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公开(公告)号：US20140238828A1
公开(公告)日：2014-08-28
申请号：US14240670
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
CPC分类号： H01H59/0009 , B81B3/0097 , B81B7/04 , B81B2201/018 , B81B2203/0109 , B81B2203/0118 , B81B2203/0172 , B81B2203/0307
摘要： The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
摘要翻译： 本发明一般涉及具有多个悬臂的MEMS装置，所述多个悬臂在锚定区域中耦合在一起，和/或通过腿连接在悬臂的中心区域中。 腿部确保每个悬臂可以在相同电压下从RF电极上方移动/释放。 锚定区域联接器匹配悬臂的所有部分中的机械刚度，使得所有悬臂移动在一起。
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公开(公告)号：US08488230B2
公开(公告)日：2013-07-16
申请号：US12862036
申请日：2010-08-24
IPC分类号： G02B26/00
CPC分类号： G02B26/0833 , B81B2201/042 , B81C1/00317 , B81C2203/0136 , B81C2203/0145 , G02B26/0841
摘要： The current disclosure shows how to make a fast switching array of mirrors for projection displays. Because the mirror does not have a via in the middle connecting to the underlying spring support, there is an improved contrast ratio that results from not having light scatter off the legs or vias like existing technologies. Because there are no supporting contacts, the mirror can be made smaller making smaller pixels that can be used to make higher density displays. In addition, because there is not restoring force from any supporting spring support, the mirror stays in place facing one or other direction due to adhesion. This means there is no need to use a voltage to hold the mirror in position. This means that less power is required to run the display.
摘要翻译： 目前的公开内容显示了如何制造用于投影显示器的反射镜的快速切换阵列。 因为反射镜在连接到下面的弹簧支撑件的中间没有通孔，所以具有改善的对比度，这是由于不像现有技术那样从腿部或通孔没有光散射。 因为没有支撑触点，镜子可以做得更小，从而可以用较小的像素来制作更高密度的显示器。 另外，由于没有来自任何支撑弹簧支撑件的恢复力，因为粘附，反射镜保持在面向一个或另一个方向的位置。 这意味着不需要使用电压将镜子保持在适当的位置。 这意味着运行显示器需要较少的电力。
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公开(公告)号：US07252395B2
公开(公告)日：2007-08-07
申请号：US11372686
申请日：2006-03-10
IPC分类号： G02B26/00
CPC分类号： B81B3/0035 , G02B26/0841 , Y10T428/22
摘要： A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.
摘要翻译： 制造在半导体衬底上的微镜阵列。 该阵列由三个操作层组成。 在衬底上制造寻址层。 铰链层通过气隙在寻址层上方间隔开。 镜层通过第二气隙在铰链层上间隔开。 铰链层具有在镜子下方并附接到铰链上的铰链，铰链允许镜子倾斜。 铰链层还具有在镜下的弹簧尖端，其附接到寻址层。 这些弹簧尖端为镜子提供了固定的着陆面。
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公开(公告)号：US5835336A
公开(公告)日：1998-11-10
申请号：US818466
申请日：1997-02-24
CPC分类号： H02N1/006 , G02B26/0841
摘要： A method of operating a micromechanical device. The device is in a first state. Data for the next state of the device is loaded onto the activation circuitry of the device, where the next state may be the same state the device is currently in, or a state different from the first state. The equilibrium of the device is shifted away from the next state, by making the data appear complementary to the true data for the next state. When the trapping field is removed or lowered, and a signal to start the transition is provided, the device moves to its new state and the trapping field is reapplied. The data can be made to look complementary by either loading the complements to the true data, or by reversing the polarity of the trapping field.
摘要翻译： 一种操作微机械装置的方法。 设备处于第一状态。 设备的下一状态的数据被加载到设备的激活电路上，其中下一状态可能是设备当前处于相同状态，或者与第一状态不同的状态。 通过使数据与下一个状态的真实数据互补，器件的平衡从下一个状态转移。 当捕获场被去除或降低，并且提供开始转变的信号时，装置移动到其新状态并重新应用捕获场。 可以通过将补充物加载到真实数据或通过反转捕获场的极性来使数据看起来互补。
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公开(公告)号：US5739941A
公开(公告)日：1998-04-14
申请号：US504861
申请日：1995-07-20
申请人： Richard L. Knipe , Douglas A. Webb
发明人： Richard L. Knipe , Douglas A. Webb
CPC分类号： G02B26/0841
摘要： A non-linear torsion hinge (12, 22) for a micro-mechanical device (10, 20) having a hinged movable element (11, 21). Each hinge (22) is comprised of two hinge strips (22a) spaced apart in the same plane, such that the axis of rotation of at least one of the hinge strips (22a) is different from the axis of rotation of the movable element (21). As a result, the hinge strip (22a) must elongate as it twists, thereby providing a greater restoring torque.
摘要翻译： 一种用于具有铰链可移动元件（11,21）的微机械装置（10,20）的非线性扭转铰链（12,22）。 每个铰链（22）由在相同平面中间隔开的两个铰链条（22a）组成，使得至少一个铰链条（22a）的旋转轴线不同于可移动元件的旋转轴线 21）。 结果，铰链条（22a）在其扭曲时必须伸长，从而提供更大的恢复扭矩。
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公开(公告)号：US4026775A
公开(公告)日：1977-05-31
申请号：US631758
申请日：1975-11-13
CPC分类号： C25D13/22
摘要： This invention relates to an improved method and system for controlling the temperature of an electrocoating bath wherein the bath is passed through a heat exchanger wherein the heat exchange surfaces in contact with the bath do not exceed 180.degree. F.
摘要翻译： 本发明涉及一种用于控制电泳浴的温度的改进方法和系统，其中浴通过热交换器，其中与浴接触的热交换表面不超过180°F.
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公开(公告)号：US10224164B2
公开(公告)日：2019-03-05
申请号：US14240670
申请日：2012-09-04
申请人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
发明人： Robertus Petrus Van Kampen , Anartz Unamuno , Richard L. Knipe , Roberto Gaddi , Rashed Mahameed
摘要： The present invention generally relates to a MEMS device having a plurality of cantilevers that are coupled together in an anchor region and/or by legs that are coupled in a center area of the cantilever. The legs ensure that each cantilever can move/release from above the RF electrode at the same voltage. The anchor region coupling matches the mechanical stiffness in all sections of the cantilever so that all of the cantilevers move together.
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公开(公告)号：US08289674B2
公开(公告)日：2012-10-16
申请号：US12405758
申请日：2009-03-17
IPC分类号： H01H47/00
CPC分类号： H01H59/0009 , G11C23/00 , H01H1/0036 , H01H2001/0047 , H01H2059/0036 , H01H2059/0054 , H01H2059/0063
摘要： Embodiments disclosed herein generally solve a stiction problem in switching devices by using a series of pulses of force which take the switch from being strongly adhered to a landing electrode to the point where it is only weakly adhered. Once in the low adhesion state, the switch can then be pulled away from contact with a lower force provided by either the spring constant of the switch and/or the electrostatic forces resulting from low voltages applied to nearby electrodes.
摘要翻译： 本文公开的实施例通过使用一系列将开关牢固地粘附到着陆电极到仅弱附着点的力的脉冲来解决开关器件中的静电问题。 一旦处于低附着状态，则可以用由开关的弹簧常数提供的较小的力和/或施加到附近电极的低电压产生的静电力将开关拉离开接触。
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公开(公告)号：US07119940B2
公开(公告)日：2006-10-10
申请号：US11152794
申请日：2005-06-14
申请人： Richard L. Knipe
发明人： Richard L. Knipe
CPC分类号： G02B26/0841 , H04N5/7458
摘要： A capacitively coupled microelectromechanical device and method of operation. The micromechanical device comprises: a semiconductor substrate; a member operable to deflect about a torsion axis to either of at least two states; and a switch driven for selectively connecting the member to a voltage signal. When a logic high signal is stored on the memory capacitor 308, the mirror transistor 310 is turned on, grounding the mirror structure 312. When a logic low signal is stored on the memory capacitor 308, the mirror transistor 310 is turned off, allowing the mirror to float electrically. Mirrors that are tied to a voltage potential, which typically are grounded, are affected by a reset pulse and rotate away from their landed position. When the mirrors have rotated to the opposite side, a bias signal is applied to hold the repositioned mirror in place in the opposite state. Mirrors that electrically are floating do not experience the forces generated by the reset voltage and remain in their previous state. The preceding abstract is submitted with the understanding that it only will be used to assist in determining, from a cursory inspection, the nature and gist of the technical disclosure as described in 37 C.F.R. § 1.72(b). In no case should this abstract be used for interpreting the scope of any patent claims.
摘要翻译： 一种电容耦合微机电装置及其操作方法。 微机械装置包括：半导体衬底; 可操作以围绕扭转轴线偏转至少两个状态中的任何一个的构件; 以及用于选择性地将构件连接到电压信号的开关。 当逻辑高电平信号存储在存储器电容器308上时，反射镜晶体管310导通，使反射镜结构312接地。 当逻辑低电平信号存储在存储电容器308上时，反射镜晶体管310截止，允许反射镜电气浮动。 连接到电压电位（通常为接地）的反射镜受到复位脉冲的影响，并远离其着陆位置旋转。 当镜子旋转到相对侧时，施加偏置信号以将重新定位的镜子保持在相反的状态。 电浮动的反射镜不会经历由复位电压产生的力并保持其先前状态。 提交上述摘要的理解是，它只会用于协助从粗略检查中确定37 C.F.R.描述的技术披露的性质和要点。 §1.72（b）。 在任何情况下，本摘要不得用于解释任何专利权利要求的范围。
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公开(公告)号：US06552840B2
公开(公告)日：2003-04-22
申请号：US09726861
申请日：2000-11-30
申请人： Richard L. Knipe
发明人： Richard L. Knipe
IPC分类号： G02B2600
CPC分类号： G02B26/0841
摘要： An improved micromechanical device, particularly a micromirror device having improved electrostatic efficiency. A deflectable member comprised of a mirror 302 and an active hinge yoke 306 is suspended address 308 and landing electrodes 312 on a substrate 310 and above upper address electrodes supported above the substrate 310. The deflectable member is operable to rotate about a torsion hinge axis in response to an electrostatic force between the address electrodes and the deflectable member. The upper address electrodes have a stair stepped shape to narrow a gap between the deflectable member and the upper address electeodes. The gap is narrower near the axis of rotation 810 compared to away from the axis. The stair stepped shape is achieved by embedding a portion of an oxide layer 804 between a thin metal layer 806 making up the upper address electrodes 806, the active hinge yoke 306, and the torsion hinges, and a thick metal layer 808 making up the upper address electrodes 806 and the active hinge yoke 306.
摘要翻译： 改进的微机械装置，特别是具有改善的静电效率的微镜装置。 由反射镜302和主动铰链轭306组成的可偏转构件是悬挂在基板310上的地址308和着陆电极312，以及支撑在基板310上方的上部地址电极上方。可偏转构件可操作以围绕扭转铰链轴线旋转 响应地址电极和可偏转构件之间的静电力。 上部地址电极具有阶梯形状，以使可偏转构件和上部地址电极之间的间隙变窄。 与远离轴线相比，间隙在旋转轴线810附近更窄。 台阶形状通过将氧化物层804的一部分嵌入在构成上部寻址电极806的薄金属层806，活动铰链轭306和扭转铰链之间，以及构成上层的厚金属层808来实现。 寻址电极806和主动铰链轭306。
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