focal position that is substantially out-of-plane with respect to the stationary portion, and in an actuated state, the lens element is in a second focal position, the second focal position being different from the first focal position.
Abstract translation: 一种具有用于支撑透镜元件的支撑构件的微电子机械系统（MEMS）自动对焦致动器，所述支撑构件包括固定部分和可动部分，所述可移动部分通过可移动支撑梁附接到所述静止部分。 静电驱动构件附接到静止部分和可移动部分，以驱动可动部分相对于静止部分的运动。 透镜架通过附接到可动部分的弹性臂构件和附接到固定部分的偏转光束悬挂在支撑构件内，使得在非致动状态下，透镜元件处于基本上为外部的第一焦点位置 并且在致动状态下，所述透镜元件处于第二焦点位置，所述第二焦点位置与所述第一焦点位置不同。
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公开(公告)号：US20180157031A1
公开(公告)日：2018-06-07
申请号：US15579547
申请日：2016-06-06
Applicant: DAI-ICHI SEIKO CO., LTD.
Inventor： Kenji Ogata , Shinya Sakamoto , Yoshifumi Ikeda , Shogo Kurogi , Kazuhiro Okada , Satoshi Era
CPC classification number: G02B26/101 , B81B3/0045 , B81B3/0062 , B81B2201/042 , B81B2203/0172 , B81B2203/0181 , B81B2203/058 , G02B7/182 , G02B26/0858
Abstract: Actuators (140), which are a pair of members, are disposed one on either side of a movable frame (120) in the X-axis direction, and oscillate the movable frame (120) about the X axis in relation to a fixed frame (110) by deformation caused by stretching and contracting of piezoelectric elements. Actuators (150), which are a pair of members, are disposed one on either side of a mirror (130) in the Y-axis direction, and oscillate the mirror (130) about the Y axis in relation to the movable frame (120) by deformation caused by stretching and contracting of the piezoelectric elements. The length of each actuator (140) extending in the Y-axis direction is longer than a distance between an inner side of the fixed frame (110) to which the actuator (140) is connected and the middle point of an outer side of the movable frame (120) in the Y-axis direction.
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公开(公告)号：US08629353B2
公开(公告)日：2014-01-14
申请号：US12717829
申请日：2010-03-04
Applicant: Rostam Dinyari , Peter Peumans , Kevin Huang
Inventor： Rostam Dinyari , Peter Peumans , Kevin Huang
IPC: H05K1/00
CPC classification number: B81B7/04 , A61N1/0551 , B81B2203/0172 , B81B2207/053 , B81B2207/07 , H01L27/14658 , H05K1/0283
Abstract: Aspects of the disclosure are directed to an apparatus that is used to provide a circuit layer via a supportive substrate or material layer having an upper surface and having edge surfaces configured and arranged to define patterned aperture channels. The material layer includes an array of patterned islands which provide an upper surface of the material layer for securing and supporting circuitry. The patterned islands are flexible due, for example, to patterned flexures located between and connecting the islands.
Abstract translation: 本公开的方面涉及一种用于经由支撑衬底或材料层提供电路层的装置，所述支撑衬底或材料层具有上表面并且具有被配置和布置以限定图案化孔径通道的边缘表面。 材料层包括图案化岛的阵列，其提供用于固定和支撑电路的材料层的上表面。 图案化的岛由于例如位于和连接岛之间的图案化弯曲而是柔性的。
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公开(公告)号：US11760623B2
公开(公告)日：2023-09-19
申请号：US18045677
申请日：2022-10-11
Applicant: NXP USA, INC.
Inventor： Stephen Ryan Hooper , Mark Edward Schlarmann , Michael B. Vincent , Scott M. Hayes , Julien Juéry
CPC classification number: B81B3/0018 , G01L9/0072 , B81B2201/0264 , B81B2203/0118 , B81B2203/0172
Abstract: A no-gel sensor package is disclosed. In one embodiment, the package includes a microelectromechanical system (MEMS) die having a first substrate, which in turn includes a first surface on which is formed a MEMS device. The package also includes a polymer ring with an inner wall extending between first and second oppositely facing surfaces. The first surface of the polymer ring is bonded to the first surface of the first substrate to define a first cavity in which the MEMS device is contained. A molded compound body having a second cavity that is concentric with the first cavity, enables fluid communication between the MEMS device and an environment external to the package.
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Patent Agency Ranking
公开(公告)号：US11703330B2
公开(公告)日：2023-07-18
申请号：US16836387
申请日：2020-03-31
Applicant: The Regents of the University of California
Inventor： Andrei M. Shkel , Mohammad H. Asadian Ardakani , Yusheng Wang
IPC: G01C19/5719 , B81C1/00 , H03H3/007 , H03H9/10 , B81B3/00 , G01C19/5691 , B81B7/00
CPC classification number: G01C19/5719 , B81C1/00182 , H03H3/0072 , H03H9/1057 , B81B3/0051 , B81B7/0016 , B81B2201/0242 , B81B2201/0271 , B81B2203/0127 , B81B2203/0172 , B81C1/00158 , G01C19/5691
Abstract: A dual-shell architecture and methods of fabrication of fused quartz resonators is disclosed. The architecture may include two encapsulated and concentric cavities using plasma-activated wafer bonding followed by the high-temperature glassblowing. The dual-shell architecture can provide a protective shield as well as a “fixed-fixed” anchor for the sensing element of the resonators. Structures can be instrumented to operate as a resonator, a gyroscope, or other vibratory sensor and for precision operation in a harsh environment. Methods for fabricating a dual-shell resonator structure can include pre-etching cavities on a cap wafer, pre-etching cavities on a device wafer, bonding the device wafer to a substrate wafer to form a substrate pair and aligning and bonding the cap wafer to the substrate pair to form a wafer stack with aligned cavities including a cap cavity and a device cavity. The wafer stack may be glassblown to form a dual-shell structure.
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公开(公告)号：US11643325B2
公开(公告)日：2023-05-09
申请号：US17939205
申请日：2022-09-07
Applicant: PixArt Imaging Inc.
Inventor： Chih-Ming Sun , Ming-Han Tsai , Yu-Tao Lee
IPC: B81B3/00 , H01L27/146 , H01L23/00 , B81C1/00
CPC classification number: B81B3/0021 , B81C1/00142 , H01L24/16 , H01L27/14618 , H01L27/14636 , B81B2201/033 , B81B2203/0109 , B81B2203/0172 , B81B2203/04 , B81B2203/051 , B81B2203/055 , B81B2207/07 , H01L2224/16245 , H01L2924/1461
Abstract: A MEMS package including a fixed frame, a moveable platform and elastic restoring members is provided. The moveable platform is moved with respect to the fixed frame. The elastic restoring members are connected between the fixed frame and the moveable platform, and used to restore the moved moveable platform to an original position.
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公开(公告)号：US20140238828A1
公开(公告)日：2014-08-28
申请号：US14240670
申请日：2012-09-04
Applicant: Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
Inventor： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
CPC classification number: H01H59/0009 , B81B3/0097 , B81B7/04 , B81B2201/018 , B81B2203/0109 , B81B2203/0118 , B81B2203/0172 , B81B2203/0307
Abstract: The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
Abstract translation: 本发明一般涉及具有多个悬臂的MEMS装置，所述多个悬臂在锚定区域中耦合在一起，和/或通过腿连接在悬臂的中心区域中。 腿部确保每个悬臂可以在相同电压下从RF电极上方移动/释放。 锚定区域联接器匹配悬臂的所有部分中的机械刚度，使得所有悬臂移动在一起。
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公开(公告)号：US20140092492A1
公开(公告)日：2014-04-03
申请号：US13632965
申请日：2012-10-01
Applicant: APPLE INC.
Inventor： Richard J. Topliss
IPC: G02B7/04
CPC classification number: G02B7/08 , B81B3/0062 , B81B2201/047 , B81B2203/0136 , B81B2203/0172 , B81B2203/053 , G02B13/0075 , G02B26/0841
Abstract: A micro-electro-mechanical systems (MEMS) autofocus actuator having a support member for supporting a lens element, the support member including a stationary portion and a movable portion, the movable portion attached to the stationary portion by a movable support beam. An electrostatic drive member is attached to the stationary portion and the movable portion to drive movement of the movable portion with respect to the stationary portion. A lens holder is suspended within the support member by a resilient arm member attached to the movable portion and a deflection beam attached to the stationary portion so that in a non-actuated state, the lens element is in a first focal position that is substantially out-of-plane with respect to the stationary portion, and in an actuated state, the lens element is in a second focal position, the second focal position being different from the first focal position.
Abstract translation: 一种具有用于支撑透镜元件的支撑构件的微电子机械系统（MEMS）自动对焦致动器，所述支撑构件包括固定部分和可动部分，所述可移动部分通过可移动支撑梁附接到所述静止部分。 静电驱动构件附接到静止部分和可移动部分，以驱动可动部分相对于静止部分的运动。 透镜架通过附接到可动部分的弹性臂构件和附接到固定部分的偏转光束悬挂在支撑构件内，使得在非致动状态下，透镜元件处于基本上为外部的第一焦点位置 并且在致动状态下，所述透镜元件处于第二焦点位置，所述第二焦点位置与所述第一焦点位置不同。
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公开(公告)号：US11807517B2
公开(公告)日：2023-11-07
申请号：US17208918
申请日：2021-03-22
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Dario Paci , Domenico Giusti , Irene Martini
CPC classification number: B81B3/0024 , B81B3/0021 , B81B7/02 , H04N23/57 , H04N23/67 , B81B2201/032 , B81B2201/047 , B81B2203/0127 , B81B2203/0172 , B81B2203/0315 , B81B2203/04 , B81B2203/053
Abstract: A MEMS device includes a semiconductor support body having a first cavity, a membrane including a peripheral portion, fixed to the support body, and a suspended portion. A first deformable structure is at a distance from a central part of the suspended portion of the membrane and a second deformable structure is laterally offset relative to the first deformable structure towards the peripheral portion of the membrane. A projecting region is fixed under the membrane. The second deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a first direction, and the first deformable structure is deformable so as to translate the central part of the suspended portion of the membrane along a second direction.
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