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公开(公告)号：US10224164B2
公开(公告)日：2019-03-05
申请号：US14240670
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
摘要： The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
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公开(公告)号：US08289674B2
公开(公告)日：2012-10-16
申请号：US12405758
申请日：2009-03-17
IPC分类号： H01H47/00
CPC分类号： H01H59/0009 , G11C23/00 , H01H1/0036 , H01H2001/0047 , H01H2059/0036 , H01H2059/0054 , H01H2059/0063
摘要： Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.
摘要翻译： 本文公开的实施例通过使用一系列将开关牢固地粘附到着陆电极到仅弱附着点的力的脉冲来解决开关器件中的静电问题。 一旦处于低附着状态，则可以用由开关的弹簧常数提供的较小的力和/或施加到附近电极的低电压产生的静电力将开关拉离开接触。
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公开(公告)号：US07119940B2
公开(公告)日：2006-10-10
申请号：US11152794
申请日：2005-06-14
申请人： Richard L. Knipe
发明人： Richard L. Knipe
CPC分类号： G02B26/0841 , H04N5/7458
摘要： A capacitively coupled microelectromechanical device and method of operation. The micromechanical device comprises: a semiconductor substrate; a member operable to deflect about a torsion axis to either of at least two states; and a switch driven for selectively connecting the member to a voltage signal. When a logic high signal is stored on the memory capacitor 308, the mirror transistor 310 is turned on, grounding the mirror structure 312. When a logic low signal is stored on the memory capacitor 308, the mirror transistor 310 is turned off, allowing the mirror to float electrically. Mirrors that are tied to a voltage potential, which typically are grounded, are affected by a reset pulse and rotate away from their landed position. When the mirrors have rotated to the opposite side, a bias signal is applied to hold the repositioned mirror in place in the opposite state. Mirrors that electrically are floating do not experience the forces generated by the reset voltage and remain in their previous state. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. § 1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.
摘要翻译： 一种电容耦合微机电装置及其操作方法。 微机械装置包括：半导体衬底; 可操作以围绕扭转轴线偏转至少两个状态中的任何一个的构件; 以及用于选择性地将构件连接到电压信号的开关。 当逻辑高电平信号存储在存储器电容器308上时，反射镜晶体管310导通，使反射镜结构312接地。 当逻辑低电平信号存储在存储电容器308上时，反射镜晶体管310截止，允许反射镜电气浮动。 连接到电压电位（通常为接地）的反射镜受到复位脉冲的影响，并远离其着陆位置旋转。 当镜子旋转到相对侧时，施加偏置信号以将重新定位的镜子保持在相反的状态。 电浮动的反射镜不会经历由复位电压产生的力并保持其先前状态。 提交上述摘要的理解是，它只会用于协助从粗略检查中确定37 C.F.R.描述的技术披露的性质和要点。 §1.72（b）。 在任何情况下，本摘要不得用于解释任何专利权利要求的范围。
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公开(公告)号：US06552840B2
公开(公告)日：2003-04-22
申请号：US09726861
申请日：2000-11-30
申请人： Richard L. Knipe
发明人： Richard L. Knipe
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： An improved micromechanical device, particularly a micromirror device having improved electrostatic efficiency. A deflectable member comprised of a mirror 302 and an active hinge yoke 306 is suspended address 308 and landing electrodes 312 on a substrate 310 and above upper address electrodes supported above the substrate 310. The deflectable member is operable to rotate about a torsion hinge axis in response to an electrostatic force between the address electrodes and the deflectable member. The upper address electrodes have a stair stepped shape to narrow a gap between the deflectable member and the upper address electeodes. The gap is narrower near the axis of rotation 810 compared to away from the axis. The stair stepped shape is achieved by embedding a portion of an oxide layer 804 between a thin metal layer 806 making up the upper address electrodes 806, the active hinge yoke 306, and the torsion hinges, and a thick metal layer 808 making up the upper address electrodes 806 and the active hinge yoke 306.
摘要翻译： 改进的微机械装置，特别是具有改善的静电效率的微镜装置。 由反射镜302和主动铰链轭306组成的可偏转构件是悬挂在基板310上的地址308和着陆电极312，以及支撑在基板310上方的上部地址电极上方。可偏转构件可操作以围绕扭转铰链轴线旋转 响应地址电极和可偏转构件之间的静电力。 上部地址电极具有阶梯形状，以使可偏转构件和上部地址电极之间的间隙变窄。 与远离轴线相比，间隙在旋转轴线810附近更窄。 台阶形状通过将氧化物层804的一部分嵌入在构成上部寻址电极806的薄金属层806，活动铰链轭306和扭转铰链之间，以及构成上层的厚金属层808来实现。 寻址电极806和主动铰链轭306。
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公开(公告)号：US06285490B1
公开(公告)日：2001-09-04
申请号：US09475730
申请日：1999-12-30
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： An improved micromechanical device comprising a substrate (104), a deflectable member (102) suspended over the substrate (104), at least one spring-ring (124) supported above the substrate (104); and at least one address electrode (110) spaced apart from substrate (104). The spring-ring (124) resists deflection of the deflectable member (102) when the deflectable member (102) deflects to contact the spring-ring (124). By moving the address electrode (110) off the substrate level, the micromirror is much more immune to particle-caused short circuits, and a planer surface on which to fabricate the mirror (102) is provided without the need to utilize an inverse spacer layer.
摘要翻译： 一种改进的微机械装置，包括衬底（104），悬置在衬底（104）上的可偏转构件（102），支撑在衬底（104）上方的至少一个弹簧环（124）; 以及与衬底（104）间隔开的至少一个地址电极（110）。 当可偏转构件（102）偏转以接触弹簧环（124）时，弹簧环（124）抵抗可偏转构件（102）的偏转。 通过将寻址电极（110）移动离开衬底水平，微镜对于颗粒引起的短路更加免疫，并且提供了在其上制造反射镜（102）的平面，而不需要使用反向间隔层 。
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公开(公告)号：US5867202A
公开(公告)日：1999-02-02
申请号：US768007
申请日：1996-12-13
CPC分类号： G02B26/0825 , G02B26/0841
摘要： A micromechanical device (50) with spring tips (60) and its method of manufacture. A micromechanical device (50) is formed such that there is a deflectable element (36) suspended by at least one hinge (24a) over an air gap, at the bottom of which are landing stops (34a). The element (36) deflects on said hinge and comes into contact with the landing stops (34a) via at least one small metal protrusion (60), or spring tip. The spring tip flexes upon contact allowing more even distribution of forces and less wear and adhesion. The spring tips are formed in standard semiconductor processing steps with the addition of patterning the metal layer (64) from which the hinges are formed to create separated metal elements. When the deflectable element is formed, the metal forming that element bonds to the separated metal elements at the tips, thereby forming the spring tips.
摘要翻译： 一种具有弹簧顶端（60）的微机械装置（50）及其制造方法。 微机械装置（50）形成为使得存在由空气间隙上的至少一个铰链（24a）悬挂的可偏转元件（36），其底部是着陆挡块（34a）。 元件（36）在所述铰链上偏转并经由至少一个小金属突起（60）或弹簧尖端与着陆挡块（34a）接触。 弹簧尖端在接触时弯曲，允许更均匀的力分布和更少的磨损和粘附力。 在标准的半导体加工步骤中形成弹簧尖端，其中添加了形成铰链的金属层（64）的图案化以产生分离的金属元件。 当形成可偏转元件时，形成该元件的金属在尖端处与分离的金属元件结合，从而形成弹簧顶端。
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公开(公告)号：US5280889A
公开(公告)日：1994-01-25
申请号：US681821
申请日：1991-04-08
申请人： David L. Amil , William D. Bracken , Robert W. Coburn , Richard L. Knipe , Gregory G. Mooty , David D. Ratcliff , Daniel W. Stanley , Kenneth L. Taylor , Steven S. Stresau
发明人： David L. Amil , William D. Bracken , Robert W. Coburn , Richard L. Knipe , Gregory G. Mooty , David D. Ratcliff , Daniel W. Stanley , Kenneth L. Taylor , Steven S. Stresau
摘要： "A vehicle and the ballistic shock isolator therefor including a turret, a sensor assembly and a shock isolator isolating the turret from the sensor switch and including upper and lower annular members, a plurality of leaves secured at opposing ends thereof to the annular members, each of the leaves having a corrugated bellows shaped portion in the form of an even number of similarly shaped portions, alternate ones of the similarly shaped portions having an open end in opposing directions, each of the leaves varying in thickness and width in a direction from the upper annular member to the lower annular member. The variation in width of the portion is alternately from wide to narrow and then from narrow to wide in a direction from the upper annular member to the lower annular member. Each of the leaves is composed of a metal having a yield strength which will not be exceeded by the maximum contemplated shock conditions and at least 150 KSI, the metal returning to its original shape after being subjected to shock. The metal is preferably 4000 series stainless steel. By use of the above described ballistic shock isolator, a tank may be subjected to a severe shock due to collision with a non-penetrating projectile with the CITV sensor assembly being capable of rapid repositioning to substantially identically return to its original position relative to the tank, thereby providing reliable boresight for use in connection with further tank deployment.
摘要翻译： “一种车辆和防弹隔离器，包括转塔，传感器组件和隔离隔离器，用于将转塔与传感器开关隔离，并包括上下环形构件，多个叶片，其相对的端部固定在环形构件上，每个叶片各自 的叶片具有偶数个类似形状的部分形式的波纹波纹形状部分，相似形状的部分中的交替的部分在相反的方向上具有开口端，每个叶片的厚度和宽度在从 上环形构件到下环形构件，该部分的宽度变化在从上环形构件到下环形构件的方向上交替地从宽到窄，然后从窄到宽，每个叶由 具有不超过最大预期冲击条件和至少150KSI的屈服强度的金属，金属返回其原始形状 呃受到冲击。 该金属优选为4000系列不锈钢。 通过使用上述的防弹隔离器，由于与非穿透弹丸的碰撞，罐可能受到严重的冲击，CITV传感器组件能够快速重新定位，从而基本相同地返回到相对于罐的原始位置 ，从而提供可靠的视轴，用于与进一步的油箱部署相关联。
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公开(公告)号：US09373447B2
公开(公告)日：2016-06-21
申请号：US14239115
申请日：2012-08-17
CPC分类号： H01G5/16 , H01G5/38 , H01G7/00 , H01H59/0009 , Y10T29/43
摘要： Utilizing a variable capacitor for RF and microwave applications provides for multiple levels of intra-cavity routing that advantageously reduce capacitive coupling. The variable capacitor includes a bond pad that has a plurality of cells electrically coupled thereto. Each of the plurality of cells has a plurality of MEMS devices therein. The MEMS devices share a common RF electrode, one or more ground electrodes and one or more control electrodes. The RF electrode, ground electrodes and control electrodes are all arranged parallel to each other within the cells. The RF electrode is electrically connected to the one or more bond pads using a different level of electrical routing metal.
摘要翻译： 利用用于RF和微波应用的可变电容器可提供有利于减少电容耦合的多级腔内路由。 可变电容器包括具有与其电耦合的多个单元的接合焊盘。 多个单元中的每一个在其中具有多个MEMS器件。 MEMS器件共享公共RF电极，一个或多个接地电极和一个或多个控制电极。 RF电极，接地电极和控制电极都在电池内彼此平行布置。 RF电极使用不同级别的电路由金属电连接到一个或多个接合焊盘。
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公开(公告)号：US09018717B2
公开(公告)日：2015-04-28
申请号：US13237261
申请日：2011-09-20
CPC分类号： H01H1/0036 , H01H59/0009 , H01H2001/0084
摘要： The present invention generally relates to MEMS devices and methods for their manufacture. The cantilever of the MEMS device may have a waffle-type microstructure. The waffle-type microstructure utilizes the support beams to impart stiffness to the microstructure while permitting the support beam to flex. The waffle-type microstructure permits design of rigid structures in combination with flexible supports. Additionally, compound springs may be used to create very stiff springs to improve hot-switch performance of MEMS devices. To permit the MEMS devices to utilize higher RF voltages, a pull up electrode may be positioned above the cantilever to help pull the cantilever away from the contact electrode.
摘要翻译： 本发明一般涉及MEMS器件及其制造方法。 MEMS器件的悬臂可以具有华夫饼型微结构。 华夫饼形微结构利用支撑梁来赋予微结构刚度，同时允许支撑梁弯曲。 华夫饼型微结构允许将刚性结构与柔性支撑结合在一起。 此外，可以使用复合弹簧来产生非常硬的弹簧以改善MEMS装置的热开关性能。 为了允许MEMS器件利用更高的RF电压，可以将上拉电极定位在悬臂上方以帮助将悬臂从接触电极拉出。
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10.发明授权Device containing plurality of smaller MEMS devices in place of a larger MEMS device 有权装置包含多个较小的MEMS器件代替较大的MEMS器件公开(公告)号：US08861218B2
公开(公告)日：2014-10-14
申请号：US12614929
申请日：2009-11-09
申请人： Charles Gordon Smith , Richard L. Knipe , Vikram Joshi , Roberto Gaddi , Anartz Unamuno , Robertus Petrus Van Kampen
发明人： Charles Gordon Smith , Richard L. Knipe , Vikram Joshi , Roberto Gaddi , Anartz Unamuno , Robertus Petrus Van Kampen
IPC分类号： H05K1/18 , H01G5/40 , G01P15/135 , H01G5/18 , B81B7/04 , G01P15/125 , G01P15/08
CPC分类号： B81B7/04 , B81B2201/0221 , B81B2201/0235 , B81B2207/053 , G01P15/0802 , G01P15/125 , G01P15/135 , H01G5/18 , H01G5/40
摘要： Embodiments disclosed herein generally include using a large number of small MEMS devices to replace the function of an individual larger MEMS device or digital variable capacitor. The large number of smaller MEMS devices perform the same function as the larger device, but because of the smaller size, they can be encapsulated in a cavity using complementary metal oxide semiconductor (CMOS) compatible processes. Signal averaging over a large number of the smaller devices allows the accuracy of the array of smaller devices to be equivalent to the larger device. The process is exemplified by considering the use of a MEMS based accelerometer switch array with an integrated analog to digital conversion of the inertial response. The process is also exemplified by considering the use of a MEMS based device structure where the MEMS devices operate in parallel as a digital variable capacitor.
摘要翻译： 本文公开的实施例通常包括使用大量的小MEMS器件来代替单个更大的MEMS器件或数字可变电容器的功能。 大量较小的MEMS器件具有与较大器件相同的功能，但是由于尺寸较小，因此可以使用互补金属氧化物半导体（CMOS）兼容工艺封装在腔中。 通过大量较小器件的信号平均，允许较小器件阵列的精度等同于较大的器件。 通过考虑使用具有惯性响应的集成模数转换的基于MEMS的加速度计开关阵列来举例说明该过程。 还通过考虑使用MEMS器件结构（其中MEMS器件并行地作为数字可变电容器）来使用该过程。
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