公开(公告)号：US20180224348A1

公开(公告)日：2018-08-09

申请号：US15424994

申请日：2017-02-06

Applicant: NXP USA, INC.

Inventor： Paige M. Holm ,  Mark Edward Schlarmann

IPC: G01L19/14 ,  G01L9/00 ,  G01L9/06

CPC classification number: G01L19/148 ,  G01L9/0052 ,  G01L9/0054 ,  G01L9/06

Abstract: A pressure sensor includes a diaphragm suspended across a cavity in a substrate. A first group of piezoresistors is provided in the diaphragm, the piezoresistors of the first group being coupled to one another to form a first Wheatstone bridge having first positive and negative output nodes. A second group of piezoresistors is provided in the diaphragm, the piezoresistors of the second group being coupled to one another to form a second Wheatstone bridge having second positive and negative output nodes. The first negative output node of the first Wheatstone bridge is electrically connected to the second positive output node of the second Wheatstone bridge to directly chain the outputs of the Wheatstone bridges. The first and second Wheatstone bridges each produce an output signal as a function of an external pressure stimulus that is combined via the chained arrangement of the Wheatstone bridges to produce a composite output signal.

公开(公告)号：US20230059566A1

公开(公告)日：2023-02-23

申请号：US18045677

申请日：2022-10-11

Applicant: NXP USA, INC.

Inventor： Stephen Ryan Hooper ,  Mark Edward Schlarmann ,  Michael B. Vincent ,  Scott M. Hayes ,  Julien Juéry

IPC: B81B3/00 ,  G01L9/00

Abstract: A no-gel sensor package is disclosed. In one embodiment, the package includes a microelectromechanical system (MEMS) die having a first substrate, which in turn includes a first surface on which is formed a MEMS device. The package also includes a polymer ring with an inner wall extending between first and second oppositely facing surfaces. The first surface of the polymer ring is bonded to the first surface of the first substrate to define a first cavity in which the MEMS device is contained. A molded compound body having a second cavity that is concentric with the first cavity, enables fluid communication between the MEMS device and an environment external to the package.

公开(公告)号：US20210221671A1

公开(公告)日：2021-07-22

申请号：US16744577

申请日：2020-01-16

Applicant: NXP USA, Inc.

Inventor： Stephen Ryan Hooper ,  Mark Edward Schlarmann ,  Michael B. Vincent ,  Scott M. Hayes ,  Julien Juéry

IPC: B81B3/00 ,  G01L9/00

Abstract: A no-gel sensor package is disclosed. In one embodiment, the package includes a microelectromechanical system (MEMS) die having a first substrate, which in turn includes a first surface on which is formed a MEMS device. The package also includes a polymer ring with an inner wall extending between first and second oppositely facing surfaces. The first surface of the polymer ring is bonded to the first surface of the first substrate to define a first cavity in which the MEMS device is contained. A molded compound body having a second cavity that is concentric with the first cavity, enables fluid communication between the MEMS device and an environment external to the package.

公开(公告)号：US10260981B2

公开(公告)日：2019-04-16

申请号：US15424994

申请日：2017-02-06

Applicant: NXP USA, INC.

Inventor： Paige M. Holm ,  Mark Edward Schlarmann

IPC: G01L19/14 ,  G01L9/00 ,  G01L9/06

Abstract: A pressure sensor includes a diaphragm suspended across a cavity in a substrate. A first group of piezoresistors is provided in the diaphragm, the piezoresistors of the first group being coupled to one another to form a first Wheatstone bridge having first positive and negative output nodes. A second group of piezoresistors is provided in the diaphragm, the piezoresistors of the second group being coupled to one another to form a second Wheatstone bridge having second positive and negative output nodes. The first negative output node of the first Wheatstone bridge is electrically connected to the second positive output node of the second Wheatstone bridge to directly chain the outputs of the Wheatstone bridges. The first and second Wheatstone bridges each produce an output signal as a function of an external pressure stimulus that is combined via the chained arrangement of the Wheatstone bridges to produce a composite output signal.

公开(公告)号：US12012328B2

公开(公告)日：2024-06-18

申请号：US17246986

申请日：2021-05-03

Applicant: NXP USA, Inc.

Inventor： Chad Dawson ,  Mark Edward Schlarmann ,  Stephen Ryan Hooper ,  Colin Bryant Stevens

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0058 ,  B81C1/00325 ,  B81B2201/0264 ,  B81B2207/07

Abstract: A device package includes a die that includes a substrate having first and second surfaces. A sensor is formed at a sensor region of the first surface. A trench extends entirely through the substrate between the first and second surfaces, in which the trench at least partially surrounds the sensor region. An isolation material, formed at the first surface, may extend across the trench A ring structure is coupled to the first surface of the substrate to create a first cavity in which the sensor is contained, the ring structure being laterally displaced away from and surrounding the sensor region and the trench. A molded compound body may abut an outer wall of the ring structure. The molded compound body has a second cavity that is concentric with the first cavity to enable fluid communication between the sensor and an environment external to the device package.

公开(公告)号：US11760623B2

公开(公告)日：2023-09-19

申请号：US18045677

申请日：2022-10-11

Applicant: NXP USA, INC.

Inventor： Stephen Ryan Hooper ,  Mark Edward Schlarmann ,  Michael B. Vincent ,  Scott M. Hayes ,  Julien Juéry

IPC: B81B3/00 ,  G01L9/00

CPC classification number: B81B3/0018 ,  G01L9/0072 ,  B81B2201/0264 ,  B81B2203/0118 ,  B81B2203/0172

Abstract: A no-gel sensor package is disclosed. In one embodiment, the package includes a microelectromechanical system (MEMS) die having a first substrate, which in turn includes a first surface on which is formed a MEMS device. The package also includes a polymer ring with an inner wall extending between first and second oppositely facing surfaces. The first surface of the polymer ring is bonded to the first surface of the first substrate to define a first cavity in which the MEMS device is contained. A molded compound body having a second cavity that is concentric with the first cavity, enables fluid communication between the MEMS device and an environment external to the package.

公开(公告)号：US11498829B2

公开(公告)日：2022-11-15

申请号：US16744577

申请日：2020-01-16

Applicant: NXP USA, Inc.

Inventor： Stephen Ryan Hooper ,  Mark Edward Schlarmann ,  Michael B. Vincent ,  Scott M. Hayes ,  Julien Juéry

IPC: B81B3/00 ,  G01L9/00

Abstract: A no-gel sensor package is disclosed. In one embodiment, the package includes a microelectromechanical system (MEMS) die having a first substrate, which in turn includes a first surface on which is formed a MEMS device. The package also includes a polymer ring with an inner wall extending between first and second oppositely facing surfaces. The first surface of the polymer ring is bonded to the first surface of the first substrate to define a first cavity in which the MEMS device is contained. A molded compound body having a second cavity that is concentric with the first cavity, enables fluid communication between the MEMS device and an environment external to the package.

公开(公告)号：US20220348456A1

公开(公告)日：2022-11-03

申请号：US17246986

申请日：2021-05-03

Applicant: NXP USA, Inc.

Inventor： Chad Dawson ,  Mark Edward Schlarmann ,  Stephen Ryan Hooper ,  Colin Bryant Stevens

IPC: B81B7/00 ,  B81C1/00

Abstract: A device package includes a die that includes a substrate having first and second surfaces. A sensor is formed at a sensor region of the first surface. A trench extends entirely through the substrate between the first and second surfaces, in which the trench at least partially surrounds the sensor region. An isolation material, formed at the first surface, may extend across the trench A ring structure is coupled to the first surface of the substrate to create a first cavity in which the sensor is contained, the ring structure being laterally displaced away from and surrounding the sensor region and the trench. A molded compound body may abut an outer wall of the ring structure. The molded compound body has a second cavity that is concentric with the first cavity to enable fluid communication between the sensor and an environment external to the device package.

公开(公告)号：US09818656B1

公开(公告)日：2017-11-14

申请号：US15602250

申请日：2017-05-23

Applicant: NXP USA, Inc.

Inventor： Mark Edward Schlarmann ,  Dwight Lee Daniels ,  Stephen Ryan Hooper ,  Chad Dawson ,  Fengyuan Li

IPC: H01L21/673 ,  H01L21/66 ,  H01L23/00 ,  H01L23/495 ,  H01L21/56 ,  H01L21/48 ,  H01L23/31 ,  H01L25/065 ,  H01L25/00 ,  H01L21/78 ,  G01R31/28

CPC classification number: H01L22/14 ,  H01L21/561 ,  H01L21/67309 ,  H01L21/78 ,  H01L22/20 ,  H01L22/32 ,  H01L23/3107 ,  H01L23/4951 ,  H01L23/49541 ,  H01L24/32 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L24/83 ,  H01L24/85 ,  H01L24/92 ,  H01L24/97 ,  H01L25/0655 ,  H01L25/50 ,  H01L2224/32245 ,  H01L2224/48091 ,  H01L2224/48106 ,  H01L2224/48137 ,  H01L2224/48247 ,  H01L2224/73265 ,  H01L2224/92247 ,  H01L2924/14 ,  H01L2924/1461 ,  H01L2924/00

Abstract: A method of testing includes attaching a first and second die to first and second die sites of a lead frame and forming a plurality of wire bonds coupling a plurality of pins of the first die site to the first die and a plurality of pins of the second die site to the second die. The first and second die are encapsulated. An isolation cut is performed to isolate the plurality of pins of the first die site from the plurality of pins of the second die site, while maintaining electrical connection between the first tie bar of the first die site and the first tie bar of the second die site. The first and second die are tested while providing a first power supply source to the first and second die via the first tie bars. After testing, the dies sites are fully singulated to result in packaged IC device.